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    • 4. 发明申请
    • Particle detection device, lithographic apparatus and device manufacturing method
    • 粒子检测装置,光刻设备及器件制造方法
    • US20060072108A1
    • 2006-04-06
    • US11242146
    • 2005-10-04
    • Johannes OnvleeRaimond VisserPeter GreveJohannes FranssenErwin Verhagen
    • Johannes OnvleeRaimond VisserPeter GreveJohannes FranssenErwin Verhagen
    • G01N21/88
    • G03F7/70916G01N21/94G01N21/956G03F7/7085
    • To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level. The detector system may include a radiation detector device configured to generate the first detector signal in response to radiation incident on at least one predetermined part of the radiation detector device and a radiation blocking assembly configured to prevent radiation not originating from a particle from being incident on the predetermined part of the detector device.
    • 为了能够区分粒子和重影粒子,检测器系统从实际粒子的辐射中解析来自重影粒子的辐射。 检测器系统输出对应于入射在检测器系统的不同部分上的辐射强度的至少两个检测器信号,或者检测器系统输出对应于不同波长的辐射强度入射在检测器系统上的至少两个检测器信号。 如果从重影粒子接收到辐射,则并非所述至少两个检测器信号中的每一个具有高于预定阈值电平的电平,而从粒子接收的辐射导致信号具有高于阈值电平的基本上相同的电平。 检测器系统可以包括辐射检测器装置,其被配置为响应于入射到辐射检测器装置的至少一个预定部分上的辐射而产生第一检测器信号;以及辐射阻挡组件,其被配置为防止不是源自颗粒的辐射被入射 检测器装置的预定部分。