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1. 发明授权

US5248876A Tandem linear scanning confocal imaging system with focal volumes at different heights 失效
标题翻译：串联线性扫描共聚焦成像系统，焦点体积不同
公开(公告)号：US5248876A
公开(公告)日：1993-09-28
申请号：US871458
申请日：1992-04-21
申请人： Pieter J. Kerstens , Jon R. Mandeville , Frederick Y. Wu
发明人： Pieter J. Kerstens , Jon R. Mandeville , Frederick Y. Wu
IPC分类号： G01B11/22 , G01B9/04 , G01B11/06 , G01B11/24 , G01B11/245 , G01N21/88 , G02B6/04 , G02B21/00
CPC分类号： G01B11/0608 , G01B9/04 , G02B21/004 , G02B6/04
摘要： A confocal imaging system utilizes an opaque mask with a slit and a row of pinpoint sensors or utilizes an opaque mask with a skewed pattern of pinholes and an array of isolated pinpoint sensors in a matching pattern in order to obtain sufficient data to provide a complete image for imaging and/or inspecting an object such as electronics in a single one-dimensional scan. The system also simultaneously produces multiple images at different heights in the single one-dimensional scan of the viewed object, and also simultaneously produces images taken in different spectral bands in the same one-dimensional scan of the object to be imaged and/or inspected. The relative height or depth of the different images can be modified by simply adjusting the inclination between the confocal imaging system and a path followed by the object that is to be imaged and/or inspected during the one-dimensional scan. The optical confocal imaging system requires no moving parts and the only moving parts of the system are for motorized conveying of the object to be imaged and/or inspected along the path. In one arrangement of the confocal imaging system, color imaging and/or inspecting of the object can be performed. In another arrangement of the confocal imaging system, simultaneous brightfield and darkfield imaging and/or inspecting of an object can be performed.
摘要翻译：共焦成像系统利用具有狭缝和一排精密点传感器的不透明掩模，或者利用具有倾斜的针孔图案的不透明掩模和匹配图案中的孤立精密点传感器阵列，以便获得足够的数据以提供完整的图像用于在单个一维扫描中成像和/或检查诸如电子设备的对象。该系统还在被观看对象的单次一维扫描中同时产生不同高度的多个图像，并且同时产生在要成像和/或检查的对象的相同一维扫描中在不同光谱带中拍摄的图像。可以通过简单地调整共焦成像系统和在一维扫描期间要被成像和/或检查的物体所遵循的路径之间的倾斜度来修改不同图像的相对高度或深度。光学共焦成像系统不需要移动部件，并且系统的唯一移动部件用于沿着路径机动地传送待成像和/或检查的物体。在共焦成像系统的一种布置中，可以执行对象的彩色成像和/或检查。在共焦成像系统的另一种布置中，可以执行同时的明场成像和/或对物体的检查。

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