会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明公开
    • Scanning optical microscope
    • Optisches Rastermikroskop。
    • EP0300571A1
    • 1989-01-25
    • EP88201517.5
    • 1988-07-14
    • Philips Electronics N.V.
    • Smid, AlbertAkkermans, Antonius Hermanus MariaBenschop, Jozef Petrus HenricusRooyackers, Cornelis Jozef Petrus Maria
    • G02B21/00G02B26/10
    • G02B21/002
    • In a scanning optical microscope a beam splitter (120) is arranged in the radiation path of the scanning beam with which splitter a reference beam synchronously moving with the scanning spot (21) is split off to a reference plane (140). The movement of the scanning spot (21) can be checked by measuring, with the aid of a radiation detector (160), the movement of a reference spot (121) formed by the reference beam in the reference plane. In this way an accurate determination of the position of the scanning spot (21) is possible while using simple beam-deflecting elements (40,42) having a relatively low accuracy. A cylindrical lens (131) gives the scanning spot the shape of a line, so that sensitivity to dust and other contaminations on the reference plane is reduced considerably.
    • 在扫描光学显微镜中,分束器(120)布置在扫描光束的辐射路径中,与扫描光点(21)同步移动的参考光束与分束器分离成参考平面(140)。 可以通过借助于辐射检测器(160)测量由参考光束在参考平面中形成的参考点(121)的移动来检查扫描点(21)的运动。 以这种方式,可以使用具有相对较低精度的简单的光束偏转元件(40,42)来准确地确定扫描光点(21)的位置。 柱面透镜(131)使扫描点成为一条线的形状,使得对参考平面上的灰尘和其它污染物的敏感度显着降低。