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    • 10. 发明公开
    • Radiation-beam manipulator having a pretensioned thrust bearing
    • Strahlmanipulator mit vorgespanntem Axiallager
    • EP0977066A1
    • 2000-02-02
    • EP99202317.6
    • 1999-07-14
    • Koninklijke Philips Electronics N.V.
    • Verhoeven, Erik Cornelis MariaDankers, Johannes Adrianus HendrikJansen, Gerardus Lucien MathildusRaaijmakers, RonaldHafez, Moustapha
    • G02B7/182
    • G02B7/1821
    • The invention relates to a radiation-beam manipulator (1) comprising a first part (3) and a second part (7) with a mirror surface (21) which is pivotable relative to the first part about at least one pivot axis (29,31). The manipulator further comprises a system of actuators (35,37,39,41) for pivoting the second part about said pivot axis, said system of actuators comprising a system of electric coils (43,45,47,49) and a system of permanent magnets (51,53,55,57) co-operating with the system of coils. In accordance with the invention, the second part is pivotably journaled relative to the first part by means of a bearing (5,9) comprising a thrust surface (15) and a further bearing part (25) co-operating with said thrust surface, which further bearing part is pretensioned relative to the thrust surface by means of a system of magnetizable elements (59,61,63,65) exerting a magnetic pretension force upon the permanent magnets of the system of actuators parallel to a support axis (67) of the bearing. The magnetizable elements also exert a magnetic torque (M z ) upon said permanent magnets about said support axis.
      The manipulator is used in a laser-processing device (69) for selectively deflecting a laser beam (93) to a piece of work (75) to be processed.
    • 本发明涉及一种包括第一部分(3)和第二部分(7)的辐射束操纵器(1),第二部分(7)具有镜表面(21),该反射镜表面可相对于第一部分围绕至少一个枢转轴线 31)。 所述操纵器还包括用于使所述第二部分围绕所述枢转轴线枢转的致动器系统(35,37,39,41),所述致动器系统包括电线圈系统(43,45,47,49)和系统 永久磁铁(51,53,55,57)与线圈系统配合使用。 根据本发明,第二部分通过包括推力表面(15)的轴承(5,9)和与所述推力表面配合的另一个轴承部分(25)相对于第一部分枢转地轴颈, 所述另外的轴承部分借助于可平行于支撑轴线(67)的致动器系统的永磁体施加磁力预紧力的可磁化元件(59,61,63,65)的系统相对于推力表面预拉伸, 的轴承。 可磁化元件还在所述永磁体周围围绕所述支撑轴线施加磁力矩(Mz)。 操纵器用于激光处理装置(69)中,用于选择性地将激光束(93)偏转到待处理的工件(75)。