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1. 发明申请

US20070158291A1 RETICLE STORAGE POD (RSP) TRANSPORT SYSTEM UTILIZING FOUP ADAPTER PLATE 失效
标题翻译：使用FOUP适配板的物品存储POD（RSP）运输系统
公开(公告)号：US20070158291A1
公开(公告)日：2007-07-12
申请号：US11306708
申请日：2006-01-09
申请人： Philip Campbell , David Pinckney , Edward Sherwood , Uldis Ziemins
发明人： Philip Campbell , David Pinckney , Edward Sherwood , Uldis Ziemins
IPC分类号： B65G1/00 , B66C17/06
CPC分类号： H01L21/67769 , H01L21/67276 , H01L21/67359 , H01L21/67379 , H01L21/68707 , Y10S414/14
摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造位置中使用现有设备，其仅需要对设备进行最小修改，以使后者普遍适用于系统的组合。

2. 发明申请

US20070128010A1 AN APPARATUS FOR POD TRANSPORTATION WITHIN A SEMICONDUCTOR FABRICATION FACILITY 审中-公开
标题翻译：用于半导体制造设备中的POD运输的装置
公开(公告)号：US20070128010A1
公开(公告)日：2007-06-07
申请号：US11164793
申请日：2005-12-06
申请人： Jeffrey Gifford , David Pinckney , Benjamin Wheeler , Uldis Ziemins
发明人： Jeffrey Gifford , David Pinckney , Benjamin Wheeler , Uldis Ziemins
IPC分类号： B65G47/90 , B65G1/00
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： The invention is directed to an improved apparatus and method for transportation of a pod in a semiconductor fabrication facility. The invention comprises a lead vehicle with a communication system and control system and a trailer with a mechanism for delivering and receiving pods from stations in the facility. The trailer is connected to the lead vehicle and has a compartment for the transportation of a pod, but comprises fewer components than the lead vehicle. Therefore, the invention is manufactured at reduced cost, but with double pod transportation capacity.
摘要翻译：本发明涉及一种用于在半导体制造设备中运输荚的改进的装置和方法。本发明包括具有通信系统和控制系统的牵引车和具有用于从设施中的车站传送和接收舱的机构的拖车。拖车连接到引导车辆，并具有用于运输荚的隔间，但是包括比引车更少的部件。因此，本发明以低成本制造，但具有双荚运输能力。

3. 发明申请

US20070160448A1 RECEIPT AND DELIVERY CONTROL SYSTEM FOR FRONT OPENING UNIFIED AND RETICLE STORAGE PODS 审中-公开
标题翻译：接收和传送控制系统，用于开启统一和虚拟存储荚
公开(公告)号：US20070160448A1
公开(公告)日：2007-07-12
申请号：US11306679
申请日：2006-01-06
申请人： Benjamin Wheeler , Jeffrey Gifford , David Pinckney , Uldis Ziemins
发明人： Benjamin Wheeler , Jeffrey Gifford , David Pinckney , Uldis Ziemins
IPC分类号： H01L21/677
CPC分类号： H01L21/67276
摘要： The invention is directed to a method and system for pod transportation within a semiconductor fabrication facility. The invention comprises a material control system that determines a pod that a station will require next and then sends an instruction to a vehicle to receive the pod that the station currently has and deliver the pod that the station will require next. The invention reduces cycle time by minimizing transportation moves of vehicles within the semiconductor fabrication facility.
摘要翻译：本发明涉及一种用于半导体制造设备内的荚运输的方法和系统。本发明包括一个物料控制系统，其确定车站将需要接下来的车厢，然后向车辆发送指令以接收车站当前拥有的车厢，并且发送车站下一步需要的车厢。本发明通过最小化半导体制造设备内的车辆的运输移动来减少循环时间。

4. 发明申请

US20070039513A1 CONTOUR ADAPTING ACTIVE PARTICULATE COLLECTION SYSTEM 审中-公开
标题翻译： CONTOUR适应活性颗粒收集系统
公开(公告)号：US20070039513A1
公开(公告)日：2007-02-22
申请号：US11161790
申请日：2005-08-17
申请人： David Pinckney , Ray Reyes , David Schmoke , Uldis Ziemins
发明人： David Pinckney , Ray Reyes , David Schmoke , Uldis Ziemins
IPC分类号： B61F19/00
CPC分类号： B61B3/02 , E01H8/105
摘要： A contour-adaptive particulate material collecting system and method of utilization thereof employed in a facility for the cleaning of an overhead support rail for overhead transport (OHT) vehicles, utilizing a cleaning apparatus which is coupled to an existing overhead transportation vehicle so as to be towed thereby, and wherein the apparatus removes foreign or contaminant materials (FM) from the overhead support rail, which is produced during operation of the facility and by normal wear from internal moving components of the OHT vehicle during operation of the latter.
摘要翻译：一种轮廓适应性颗粒材料收集系统及其使用方法，用于清理塔顶运输（OHT）车辆的架空支撑轨道的设施，利用与现有架空运输车辆相连的清洁设备，并且其中所述设备从设备运行期间产生的架空支撑轨道上除去异物或污染物质（FM），并且在运行期间通过OHT车辆的内部运动部件的正常磨损。

5. 发明申请

US20050079041A1 HOISTING DEVICE FOR USE WITH OVERHEAD TRAVELING CARRIAGE SYSTEM 审中-公开
标题翻译：使用超越行驶运输系统的装置
公开(公告)号：US20050079041A1
公开(公告)日：2005-04-14
申请号：US10605606
申请日：2003-10-13
申请人： Philip Campbell , Ray Reyes , Uldis Ziemins
发明人： Philip Campbell , Ray Reyes , Uldis Ziemins
IPC分类号： B65G1/00 , B66C13/06 , H01L21/677 , H01L21/687
CPC分类号： H01L21/6773 , B66C13/06 , H01L21/67733 , H01L21/67736 , H01L21/67775 , H01L21/68707
摘要： A hoisting method and device for use in an overhead traveling carriage system are disclosed. The hoisting device includes an engager for engaging an object and a linearly expandable structure coupling the engager to a base point. A single hoist member is coupled at a first end to the engager and at a second end to a motorized drum, coupled to the base point, for substantially vertically retracting and extending the single member. Since a single hoist member is used, the amount of precision machining and technician training are reduced. The linearly expandable structure includes at least one lazy-tong linkage or a telescoping structure, which provides sway stability and compactness. The invention may also include a six-degree adjustment structure that may include a feedback system for use with the linearly expandable structure to provide increased accuracy.
摘要翻译：公开了一种用于高架行驶车系统的起重方法和装置。提升装置包括用于接合物体的接合器和将接合器连接到基点的线性可扩展结构。单个起重构件在第一端处耦合到接合器，并且在第二端处联接到联接到基点的电动鼓，用于基本上垂直地缩回和延伸单个构件。由于使用单个起重机构，所以减少了精密加工和技术人员的培训。线性可扩展结构包括至少一个惰性连杆或伸缩结构，其提供摇摆稳定性和紧凑性。本发明还可以包括六度调节结构，其可以包括与线性可扩展结构一起使用的反馈系统以提供更高的精度。

6. 发明申请

US20060278120A1 APPARATUS AND METHOD FOR STEERING TRANSPORT VEHICLES IN SEMICONDUCTOR PROCESSING 失效
标题翻译：用于在半导体加工中转向运输车辆的装置和方法
公开(公告)号：US20060278120A1
公开(公告)日：2006-12-14
申请号：US11160111
申请日：2005-06-09
申请人： Philip Campbell , Uldis Ziemins
发明人： Philip Campbell , Uldis Ziemins
IPC分类号： B61K1/00
CPC分类号： H01L21/67709 , H01L21/67715 , H01L21/67724
摘要： A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.
摘要翻译：实现了一种转向装置和方法，其允许半导体晶片或光刻掩模版在车辆轨道上的各个位置上的运输车辆上高速，清洁，无颗粒地传输，特别是在进入和离开转弯时。三个计算机控制的电磁体安装在前转向车的左，中，右侧，并被通电以吸引安装在车辆进入或离开转弯的轨道一侧的策略性放置的永久磁铁材料。运输车辆可以由气垫悬挂或在车轮上行驶，并且通过围绕轨道的电动或电磁力来控制。使用转向电磁铁作为LVDT，计算机处理器监视运输车辆围绕轨道的位置。

7. 发明申请

US20060069470A1 BI-DIRECTIONAL ABSOLUTE AUTOMATED TRACKING SYSTEM FOR MATERIAL HANDLING 审中-公开
标题翻译：用于材料处理的双向绝对自动跟踪系统
公开(公告)号：US20060069470A1
公开(公告)日：2006-03-30
申请号：US10711696
申请日：2004-09-30
申请人： Philip Campbell , Jeffrey Gifford , Uldis Ziemins
发明人： Philip Campbell , Jeffrey Gifford , Uldis Ziemins
IPC分类号： G06F19/00
CPC分类号： G05B19/41895 , G05B2219/31003 , G05B2219/31006 , G05D1/0244 , G05D1/0278 , G05D1/0289 , G05D2201/0216 , Y02P90/285 , Y02P90/60
摘要： Communication between a controller and a set of automated vehicles in a manufacturing facility is improved by use of a closed-loop control system that operates on a real-time interrupt basis in which autonomous carriers report their location, sensed from reference markers along a track, the reference markers being referenced to an absolute grid in space, to a central controller or to one of a set of zone controllers that monitor the location of nearby vehicles that ordinarily use a token-passing system to avoid collisions, but which controllers can intervene to prevent one vehicle from blocking or interfering with another.
摘要翻译：通过使用在实时中断基础上操作的闭环控制系统来改善控制器与制造设施中的一组自动车辆之间的通信，其中自主载波报告其位置，沿着轨道从参考标记中感测到，参考标记被引用到空间中的绝对网格，中央控制器或一组区域控制器中的一个，该区域控制器监视通常使用令牌传递系统以避免冲突的附近车辆的位置，但是哪些控制器可以介入防止一辆车辆阻挡或干扰另一辆车。

8. 发明申请

US20050246077A1 AUTOMATION SYSTEM USING WIRELESS HIGH FREQUENCY 失效
标题翻译：自动化系统使用无线高频
公开(公告)号：US20050246077A1
公开(公告)日：2005-11-03
申请号：US10709351
申请日：2004-04-29
申请人： Philip Campbell , Francis Szenher , Uldis Ziemins
发明人： Philip Campbell , Francis Szenher , Uldis Ziemins
IPC分类号： G06F19/00 , H04B1/713
CPC分类号： H04B1/713 , H04W16/14
摘要： Communication between a controller and a set of automated vehicles is improved by use of an RF link that employs a high frequency spread spectrum modem that establishes a low noise link in a high noise industrial environment and also shares the relevant frequency range with a wireless telephone system.
摘要翻译：通过使用RF链路来改善控制器和一组自动车辆之间的通信，所述RF链路采用在高噪声工业环境中建立低噪声链路并且还与无线电话系统共享相关频率范围的高频扩频调制解调器。

9. 发明申请

US20070114505A1 HOISTING APPARATUS 有权
标题翻译：装置装置
公开(公告)号：US20070114505A1
公开(公告)日：2007-05-24
申请号：US11163835
申请日：2005-11-01
申请人： Ray Reyes , David Schmoke , Uldis Ziemins
发明人： Ray Reyes , David Schmoke , Uldis Ziemins
IPC分类号： B66D1/26
CPC分类号： B66C13/06
摘要： A cable attachment assembly, a hoist and a transportation system using the cable attachment assembly. The cable attachment assembly including: a plate pivotable about a first axis; first and second pivot assemblies pivotable about respective second and third axes, the first, second and third axes parallel to each other; a first cable retainer in the first pivot assembly, the first cable retainer adapted to rotateably retain an end of a first cable in the first cable pivot assembly, the first cable rotatable about a fourth axis; a second cable retainer in the second pivot assembly, the second cable retainer adapted to rotateably retain an end of a second cable in the second pivot assembly, the second cable rotatable about a fifth axis; wherein the fourth and fifth axes parallel to each other and the fourth and fifth axes are perpendicular to the first, second and third axis.
摘要翻译：电缆连接组件，起重机和使用电缆连接组件的运输系统。所述电缆连接组件包括：可围绕第一轴线枢转的板; 第一枢转组件和第二枢轴组件可围绕相应的第二和第三轴线枢转，第一，第二和第三轴线彼此平行; 所述第一电缆保持器在所述第一枢转组件中，所述第一电缆保持器适于将第一电缆的端部可旋转地保持在所述第一电缆枢轴组件中，所述第一电缆可围绕第四轴线旋转; 在第二枢转组件中的第二电缆保持器，第二电缆保持器适于将第二电缆的端部可旋转地保持在第二枢转组件中，第二电缆可围绕第五轴线旋转; 其中第四和第五轴彼此平行，第四和第五轴垂直于第一轴，第二轴和第三轴。

10. 发明申请

US20050073318A1 Overhead traveling vehicle testing and calibration 有权
标题翻译：架空旅行车辆测试和校准
公开(公告)号：US20050073318A1
公开(公告)日：2005-04-07
申请号：US10669849
申请日：2003-09-24
申请人： Nicholas Ciminello , Ray Reyes , David Schmoke , Uldis Ziemins
发明人： Nicholas Ciminello , Ray Reyes , David Schmoke , Uldis Ziemins
IPC分类号： G01M17/08 , H01L21/677 , G01R31/14
CPC分类号： H01L21/67706 , G01M17/08 , H01L21/67733 , H01L21/67736
摘要： A method, system and test fixture for allowing testing and calibration of various operation parameters of an overhead traveling vehicle (hereinafter “OTV”) are disclosed. The invention implements a test fixture that includes a rotatable bearing set for rotatably engaging a wheel of the OTV such that the wheel can rotate but the OTV remains stationary. The bearing set is held in a raised position, similar to the operational position of the OTV, by a raised support. The test fixture may also include a reflective tape for use with an optical sensor(s) of the OTV. In this fashion, operation parameters of the OTV such as drive servomotor velocity, current gain, current offset, OTV travel profile, optical sensor op-amp gain, etc., can be tested and calibrated.
摘要翻译：公开了一种用于允许对高架行驶车辆（以下称为“OTV”）的各种操作参数进行测试和校准的方法，系统和测试夹具。本发明实施了一种测试夹具，其包括可旋转地接合OTV的轮的可旋转轴承组，使得轮可以旋转，但是OTV保持静止。轴承套件由凸起的支撑件保持在与OTV的操作位置相似的升高位置。测试夹具还可以包括与OTV的光学传感器一起使用的反射带。以这种方式，可以测试和校准OTV的操作参数，例如驱动伺服电机速度，电流增益，电流偏移，OTV行驶曲线，光学传感器运算放大器增益等。

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