会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Scanning probe with digitized pulsed-force mode operation and real-time evaluation
    • 扫描探头采用数字化脉冲力模式操作和实时评估
    • US07129486B2
    • 2006-10-31
    • US10433917
    • 2001-12-12
    • Peter SpizigDetlef SanchenJörg FörstnerJoachim KoenenOthmar Marti
    • Peter SpizigDetlef SanchenJörg FörstnerJoachim KoenenOthmar Marti
    • G01N23/00
    • G01Q60/34G01Q10/06G01Q30/04G01Q60/32
    • The invention relates to a method for creating the image of a sample surface to be analyzed, with a resolution which is better than 1 μm laterally in relation to the sample surface and better than 100 nm vertically in relation to said surface. According to the invention, the surface is scanned on a point-by-point basis by a scanning probe, the distance between the scanning probe and the sample surface at each scanning point being periodically modulated, in such a way that a force-time curve of the probe is produced for this point. The force-time curve is recorded at each scanning point, digitized using an A/D converter, evaluated online in real-time and stored, together with the entire data stream, in a first area of a memory device. One or several characteristic variables of the force-time curves are determined for each scanning point from the real-time evaluation results and the stored digitized force-time curves and an image of the sample surface is obtained from said characteristic variables of the scanning points.
    • 本发明涉及一种用于创建待分析样品表面的图像的方法,其分辨率相对于样品表面横向优于1μm,相对于所述表面垂直于100nm。 根据本发明,通过扫描探针逐点扫描表面,在每个扫描点处扫描探针和样品表面之间的距离被周期性地调制,使得力 - 时间曲线 的探针是为此而产生的。 在每个扫描点记录力 - 时间曲线,使用A / D转换器进行数字化,实时在线评估,并与整个数据流一起存储在存储器件的第一区域中。 从实时评估结果和存储的数字化力 - 时间曲线确定每个扫描点的力 - 时间曲线的一个或几个特征变量,并且从扫描点的所述特征变量获得样本表面的图像。