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    • 1. 发明授权
    • Evaluation unit of a differential-pressure sensor
    • 压差传感器的评估单元
    • US5969258A
    • 1999-10-19
    • US902170
    • 1997-07-29
    • Peter GerstKarlheinz BanholzerKarl FlogelPeter Jung
    • Peter GerstKarlheinz BanholzerKarl FlogelPeter Jung
    • G01L13/06G01L9/12G01L19/04
    • G01L9/125
    • Evaluation unit of a differential-pressure sensor An evaluation unit of a differential-pressure sensor is provided which supplies an output signal which corresponds to a differential pressure (.DELTA.P) which has been corrected with respect to a measuring error due to the static pressure (P.sub.S). The differential-pressure sensor has a capacitive single-chamber differential-pressure measuring cell with two capacitors (4, 5) as sensor element (1), and a temperature sensor (6) is arranged at the sensor element (1). The differential-pressure measured value is corrected by means of a first correction value (.DELTA.K) which is a measure of the static pressure (P.sub.S) at a reference temperature (T.sub.R). This correction value (.DELTA.K) is determined from the difference between a sensor temperature (T.sub.S) determined by means of the temperature sensor (6) and a sum of a temperature discrepancy (T.sub.0) and an internal temperature (T.sub.i) assigned to the sum (.SIGMA.) of the reciprocal values of the capacitances of the two capacitors (4, 5).
    • 差压传感器的评估单元设置差压传感器的评估单元,该评估单元提供对应于由于静压而导致的测量误差已被校正的差压(DELTA P)的输出信号 PS)。 差压传感器具有电容式单室差压测量单元,其具有作为传感器元件(1)的两个电容器(4,5),并且传感器元件(1)上布置有温度传感器(6)。 通过作为参考温度(TR)下的静态压力(PS)的量度的第一校正值(DELTA K)来校正差压测量值。 根据由温度传感器(6)确定的传感器温度(TS)与温度差异(T0)和分配给总和的温度差(T0)和内部温度(Ti)之和的差值来确定该校正值(DELTA K) (SIGMA)两个电容器(4,5)的电容的倒数值。
    • 2. 发明授权
    • Differential pressure measuring apparatus
    • 差压测量装置
    • US5111698A
    • 1992-05-12
    • US741181
    • 1991-07-29
    • Karlheinz BanholzerPeter GerstPeter Jung
    • Karlheinz BanholzerPeter GerstPeter Jung
    • G01L13/06G01L9/00G01L9/12G01L19/00G11B19/20G11B23/50
    • G01L9/0072G01L9/125
    • The differential pressure measuring apparatus comprises a single chamber differential pressure sensor having two resilient sensor diaphragms which enclose a volume filled with a fluid. In the single chamber differential pressure sensor two measuring capacitors are formed whose capacitances vary in opposite senses in response to the sensor differential pressure between the pressures acting on the two sensor diaphragms. The single chamber differential pressure sensor is connected to an adaptor comprising a volume filled with a fluid which is closed on the one hand by one of the two sensor diaphragms and on the other hand by an elastic adaptor diaphragm. An evaluation circuit calculates the sensor differential pressure from the capacitances of the measuring capacitors. The evaluation circuit comprises a first compensation arrangment which compensates the influences of the sensor temperature and of the sensor parameters on the calculated sensor differential pressure, and a second compensation arrangement which compensates the influences of the adaptor temperature and of the adaptor parameters on the sensor differential pressure corrected by the first compensation arrangement.
    • 差压测量装置包括具有两个弹性传感器隔膜的单室差压传感器,其包围填充有流体的体积。 在单室差压传感器中,形成两个测量电容器,其电容响应于作用在两个传感器膜片上的压力之间的传感器差压而在相反的感测中变化。 单室差压传感器连接到适配器,该适配器包括填充有流体的体积,一方面由两个传感器膜片中的一个封闭,另一方面由弹性适配器膜片封闭。 评估电路根据测量电容器的电容计算传感器差压。 评估电路包括第一补偿布置,其补偿传感器温度和传感器参数对所计算的传感器差压的影响,以及补偿适配器温度和适配器参数对传感器差动器的影响的第二补偿装置 压力由第一补偿装置校正。