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    • 5. 发明授权
    • Method for registration of shadow masked thin-film patterns
    • 掩膜薄膜图案的配准方法
    • US4746548A
    • 1988-05-24
    • US790695
    • 1985-10-23
    • Robert A. BoudreauRobert J. Wilkie
    • Robert A. BoudreauRobert J. Wilkie
    • G09F9/00C23C14/04C23C16/04H01L21/68
    • C23C14/042C23C16/042H01L21/682
    • A method of aligning thin-film structure patterns on a substrate formed with the use of an apertured mask in a vacuum deposition system. The present method includes the steps of positioning a mask holder assembly within a deposition chamber, the mask holder assembly having the apertured mask as part thereof and having means for engaging a substrate carrier; positioning a substrate carrier within the deposition chamber spaced from the mask holder assembly, the carrier having the substrate supported therein and having means for aligning the apertured mask with the substrate; engaging the mask holder assembly with the substrate carrier such that they are in operative contact; positioning a magnet in the deposition chamber adjacent the side of the substrate carrier opposite the mask holder assembly such that the apertured mask is held in operative contact with the substrate; vacuum-depositing a thin-film structure material through the apertured mask; and removing the magnet from the substrate carrier and disengaging the mask holder assembly from the substrate carrier, thereby resulting in the formation of the thin-film structures on the substrate.
    • 在真空沉积系统中使用孔径掩模形成的衬底上的薄膜结构图案对准的方法。 本方法包括以下步骤:将掩模保持器组件定位在沉积室内,掩模保持器组件具有孔径掩模作为其一部分并具有用于接合衬底载体的装置; 将衬底载体定位在所述沉积室内与所述掩模保持器组件间隔开的位置,所述载体具有支撑在其中的衬底,并且具有用于使所述带孔掩模与所述衬底对准的装置; 使掩模支架组件与基板载体接合,使得它们处于操作接触状态; 将磁体定位在邻近基板载体与掩模保持器组件相对的一侧的沉积室中,使得有孔掩模保持与基板有效接触; 通过多孔掩模真空沉积薄膜结构材料; 以及从基板载体上移除磁体并使掩模支架组件与基板载体脱开,由此导致在基板上形成薄膜结构。
    • 10. 发明授权
    • Uptapered single-mode optical fiber package for optoelectronic components
    • 用于光电子元件的单模光纤封装
    • US5011247A
    • 1991-04-30
    • US487497
    • 1990-03-02
    • Robert A. BoudreauWilliam C. Rideout
    • Robert A. BoudreauWilliam C. Rideout
    • G02B6/42
    • G02B6/4224G02B6/4208G02B6/4209G02B6/4225G02B6/423
    • A package for an optoelectronic device, such as a laser, having a photo-active element optically coupled to an uptapered single-mode optical fiber which connects said optoelectronic array to an external device includes a housing having a solderable substrate to which the device is secured, a graded index lens also secured to said substrate at a distance calculated to provide a known magnification of light beam emanating from said laser and an uptapered single-mode optical fiber mechanically positioned and actively aligned to said mangified light beam to achieve optimal optical coupling to said optoelectronic device. The package includes a plurality of reference marks and surfaces such that the laser, the lens and the uptapered end of a single-mode optical fiber may be positioned for precise optical coupling using an active alignment for final adjustments. The reference surfaces include a pedestal for the laser and a plurality of stops for the lens integrally formed with the substrate. The package also includes a fiber tube and flange for mechanically positioning the uptapered fiber. The precisely calculated spacing based on the spacing of said photo-active element, the magnification of said lens, and the fiber positioning is achieved by mechanical means.
    • 用于光电器件(例如激光器)的封装具有光耦合到连接所述光电子阵列与外部器件的开通单模光纤的光有源元件,该封装具有可焊接的基板,该器件被固定到该壳体 分级折射率透镜也被固定到所述衬底上,所述距离被计算为提供从所述激光器发出的光束的已知放大倍数,以及机械定位并且主动地对准所述曼彻斯特光束的开通单模光纤,以实现最佳的光耦合 说光电器件。 封装包括多个参考标记和表面,使得单模光纤的激光器,透镜和开口端可以被定位用于使用主动对准来进行最终调整的精确光耦合。 参考表面包括用于激光器的基座和用于与基底一体形成的透镜的多个止动件。 该包装还包括一个光纤管和法兰,用于机械地定位光纤。 基于所述光有源元件的间隔,所述透镜的放大率和光纤定位的精确计算的间隔通过机械装置实现。