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1. 发明授权

US07277188B2 Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate 有权
标题翻译：用于实现形成为线束的激光与沉积在衬底上的膜之间的相互作用的系统和方法
公开(公告)号：US07277188B2
公开(公告)日：2007-10-02
申请号：US11138175
申请日：2005-05-26
申请人： Palash P. Das , Thomas Hofmann , Otto Boucky , Ernst Stump , Berthold Matzkovits , Michael Hoell , Joerg Walther , Kurt Brenner , Guenter Grupp
发明人： Palash P. Das , Thomas Hofmann , Otto Boucky , Ernst Stump , Berthold Matzkovits , Michael Hoell , Joerg Walther , Kurt Brenner , Guenter Grupp
IPC分类号： G01B11/14
CPC分类号： B23K26/03 , B23K26/0006 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0622 , B23K26/0665 , B23K26/0738 , B23K26/083 , B23K26/352 , B23K37/0408 , B23K37/047 , B23K2101/18 , B23K2101/38 , B23K2103/56 , C30B13/22 , C30B29/06 , G01B21/00 , G03F7/70383 , G03F7/70583 , H01L27/1296
摘要： Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
摘要翻译：公开的系统和方法用于聚焦用于与沉积在基板上的膜相互作用的光束，其中聚焦光束限定短轴和长轴。在一个方面，系统可以包括检测系统，以分析在图像平面上从胶片反射的光，以确定光束是否在胶片的短轴中聚焦。在另一方面，可以提供一种用于定位用于与成形线束相互作用的胶片（具有不完美的非平面表面）的系统。

2. 发明申请

US20060001878A1 Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate 有权
标题翻译：用于实现形成为线束的激光与沉积在衬底上的膜之间的相互作用的系统和方法
公开(公告)号：US20060001878A1
公开(公告)日：2006-01-05
申请号：US11138175
申请日：2005-05-26
申请人： Palash Das , Thomas Hofmann , Richard Sandstrom , Otto Boucky , Ernst Stumpp , Berthold Matzkovits , Michael Hoell , Joerg Walther , Kurt Brenner , Guenter Grupp
发明人： Palash Das , Thomas Hofmann , Richard Sandstrom , Otto Boucky , Ernst Stumpp , Berthold Matzkovits , Michael Hoell , Joerg Walther , Kurt Brenner , Guenter Grupp
IPC分类号： G01B11/00
CPC分类号： B23K26/03 , B23K26/0006 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0622 , B23K26/0665 , B23K26/0738 , B23K26/083 , B23K26/352 , B23K37/0408 , B23K37/047 , B23K2101/18 , B23K2101/38 , B23K2103/56 , C30B13/22 , C30B29/06 , G01B21/00 , G03F7/70383 , G03F7/70583 , H01L27/1296
摘要： Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.
摘要翻译：公开的系统和方法用于聚焦用于与沉积在基板上的膜相互作用的光束，其中聚焦光束限定短轴和长轴。在一个方面，系统可以包括检测系统，以分析在图像平面上从胶片反射的光，以确定光束是否在胶片的短轴中聚焦。在另一方面，可以提供一种用于定位用于与成形线束相互作用的胶片（具有不完美的非平面表面）的系统。

3. 发明申请

US20090139970A1 METHOD AND ARRANGEMENT FOR GUIDING A MACHINE PART ALONG A DEFINED MOVEMENT PATH OVER A WORKPIECE SURFACE 审中-公开
标题翻译：用于指导工作表面上定义的运动路径的机器部分的方法和装置
公开(公告)号：US20090139970A1
公开(公告)日：2009-06-04
申请号：US12275735
申请日：2008-11-21
申请人： Guenter GRUPP , Ernst Stumpp , Otto Boucky , Joerg Walther
发明人： Guenter GRUPP , Ernst Stumpp , Otto Boucky , Joerg Walther
IPC分类号： B23K33/00 , B23K9/00
CPC分类号： B23K37/0229 , B23K26/04 , B23Q35/128 , G05B2219/36199 , G05B2219/4719
摘要： A machine part is guided along a defined movement path over a workpiece surface. The machine part is held at a defined distance from the workpiece surface during this movement. For that purpose, at least one distance sensor is provided that runs ahead of the machine part with a defined lead. A plurality of distance values indicative of a distance between the distance sensor and the workpiece surface are determined along the movement path. A plurality of control values are determined as a function of the distance values. The defined distance is repeatedly adjusted by means of the control values. In accordance with a first aspect, the distance values are determined at measurement points distributed with a first grid spacing along the movement path, while the control values are determined for actuating points distributed with a second grid spacing along the movement path, the first and the second grid spacings being different. According to a second aspect, the machine part has a linear range of activity on the workpiece surface, and the distance between the machine part and the workpiece surface is controlled by means of a distance control value and an angle control value, which are derived from distance values acquired from at least two distance sensors, which are laterally offset from one another.
摘要翻译：机器部件沿着工件表面上的限定的移动路径引导。在该运动过程中，机器部件与工件表面保持一定距离。为此目的，提供至少一个距离传感器，其以定义的引线在机器部分之前延伸。沿着移动路径确定表示距离传感器与工件表面之间的距离的多个距离值。多个控制值被确定为距离值的函数。通过控制值重复调整定义的距离。根据第一方面，在沿着移动路径以第一网格间隔分布的测量点处确定距离值，同时确定用于致动沿着移动路径以第二格栅间隔分布的启动点的控制值，第一和第第二网格间距不同。根据第二方面，机器部件在工件表面上具有线性范围的活动，并且通过距离控制值和角度控制值来控制机器部件和工件表面之间的距离，该距离控制值和角度控制值从至少两个距离传感器获取的距离值彼此横向偏移。

4. 发明申请

US20090228136A1 Method and Device for Guiding a Machine Part Along a Defined Motion Path Over a Workpiece Surface 审中-公开
标题翻译：用于沿着工件表面上的定义的运动路径引导机器零件的方法和装置
公开(公告)号：US20090228136A1
公开(公告)日：2009-09-10
申请号：US11990229
申请日：2006-07-20
申请人： Guenter Grupp , Ernst Stumpp , Otto Boucky , Joerg Walther
发明人： Guenter Grupp , Ernst Stumpp , Otto Boucky , Joerg Walther
IPC分类号： G05B19/19
CPC分类号： B23K37/0229 , B23K26/04 , B23Q35/128 , G05B2219/36199 , G05B2219/4719
摘要： A machine part (12) is guided along a defined movement path (28) over a workpiece surface (23). The machine part (12) is held at a defined distance (50) from the workpiece surface (23) during this movement. For that purpose, a distance sensor (14) is provided that runs ahead of the machine part (12) with a defined lead (18). A plurality of distance values between the distance sensor (14) and the workpiece surface (23) are determined. A plurality of control values for adjusting the defined distance (50) are determined as a function of the distance values. The defined distance (50) is repeatedly adjusted by means of the control values. In accordance with one aspect of the invention, the distance values along the movement path (28) are determined by means of a first grid spacing (46). The control values are determined along the movement path (28) with a second grid spacing (44). The first and the second grid spacings (46, 44) are different.
摘要翻译：机器部件（12）沿着工件表面（23）上的限定的移动路径（28）被引导。在该运动期间，机器部件（12）被保持在与工件表面（23）限定的距离（50）处。为此目的，提供一种距离传感器（14），该距离传感器（14）具有限定的引线（18）在机器部分（12）的前面延伸。确定距离传感器（14）和工件表面（23）之间的多个距离值。作为距离值的函数确定用于调整限定距离（50）的多个控制值。通过控制值重复调整限定的距离（50）。根据本发明的一个方面，沿着移动路径（28）的距离值通过第一格栅间隔（46）来确定。沿着移动路径（28）以第二格栅间隔（44）确定控制值。第一和第二栅格间隔（46,44）不同。

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