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    • 9. 发明申请
    • REAGENT DISPENSING APPARATUS AND DELIVERY METHOD
    • 试剂分配装置和递送方法
    • WO2008094854A3
    • 2008-09-25
    • PCT/US2008052175
    • 2008-01-28
    • PRAXAIR TECHNOLOGY INCSPOHN RONALD FPETERS DAVID W
    • SPOHN RONALD FPETERS DAVID W
    • F17C9/00B67D7/00B67D99/00F16J15/02
    • C23C16/4409C23C16/4482F16J15/0887F16J15/128Y10T428/13
    • This invention relates to a vapor or liquid phase reagent dispensing apparatus comprising a vessel (40) which comprises a removable top wall member (20), a sidewall member (22) and a bottom wall member (26) configured to form an internal vessel compartment; said sidewall member (22) having a protuberance (24) that extends into the internal vessel compartment adjacent to the top wall member (20); said top wall member (20) and said protuberance (24) having opposing flat surfaces, wherein the opposing flat surfaces are not in contact with one another and at least a portion of the opposing flat surfaces are hardened (30); and a metal seal (10) aligned and in contact with the hardened opposing flat surfaces (30) of said top wall member (20) and said protuberance (24). The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
    • 本发明涉及一种蒸气相或液相反应物分配装置,其包括容器(40),该容器包括可移除的顶壁构件(20),侧壁构件(22)和底壁构件(26),其构造成形成内部容器隔室 ; 所述侧壁构件具有突出部分,所述突出部分延伸到邻近所述顶壁构件的所述内部容器隔室中; 所述顶壁部件(20)和所述凸起(24)具有相对的平坦表面,其中所述相对的平坦表面不彼此接触,并且所述相对的平坦表面的至少一部分被硬化(30)。 以及与所述顶壁构件(20)和所述突起(24)的硬化的相对平坦表面(30)对准并接触的金属密封件(10)。 分配设备可以用于分配试剂,例如用于在制造半导体材料和装置中沉积材料的前体。