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    • 1. 发明申请
    • METHOD AND CIRCUIT ARRANGEMENT FOR THE PRECISE, DYNAMIC DIGITAL CONTROL OF ESPECIALLY PIEZOELECTRIC ACTUATORS FOR MICROPOSITIONING SYSTEMS
    • 方法与电路精密,动态数字化控制的微定位特定压电驱动器
    • WO2005017634A3
    • 2005-06-23
    • PCT/EP2004008695
    • 2004-08-03
    • PHYSIK INSTR PI GMBH & CO KGGEYER BERNHARDBESCH BERTHOLDJORDAN SCOTT
    • GEYER BERNHARDBESCH BERTHOLDJORDAN SCOTT
    • G05B19/35H01L41/04
    • G05B19/351G05B2219/41344H01L41/042H02N2/0075
    • The invention relates to a method and to a circuit arrangement for the precise, dynamic digital control of especially piezoelectric actuators for micropositioning systems, comprising a regulator, whereby, in order to minimize position order deviations, the future system behavior is estimated and current correction signals for the purpose of feedforward correction are obtained. The aim of the invention is to reduce latency times in the feedforward loop of the scanner system. For this purpose, the signal of the command variable is passed over a switched bypass to a high-resolution digital-to-analog converter, said converter being operated at the scan rate of the scanner system. The feedforward loop leads to a fast digital-to-analog converter which is controlled in a scanner system-independent manner. The output signals of the converters representing the control voltages are added to the device to be controlled, especially they are forwarded to a piezoelectric actuator which together with the position sensor forms the controlled system.
    • 本发明涉及的方法和特别是压电致动器用于与调节器,其中,以最小化位置顺序的偏差和在一个前馈修正的术语获得电流修正信号来估计未来的系统行为微定位的精确动态数字控制的电路布置。 根据本发明,传送到的延迟时间在参考变量的采样的信号的前馈回路经由切换旁路还原成一个数字 - 模拟转换器的最高分辨率,在该转换器设置在扫描系统的采样率运行。 此外,前馈回路导致被驱动abtastsystemunabhängig快速数字 - 模拟转换器。 表示所述转换器的输出信号的控制电压被添加到要被控制的设备,特别是压电致动器转发,其与位置传感器,所述受控系统形成。