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    • 6. 发明申请
    • PREDETERMINED DUTY CYCLE SIGNAL GENERATOR
    • 预测的占空比信号发生器
    • WO2010151891A2
    • 2010-12-29
    • PCT/US2010040249
    • 2010-06-28
    • QUALCOMM INCZHANG KUNBARNETT KENNETH CHARLES
    • ZHANG KUNBARNETT KENNETH CHARLES
    • H03K3/017
    • H03K5/1565H03K21/38H03K23/00
    • Techniques for generating a signal having a predetermined duty cycle. In an exemplary embodiment, a first counter is configured to count a first number of cycles of an oscillator signal, and a second counter is configured to count a second number of cycles of the oscillator signal, with the second number being greater than the first number. The output of the second counter is used to reset the first and second counters, while the outputs of the first and second counters further drive a toggle latch for generating the signal having predetermined duty cycle. Further aspects include techniques for accommodating odd and even values for the second number.
    • 用于产生具有预定占空比的信号的技术。 在示例性实施例中,第一计数器被配置为对振荡器信号的第一数量的周期进行计数,并且第二计数器被配置为对振荡器信号的第二数量的周期进行计数,其中第二数量大于第一数量 。 第二计数器的输出用于复位第一和第二计数器,而第一和第二计数器的输出进一步驱动用于产生具有预定占空比的信号的触发锁存器。 另外的方面包括用于适应第二数量的奇数和偶数值的技术。
    • 8. 发明申请
    • METHOD AND APPARATUS FOR SURFACE TREATMENT BY COMBINED PARTICLE IRRADIATION
    • 通过组合颗粒辐照处理表面处理的方法和装置
    • WO2009083193A3
    • 2010-06-10
    • PCT/EP2008010939
    • 2008-12-19
    • UNIV GOETTINGEN GEORG AUGUSTHOFSAESS HANSZHANG KUN
    • HOFSAESS HANSZHANG KUN
    • C23C14/02
    • C23C14/46C23C14/022
    • The invention relates to a method for surface treatment of a substrate surface by irradiation of particles onto the substrate constituting the substrate surface. The method comprises the steps of applying first particles onto the substrate surface, thereby causing a positive particle flux component on the substrate surface and emitting eroding particles as at least an eroding particle beam onto the substrate surface, the eroding particle beam causing a negative particle flux component on the substrate surface. The application is performed concurrently or alternately with the step of emitting. An area of the substrate surface onto which the first particles are applied is at least partly overlapping an area of the substrate surface irradiated by the eroding particle beam in an overlapping area of the substrate surface. The resulting cumulative flux of the combined positive and negative flux components in the overlapping area being non-positive, the resulting cumulative flux providing a decreasing or stable net amount of particles in the overlapping area of the substrate surface. The first particles and the eroding particle beam comprising atomic or molecular particles, wherein the first particles are provided by a source outside a plane coextending with at least a part of the substrate surface. Further, the invention relates to a device for surface treatment and a target device for carrying out the inventive surface treatment method.
    • 本发明涉及通过将粒子照射在构成基板表面的基板上来对基板表面进行表面处理的方法。 该方法包括以下步骤:将第一粒子施加到衬底表面上,从而在衬底表面上引起正的粒子通量分量,并将侵蚀粒子作为至少一个侵蚀粒子束发射到衬底表面上,侵蚀粒子束产生负的粒子通量 部件在基板表面上。 应用程序与发射步骤同时或交替执行。 其上施加有第一颗粒的基板表面的区域至少部分地与基板表面的重叠区域中被侵蚀粒子束照射的基板表面的面积重叠。 所得到的重叠区域中积极的和负的通量组分的累积通量是非正的,所得到的累积通量在衬底表面的重叠区域中提供了减少或稳定的净量的颗粒。 第一颗粒和包含原子或分子颗粒的侵蚀粒子束,其中第一颗粒由与源于衬底表面的至少一部分共同延伸的平面外的源提供。 此外,本发明涉及一种用于表面处理的装置和用于实施本发明的表面处理方法的目标装置。