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    • 2. 发明申请
    • CONTROL METHOD OF THE OVERLAY ACCURACY USING BY SELF-ALIGNED GRAVURE PRINTING
    • 使用自对准伽玛打印的覆盖精度控制方法
    • WO2011021763A1
    • 2011-02-24
    • PCT/KR2010/002639
    • 2010-04-27
    • PARU CO., LTD.CHO, GyojinKIM, JaeyoungLIM, ChaeminOH, Hyungrok
    • CHO, GyojinKIM, JaeyoungLIM, ChaeminOH, Hyungrok
    • H01L21/336
    • H01L51/052H01L51/0022H01L51/102
    • Provided is a method of fabricating an organic thin film transistor, which includes a) forming a gate electrode on a transparent substrate; b) forming an insulation layer to cover the gate electrode and irradiating light to a back side of the substrate formed with the gate electrode to form a first region to which the light is not irradiated by the gate electrode and a second region surface-reformed by the irradiation of the light as the gate electrode is not formed thereon; and c) forming drain and source electrodes on the second region. The method of fabricating an organic thin film transistor overcomes the limitation in an overlay accuracy which is the largest problem of a conventional printed transistor to allow the gate, drain and source electrodes to be printed in a self aligned manner and thus has an advantage that a transistor with reliability and stable performance can be mass- produced in a low cost.
    • 提供一种制造有机薄膜晶体管的方法,其包括:a)在透明基板上形成栅电极; b)形成绝缘层以覆盖栅电极并将光照射到形成有栅电极的基板的背面,以形成第一区域,光不被栅电极照射,第二区域由第一区域表面改性, 不形成作为栅电极的光的照射; 以及c)在所述第二区域上形成漏极和源极。 制造有机薄膜晶体管的方法克服了覆盖精度的限制,这是传统印刷晶体管的最大问题,以允许以自对准的方式印刷栅极,漏极和源极,因此具有以下优点: 具有可靠性和稳定性能的晶体管可以以低成本批量生产。