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1. 发明申请

US20140264030A1 METHODS AND APPARATUS FOR MID-INFRARED SENSING 有权
标题翻译：中红外传感器的方法和装置
公开(公告)号：US20140264030A1
公开(公告)日：2014-09-18
申请号：US14076655
申请日：2013-11-11
申请人： PAO TAI LIN , YAN CAI , ANURADHA MURTHY AGARWAL , LIONEL C. KIMERLING
发明人： PAO TAI LIN , YAN CAI , ANURADHA MURTHY AGARWAL , LIONEL C. KIMERLING
IPC分类号： G01N21/59 , G02B6/136
CPC分类号： G02B6/136 , G01N21/35 , G02B6/122
摘要： A chip-scale, air-clad semiconductor pedestal waveguide can be used as a mid-infrared (mid-IR) sensor capable of in situ monitoring of organic solvents and other analytes. The sensor uses evanescent coupling from a silicon or germanium waveguide, which is highly transparent in the mid-IR portion of the electromagnetic spectrum (e.g., between λ=1.3 μm and λ=6.5 μm for silicon and λ=1.3 μm and λ=12.0 μm for germanium), to probe the absorption spectrum of the fluid surrounding the waveguide. Launching a mid-IR beam into the waveguide exposed to a particular analyte causes attenuation of the evanescent wave's spectral components due to absorption by carbon, oxygen, hydrogen, and/or nitrogen bonds in the surrounding fluid. Detecting these changes at the waveguide's output provides an indication of the type and concentration of one or more compounds in the surrounding fluid. If desired, the sensor may be integrated onto a silicon substrate with a mid-IR light source and a mid-IR detector to form a chip-based spectrometer.
摘要翻译：芯片尺寸的空气包层半导体基座波导可用作能够原位监测有机溶剂和其他分析物的中红外（中红外）传感器。传感器使用来自硅或锗波导的衰减耦合，其在电磁光谱的中红外部分中是高度透明的（例如，对于硅，λ=1.3μm和λ=6.5μm，λ=1.3μm和λ= 12.0 用于锗），以探测波导周围的流体的吸收光谱。将中红外光束发射到暴露于特定分析物的波导中，由于周围流体中的碳，氧，氢和/或氮键的吸收而导致衰减波的光谱分量的衰减。在波导的输出处检测这些变化提供了周围流体中一种或多种化合物的类型和浓度的指示。如果需要，传感器可以用中红外光源和中红外检测器集成到硅衬底上，以形成基于芯片的光谱仪。

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