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    • 1. 发明申请
    • Bonding apparatus
    • 接合装置
    • US20050211746A1
    • 2005-09-29
    • US11089262
    • 2005-03-24
    • Osamu KakutaniYutaka KondoYoshihiko Seino
    • Osamu KakutaniYutaka KondoYoshihiko Seino
    • H01L21/60B23K1/06B23K20/00
    • B23K20/005H01L2224/78301H01L2224/7835H01L2224/78823
    • A bonding apparatus including a front link whose lower end is rotatably connected to a bonding arm and upper portion is rotatably connected to bonding head, and a rear link whose lower end is rotatably connected to the rear end of the bonding arm and upper portion is rotatably connected to the bonding head; and a hypothetical rotational center of capillary of the bonding arm is on a bonding surface and set to be the intersection of a line that connects upper and lower rotational centers of the front link and a line that connects upper and lower rotational centers of the rear link, wherein the immovable element of motor is fastened to the bonding head, and the rotational element of the motor is attached to the upper end of the rear link so that the rotational element rotates about the upper rotational center of the rear link.
    • 一种接合装置,包括前连杆,其下端可旋转地连接到接合臂和上部,可转动地连接到接合头,并且后连杆的下端可旋转地连接到接合臂和上部的后端, 连接到焊接头; 并且接合臂的假想旋转中心位于接合面上,并且被设置为连接前连杆的上下旋转中心的线和连接后连杆的上下旋转中心的线 其特征在于,所述马达的不可移动元件固定在所述接合头上,所述马达的旋转元件安装在所述后连杆的上端,使得所述旋转元件围绕所述后连杆的上旋转中心旋转。
    • 4. 发明授权
    • Bonding apparatus
    • 接合装置
    • US07306132B2
    • 2007-12-11
    • US11089262
    • 2005-03-24
    • Osamu KakutaniYutaka KondoYoshihiko Seino
    • Osamu KakutaniYutaka KondoYoshihiko Seino
    • H01L21/60
    • B23K20/005H01L2224/78301H01L2224/7835H01L2224/78823
    • A bonding apparatus including a front link whose lower end is rotatably connected to a bonding arm and upper portion is rotatably connected to bonding head, and a rear link whose lower end is rotatably connected to the rear end of the bonding arm and upper portion is rotatably connected to the bonding head; and a hypothetical rotational center of capillary of the bonding arm is on a bonding surface and set to be the intersection of a line that connects upper and lower rotational centers of the front link and a line that connects upper and lower rotational centers of the rear link, wherein the immovable element of motor is fastened to the bonding head, and the rotational element of the motor is attached to the upper end of the rear link so that the rotational element rotates about the upper rotational center of the rear link.
    • 一种接合装置,包括前连杆,其下端可旋转地连接到接合臂和上部,可转动地连接到接合头,并且后连杆的下端可旋转地连接到接合臂和上部的后端, 连接到焊接头; 并且接合臂的假想旋转中心位于接合面上,并且被设置为连接前连杆的上下旋转中心的线和连接后连杆的上下旋转中心的线 其特征在于,所述马达的不可移动元件固定在所述接合头上,所述马达的旋转元件安装在所述后连杆的上端,使得所述旋转元件围绕所述后连杆的上旋转中心旋转。
    • 6. 发明申请
    • Hydrostatic guide system
    • 静压导向系统
    • US20080304772A1
    • 2008-12-11
    • US12156758
    • 2008-06-04
    • Osamu KakutaniYutaka KondoShoji Wada
    • Osamu KakutaniYutaka KondoShoji Wada
    • F16C32/06
    • F16C29/025F16C29/12F16C32/0402F16C32/06F16C32/0603F16C32/0674
    • A hydrostatic guide system including a guide table, a transfer table, a floating amount sensor attached to the transfer table, and a control unit. The transfer table has an inner portion, in which a magnetic attraction unit including a yoke and an electromagnet is embedded, and an outer shell portion, which covers the side surface and the upper surface of the inner portion. After the inner portion houses the yoke and the electromagnet, a gap around the yoke and the electromagnet is filled with a material having appropriate strength, so that the inner portion is integrated with the outer shell portion, and the transfer surface is flattened as whole. A surrounding groove is provided around the transfer table, and pressurized fluid supplied into the groove is jetted out to the guide table.
    • 一种静压导向系统,包括导向台,转印台,附接到转印台的浮动量传感器和控制单元。 转印台具有嵌入有包括磁轭和电磁体的磁性吸引单元的内部部分和覆盖内侧部分的侧表面和上表面的外壳部分。 在内部容纳磁轭和电磁体之后,通过具有适当强度的材料填充磁轭和电磁体周围的间隙,使得内部与外壳部分一体化,并且转印表面整体变平。 在转印台周围设置有周围的槽,并且供给到槽中的加压流体喷射到导向台。