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1. 发明申请

US20130084387A1 METHOD FOR MAKING A PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK HAVING A FePt or CoPt CHEMICALLY ORDERED RECORDING LAYER 有权
标题翻译：制作具有FePt或CoPt化学订购记录层的图形磁性记录磁盘的方法
公开(公告)号：US20130084387A1
公开(公告)日：2013-04-04
申请号：US13248086
申请日：2011-09-29
申请人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
发明人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
IPC分类号： G11B5/84 , G11B5/851
CPC分类号： G11B5/855
摘要： A method for making a bit-patterned-media (BPM) magnetic recording disk includes depositing a FePt (or CoPt) alloy recording layer, and then depositing a sealing layer on the FePt layer before high-temperature annealing. The high-temperature annealing causes the FePt to become substantially chemically-ordered in the L10 phase. After annealing, the sealing layer is removed. The sealing layer prevents nanoclustering and agglomeration of the FePt material at the surface of the FePt layer and the sealing layer, which would result in undesirable high surface roughness of the FePt, making patterning of the FePt layer difficult. The FePt layer can be patterned into the discrete islands for the BPM disk either before deposition of the sealing layer or after deposition and removal of the sealing layer. After patterning and removal of the sealing layer, the disk protective overcoat is deposited over the discrete data islands.
摘要翻译：一种制造位图形介质（BPM）磁记录盘的方法包括沉积FePt（或CoPt）合金记录层，然后在高温退火之前在FePt层上沉积密封层。高温退火使FePt在L10相中变得基本化学排序。退火后，去除密封层。密封层防止FePt材料在FePt层和密封层的表面的纳米聚集和聚集，这将导致FePt的不希望的高表面粗糙度，使得FePt层的图案化变得困难。在沉积密封层之前或在沉积和去除密封层之后，FePt层可以被图案化成用于BPM盘的离散岛。在图案化和去除密封层之后，盘保护外涂层沉积在离散的数据岛上。

2. 发明授权

US08399051B1 Method for making a patterned perpendicular magnetic recording disk having a FePt or CoPt chemically ordered recording layer 有权
标题翻译：制造具有FePt或CoPt化学有序记录层的图案化垂直磁记录盘的方法
公开(公告)号：US08399051B1
公开(公告)日：2013-03-19
申请号：US13248086
申请日：2011-09-29
申请人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
发明人： Olav Hellwig , Jeffrey S. Lille , Andrew Thomas McCallum , Oleksandr Mosendz , Dieter K. Weller
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： A method for making a bit-patterned-media (BPM) magnetic recording disk includes depositing a FePt (or CoPt) alloy recording layer, and then depositing a sealing layer on the FePt layer before high-temperature annealing. The high-temperature annealing causes the FePt to become substantially chemically-ordered in the L10 phase. After annealing, the sealing layer is removed. The sealing layer prevents nanoclustering and agglomeration of the FePt material at the surface of the FePt layer and the sealing layer, which would result in undesirable high surface roughness of the FePt, making patterning of the FePt layer difficult. The FePt layer can be patterned into the discrete islands for the BPM disk either before deposition of the sealing layer or after deposition and removal of the sealing layer. After patterning and removal of the sealing layer, the disk protective overcoat is deposited over the discrete data islands.
摘要翻译：一种制造位图形介质（BPM）磁记录盘的方法包括沉积FePt（或CoPt）合金记录层，然后在高温退火之前在FePt层上沉积密封层。高温退火使FePt在L10相中变得基本化学排序。退火后，去除密封层。密封层防止FePt材料在FePt层和密封层的表面的纳米聚集和聚集，这将导致FePt的不希望的高表面粗糙度，使得FePt层的图案化变得困难。在沉积密封层之前或在沉积和去除密封层之后，FePt层可以被图案化成用于BPM盘的离散岛。在图案化和去除密封层之后，盘保护外涂层沉积在离散的数据岛上。

3. 发明授权

US09147423B2 Method for improving a patterned perpendicular magnetic recording disk with annealing 有权
标题翻译：用于退火的图案化垂直磁记录盘的改进方法
公开(公告)号：US09147423B2
公开(公告)日：2015-09-29
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
IPC分类号： B44C1/22 , H01L21/00 , G11B5/82 , G11B5/855 , C22C19/07 , C22C1/02
CPC分类号： G11B5/855 , C22C1/02 , C22C19/07
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译：用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。

4. 发明申请

US20130270221A1 METHOD FOR IMPROVING A PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK WITH ANNEALING 有权
标题翻译：用于改进带有退火的图形磁性记录磁盘的方法
公开(公告)号：US20130270221A1
公开(公告)日：2013-10-17
申请号：US13449279
申请日：2012-04-17
申请人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
发明人： Michael Konrad Grobis , Olav Hellwig , Ernesto E. Marinero , Andrew Thomas McCallum , Dieter K. Weller
IPC分类号： B05D3/10 , C21D9/00
CPC分类号： G11B5/855 , C22C1/02 , C22C19/07
摘要： A method for making a bit-patterned-media magnetic recording disk with discrete magnetic islands includes annealing the data islands after they have been formed by an etching process. A hard mask, such as a layer of silicon nitride or carbon, may be first formed on the recording layer and a patterned resist formed on the hard mask. The resist pattern is then transferred into the hard mask, which is used as the etch mask to etch the recording layer and form the discrete data islands. After the data islands are formed by the etching process, the patterned recording layer is annealed. The annealing may be done in a vacuum, or in an inert gas, like helium or argon, or in a forming gas such as a reducing atmosphere of argon plus hydrogen. The annealing improves the coercivity, the effective saturation magnetization and the thermal stability of the patterned media.
摘要翻译：用于制造具有离散磁岛的位图形介质磁记录盘的方法包括在通过蚀刻工艺形成数据岛之后退火数据岛。可以首先在记录层上形成诸如氮化硅或碳的一层的硬掩模和形成在硬掩模上的图案化抗蚀剂。然后将抗蚀剂图案转移到硬掩模中，其用作蚀刻掩模以蚀刻记录层并形成离散数据岛。在通过蚀刻工艺形成数据岛之后，对图案化记录层进行退火。退火可以在真空中或在诸如氦或氩的惰性气体中进行，或者在形成气体如氩气和氢气的还原气氛中进行。退火提高了图案化介质的矫顽力，有效饱和磁化强度和热稳定性。

5. 发明申请

US20120147718A1 PATTERNED PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH EXCHANGE-COUPLED COMPOSITE RECORDING STRUCTURE OF A FePt LAYER AND A Co/X MULTILAYER 审中-公开
标题翻译：具有FePt层和Co / X多层的交换耦合复合记录结构的图形磁性记录介质
公开(公告)号：US20120147718A1
公开(公告)日：2012-06-14
申请号：US12964643
申请日：2010-12-09
申请人： Olav Hellwig , Andrew Thomas McCallum , Dieter K. Weller
发明人： Olav Hellwig , Andrew Thomas McCallum , Dieter K. Weller
IPC分类号： G11B5/667 , G11B11/00 , G11B5/127 , G11B5/66 , G11B5/65
CPC分类号： G11B5/855 , G11B5/1278 , G11B5/66 , G11B5/7325 , G11B5/746 , G11B5/82
摘要： A bit-patterned media (BPM) magnetic recording disk has discrete data islands with an exchange-coupled composite (ECC) recording layer (RL) formed of a high-anisotropy chemically-ordered FePt alloy lower layer, a lower-anisotropy Co/X laminate or multilayer (ML) upper layer with perpendicular magnetic anisotropy, wherein X is Pt, Pd or Ni, and an optional nonmagnetic separation layer or coupling layer (CL) between the FePt layer and the ML. The FePt alloy layer is sputter deposited onto a seed layer structure, like a CrRu/Pt bilayer, while the disk substrate is maintained at an elevated temperature to assure the high anisotropy field Hk is achieved. The high-temperature deposition together with the CrRu/Pt seed layer structure provide a very smooth surface for subsequent deposition of the ML (and optional CL). The separate Co/X ML has by itself a very narrow switching field distribution (SFD), so that the SFD of the ECC RL is much narrower than the SFD for the FePt layer alone.
摘要翻译：位图形介质（BPM）磁记录盘具有离散数据岛，其具有由高各向异性化学排序的FePt合金下层，较低各向异性Co / X的低交换耦合复合（ECC）记录层具有垂直磁各向异性的层压或多层（ML）上层，其中X是Pt，Pd或Ni，以及FePt层和ML之间的任选的非磁性分离层或偶合层（CL）。将FePt合金层溅射沉积到种子层结构上，如CrRu / Pt双层，同时将盘基底保持在升高的温度，以确保实现高各向异性场Hk。高温沉积与CrRu / Pt种子层结构一起提供了非常光滑的表面，用于随后沉积ML（和可选的CL）。单独的Co / X ML本身具有非常窄的开关场分布（SFD），使得ECC RL的SFD比仅用于FePt层的SFD窄得多。

6. 发明申请

US20110268993A1 SILICON/GOLD SEED STRUCTURE FOR CRYSTALLINE ALIGNMENT IN A FILM STACK 有权
标题翻译：硅胶/黄金结晶在电影胶卷中的结晶对齐
公开(公告)号：US20110268993A1
公开(公告)日：2011-11-03
申请号：US12772179
申请日：2010-05-01
申请人： Olav Hellwig , Dieter K. Weller
发明人： Olav Hellwig , Dieter K. Weller
IPC分类号： G11B5/62 , G11B5/66 , G11B5/738
CPC分类号： G11B5/732 , G11B5/66 , G11B5/667 , G11B5/7325 , G11B5/855 , Y10T428/12076 , Y10T428/12465 , Y10T428/12472 , Y10T428/12674
摘要： A silicon/gold (Si/Au) bilayer seed structure is located in a film stack between an amorphous or crystalline lower layer and an upper layer with a well-defined crystalline structure. The seed structure includes a Si layer on the generally flat surface of the lower layer and a Au layer on the Si layer. The Si/Au interface initiates the growth of the Au layer with a face-centered-cubic (fcc) crystalline structure with the (111) plane oriented in-plane. The upper layer grown on the Au layer has a fcc or hexagonal-close-packed (hcp) crystalline structure. If the upper layer is a fcc material its [111] direction is oriented substantially perpendicular to the (111) plane of the Au layer and if the upper layer is a hcp material, its c-axis is oriented substantially perpendicular to the (111) plane of the Au layer.
摘要翻译：硅/金（Si / Au）双层种子结构位于非晶或结晶下层与具有明确定义的结晶结构的上层之间的膜叠层中。种子结构包括在下层的大致平坦表面上的Si层和Si层上的Au层。 Si / Au界面以（111）面定向在平面内的面心立方（fcc）晶体结构引发Au层的生长。在Au层上生长的上层具有fcc或六方密堆积（hcp）晶体结构。如果上层是fcc材料，其[111]方向定向成基本上垂直于Au层的（111）面，并且如果上层是hcp材料，则其c轴基本垂直于（111）面定向， Au层的平面。

7. 发明申请

US20120236694A1 PATTERNED PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH ULTRATHIN OXIDE FILM AND REDUCED SWITCHING FIELD DISTRIBUTION 有权
标题翻译：具有超氧化物膜的图形磁性记录介质和减少的开关场分布
公开(公告)号：US20120236694A1
公开(公告)日：2012-09-20
申请号：US13049124
申请日：2011-03-16
申请人： Olav Hellwig , Ernesto E. Marinero , Dieter K. Weller
发明人： Olav Hellwig , Ernesto E. Marinero , Dieter K. Weller
IPC分类号： G11B11/00 , G11B5/127 , G11B5/82 , G11B5/667 , G11B5/73
CPC分类号： G11B5/746 , G11B5/7325 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a Co-alloy recording layer patterned into discrete data islands arranged in concentric tracks and exhibits a narrow switching field distribution (SFD). The disk includes a substrate, a NiTa alloy planarizing layer on the substrate, a nonmagnetic Ru-containing underlayer on the planarizing layer, an oxide-free Co alloy magnetic recording layer, and an ultrathin oxide film between the Ru-containing layer and the Co-alloy magnetic recording layer. The oxide film may be an oxide selected from a Ta-oxide, a Co-oxide and a Ti-oxide, and is ultrathin so that it may be considered a discontinuous film. The planarizing layer and ultrathin oxide film improve the growth homogeneity of the Co-alloy recording layer, so that the patterned disk with data islands shows significantly reduced SFD.
摘要翻译：图案化的垂直磁记录盘具有图案化为离散数据岛的Co合金记录层，其布置在同心轨道中并呈现窄的开关场分布（SFD）。该盘包括衬底，衬底上的NiTa合金平面化层，平坦化层上的非磁性含Ru底层，不含氧化物的Co合金磁记录层以及Ru含有层和Co之间的超薄氧化物膜合金磁记录层。氧化膜可以是选自Ta氧化物，Co氧化物和Ti氧化物的氧化物，并且是超薄的，因此可以认为是不连续的膜。平坦化层和超薄氧化物膜改善了Co合金记录层的生长均匀性，使得具有数据岛的图案化盘显示出显着降低的SFD。

8. 发明授权

US08541116B2 Patterned perpendicular magnetic recording disk drive and medium with patterned exchange bridge layer below the data islands 有权
标题翻译：图案化的垂直磁记录磁盘驱动器和介质，在数据岛下方有图案交换桥接层
公开(公告)号：US08541116B2
公开(公告)日：2013-09-24
申请号：US12906909
申请日：2010-10-18
申请人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
发明人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
IPC分类号： G11B5/66
CPC分类号： G11B5/855 , G11B5/746 , G11B2005/0021
摘要： A patterned perpendicular magnetic recording disk with discrete data islands of recording layer (RL) material includes a substrate, a patterned exchange bridge layer of magnetic material between the substrate and the islands, and an optional exchange-coupling control layer (CCL) between the exchange bridge layer and the islands. The exchange bridge layer has patterned pedestals below the islands. The exchange bridge layer controls exchange interactions between the RLs in adjacent islands to compensate the dipolar fields between islands, and the pedestals concentrate the flux from the write head. The disk may include a soft underlayer (SUL) of soft magnetically permeable material on the substrate and a nonmagnetic exchange break layer (EBL) on the SUL between the SUL and the exchange bridge layer. In a thermally-assisted recording (TAR) disk a heat sink layer may be located below the exchange bridge layer and the SUL may be optional.
摘要翻译：具有记录层（RL）材料的离散数据岛的图案化垂直磁记录盘包括衬底，在衬底和岛之间的图案化的磁性材料交换桥接层，以及在交换器之间的任选的交换耦合控制层（CCL）桥梁层和岛屿。交换桥层在岛屿下方有图案化的基座。交换桥接层控制相邻岛中的RL之间的交换相互作用以补偿岛之间的偶极场，并且基座集中来自写头的磁通。盘可以包括在衬底上的软磁性可渗透材料的软底层（SUL）和在SUL和交换桥接层之间的SUL上的非磁性交换断层（EBL）。在热辅助记录（TAR）盘中，散热层可以位于交换桥接层下方，并且SUL可以是可选的。

9. 发明授权

US08268461B1 Patterned perpendicular magnetic recording medium with ultrathin oxide film and reduced switching field distribution 有权
标题翻译：具有超薄氧化膜的图案垂直磁记录介质和减少的开关场分布
公开(公告)号：US08268461B1
公开(公告)日：2012-09-18
申请号：US13049124
申请日：2011-03-16
申请人： Olav Hellwig , Ernesto E. Marinero , Dieter K. Weller
发明人： Olav Hellwig , Ernesto E. Marinero , Dieter K. Weller
IPC分类号： G11B5/66
CPC分类号： G11B5/746 , G11B5/7325 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a Co-alloy recording layer patterned into discrete data islands arranged in concentric tracks and exhibits a narrow switching field distribution (SFD). The disk includes a substrate, a NiTa alloy planarizing layer on the substrate, a nonmagnetic Ru-containing underlayer on the planarizing layer, an oxide-free Co alloy magnetic recording layer, and an ultrathin oxide film between the Ru-containing layer and the Co-alloy magnetic recording layer. The oxide film may be an oxide selected from a Ta-oxide, a Co-oxide and a Ti-oxide, and is ultrathin so that it may be considered a discontinuous film. The planarizing layer and ultrathin oxide film improve the growth homogeneity of the Co-alloy recording layer, so that the patterned disk with data islands shows significantly reduced SFD.
摘要翻译：图案化的垂直磁记录盘具有图案化为离散数据岛的Co合金记录层，其布置在同心轨道中并呈现窄的开关场分布（SFD）。该盘包括衬底，衬底上的NiTa合金平面化层，平坦化层上的非磁性含Ru底层，不含氧化物的Co合金磁记录层以及Ru含有层和Co之间的超薄氧化物膜合金磁记录层。氧化膜可以是选自Ta氧化物，Co氧化物和Ti氧化物的氧化物，并且是超薄的，因此可以认为是不连续的膜。平坦化层和超薄氧化物膜改善了Co合金记录层的生长均匀性，使得具有数据岛的图案化盘显示出显着降低的SFD。

10. 发明申请

US20120092790A1 PATTERNED PERPENDICULAR MAGNETIC RECORDING DISK DRIVE AND MEDIUM WITH PATTERNED EXCHANGE BRIDGE LAYER BELOW THE DATA ISLANDS 有权
标题翻译：图形数字岛上的图形交换电路板图形磁记录磁盘驱动器和介质
公开(公告)号：US20120092790A1
公开(公告)日：2012-04-19
申请号：US12906909
申请日：2010-10-18
申请人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
发明人： Olav Hellwig , Dan Saylor Kercher , Ernesto E. Marinero , Manfred Ernst Schabes , Dieter K. Weller , Gabriel Zeltzer
IPC分类号： G11B5/82 , G11B5/02 , G11B5/706 , G11B5/127
CPC分类号： G11B5/855 , G11B5/746 , G11B2005/0021
摘要： A patterned perpendicular magnetic recording disk with discrete data islands of recording layer (RL) material includes a substrate, a patterned exchange bridge layer of magnetic material between the substrate and the islands, and an optional exchange-coupling control layer (CCL) between the exchange bridge layer and the islands. The exchange bridge layer has patterned pedestals below the islands. The exchange bridge layer controls exchange interactions between the RLs in adjacent islands to compensate the dipolar fields between islands, and the pedestals concentrate the flux from the write head. The disk may include a soft underlayer (SUL) of soft magnetically permeable material on the substrate and a nonmagnetic exchange break layer (EBL) on the SUL between the SUL and the exchange bridge layer. In a thermally-assisted recording (TAR) disk a heat sink layer may be located below the exchange bridge layer and the SUL may be optional.
摘要翻译：具有记录层（RL）材料的离散数据岛的图案化垂直磁记录盘包括衬底，在衬底和岛之间的图案化的磁性材料交换桥接层，以及在交换器之间的任选的交换耦合控制层（CCL）桥梁层和岛屿。交换桥层在岛屿下方有图案化的基座。交换桥接层控制相邻岛中的RL之间的交换相互作用以补偿岛之间的偶极场，并且基座集中来自写头的磁通。盘可以包括在衬底上的软磁性可渗透材料的软底层（SUL）和在SUL和交换桥接层之间的SUL上的非磁性交换断层（EBL）。在热辅助记录（TAR）盘中，散热层可以位于交换桥接层下方，并且SUL可以是可选的。

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