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    • 3. 发明申请
    • MICROFABRICATED BLAZED GRATING, DEVICES IN WHICH SUCH A GRATING IS EMPLOYED AND FABRICATION PROCESS
    • 微晶玻璃磨粒,这样的设备被使用和制造过程
    • WO2007082952A1
    • 2007-07-26
    • PCT/EP2007/050605
    • 2007-01-22
    • CSEM Centre Suisse d'Electronique et de Microtechnique SA Recherche et DéveloppementSTANLEY, RossTORMEN, MaurizioKUNZ, RinoNIEDERMANN, Philippe
    • STANLEY, RossTORMEN, MaurizioKUNZ, RinoNIEDERMANN, Philippe
    • G02B5/18G02B26/08H01S5/14H01S5/065
    • G01J3/1804G02B5/1828G02B26/0808H01S5/141
    • A blazed grating, in particular of the microfabricated type, is disclosed as well as mode hop-free tunable lasers in which this grating is employed, and a process for fabricating gratings of this type. The grating lies in a general plane and comprises a plurality of elongate beams carrying mutually parallel respective reflection surfaces spaced apart from one another with a predefined pitch, each of these reflection surfaces having a normal direction inclined at a grating angle α to the normal direction of the general plane. Furthermore, the grating comprises a plurality of resilient suspension arms connected to the beams and intended to be fastened to a grating support. The suspension arms, the beams and their respective reflection surfaces define an assembly formed from a single part. A first pair of comb electrodes is provided for applying a mechanical force to this assembly, these being placed on a first side of the grating, along an axis transverse to the beams, and designed so as to allow the pitch of the grating to be modified in response to the application of the mechanical force. A second pair of electrodes placed on the opposite side from the first allows, in combination with the first pair, application of a displacement of the assembly, possibly without deforming it. It is thus possible to modulate the wavelength and/or the phase of a light beam with a device that is simple and inexpensive to fabricate and has a small footprint.
    • 公开了特别是微制造型的闪耀光栅,以及其中使用该光栅的无模式跳跃可调激光器,以及用于制造这种光栅的工艺。 光栅位于一般平面中,并且包括多个细长梁,其承载相互平行的各自的反射表面,以预定间距彼此间隔开,这些反射表面中的每一个具有垂直于相对于 一般飞机。 此外,光栅包括连接到光束并旨在被紧固到光栅支撑件上的多个弹性悬挂臂。 悬挂臂,梁及其各自的反射表面限定由单个部件形成的组件。 提供第一对梳电极用于向该组件施加机械力,这些组合电极沿横向于梁的轴线放置在光栅的第一侧上,并被设计成允许光栅的间距被改变 响应机械力的应用。 放置在与第一对相反的一侧的第二对电极允许与第一对组合施加组件的位移,可能不使其变形。 因此,可以用制造简单且便宜并且占地面积小的装置来调制光束的波长和/或相位。