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1. 发明专利

JPS63248449A DRAFT CHAMBER 失效
公开(公告)号：JPS63248449A
公开(公告)日：1988-10-14
申请号：JP8237887
申请日：1987-04-03
申请人： OMI TADAHIRO , HITACHI PLANT ENG & CONSTR CO
发明人： HIRATSUKA YUTAKA , OMI TADAHIRO , MUROTA JUNICHI , FUJISAKI YOSHIO , NODA MASATO , KITADA YOSHIMITSU , SAWARA TERUTAKA
IPC分类号： B01L1/00 , H01L21/00 , H01L21/304 , H01L21/306
摘要： PURPOSE:To efficiently exhaust harmful gas with little draft amount without leaking it to a clean room by efficiently preventing diffusion of the harmful gas generating from a chemical tank by both sealing air in the nearly horizontal direction and down flow sent from a ceiling. CONSTITUTION:In a draft chamber provided in a clean room, a plurality of liquid tanks 20 are provided and also a window 12 used for operating a carrier is provided in the front part and treatment wherein the carrier is successively immersed into the liquid tanks 20 is performed. In a first air flow generation means 40, 46, 48 and 76, the first air flow in the nearly horizontal direction which is directed to the rear from the front part of the draft chamber is generated on the upper part of the liquid surface of the chemical tank generating at least harmful gas among the liquid tanks. Further in a second air flow generation means 60, 64 and 66, the second air flow directed to the lower part from the ceiling of the draft chamber is generated. As a result the harmful gas generating from the chemical tank can be efficiently exhausted with little draft amount without leaking it to the clean room.

2. 发明专利

JPS62158325A ACCOMMODATION CASE FOR CHEMICAL LIQUID TANK 失效
公开(公告)号：JPS62158325A
公开(公告)日：1987-07-14
申请号：JP29923685
申请日：1985-12-28
申请人： OMI TADAHIRO , HITACHI PLANT ENG & CONSTR CO
发明人： NAKAJIMA NOBORU , OMI TADAHIRO , MUROTA JUNICHI , FUKUDA MUNEHARU , YAMAZAKI TADASHI , FUJISAKI YOSHIO , KOMATSU YASUHIRO , KITADA YOSHIMITSU , KASAI MASATAKA
IPC分类号： H01L21/306 , B01D5/00 , B01D53/34 , B01D53/68 , H01L21/30 , H01L21/304
摘要： PURPOSE:To prevent the diffusion of a harmful vapor gas in an accommodation case, by sealing up the harmful vapor gas with a seal gas which is inactive and heavier in specific gravity than air. CONSTITUTION:A fluoric acid solution B in a chemical liquid tank 24 is heated by a heater 26, and thereby a hydrogen fluoride vapor gas is generated from the surface of the solution. The hydrogen fluoride vapor gas thus generated is cooled in contact with cooling Freon while it rises in diffusion, and thereby it is liquefied again with its laten heat taken away. Thus, the generated hydro gen fluoride vapor gas does not diffuse in a casing 12 and returns to the chemi cal liquid tank 24. The part of the generated hydrogen fluoride vapor gas which is not liquefied is drawn into the flow of Freon gas from an injection port 32 and sent into vapor gas treating equipment 30 from a suction port 34, and thus the hydrogen fluoride vapor gas is collected completely. By using a seal gas of Freon being inactive and having large specific gravity, in this way, the diffusion of a harmful gas such as hydrogen fluoride vapor gas can be prevented.

3. 发明专利

JPH06296940A METHOD AND DEVICE FOR PRESSURE-SWINGING CLEANING 失效
公开(公告)号：JPH06296940A
公开(公告)日：1994-10-25
申请号：JP5786791
申请日：1991-02-28
申请人： HITACHI PLANT ENG & CONSTR CO , HITACHI LTD , H P C KIDEN ENG KK
发明人： SAWARA TERUTAKA , SUZUKI TADASHI , YAMAZAKI SHIZUO , KAWASHIMA HITOSHI , MIZUSHIMA KIYOTAKA , MATSUMOTO FUMITOSHI , FUJISAKI YOSHIO , KOMATSU YASUHIRO , YAMAZAKI TADASHI , KASAI MASATAKA
IPC分类号： B08B3/10
摘要： PURPOSE:To enhance a bag hole cleaning effect at the time of cleaning an article having a bag hole, etc., by dipping the article in a cleaning solvent (or pure water), evacuating the solvent tank close to the b.p. of the cleaning solvent, releasing the tank to normal pressure and repeating the process while swinging the pressure. CONSTITUTION:This cleaning equipment consists of a detergent cleaning stage, a pure-water cleaning stage and a drying stage, and an article such as a cap nut having a bag hole is continuoulsy passed through the respective stages and cleaned. The detergent cleaning stage and the pure-water cleaning stage have a liq. vessel 10 provided with a stage liq. container 14 in a pressure vessel main body 12, two rear liq. vessels 10, in the detergent cleaning stage and three intermediate liq. vessels 104 and 105 in the pure-water cleaning stage are respectively provided with a closing lid 18 and constituted as a vacuum vessel. Ultrasonic cleaning by an ultrasonic vibrator 39 and pressure-swinging cleaning are conducted in the vessels 102, 104 and 105 to vaporize a part of the cleaning solvent and pure water in the bag hole, and the liq. is replaced by the liq. outside the hole to promote cleaning.

4. 发明专利

JPS62154391A CLEANING DEVICE FOR DISK GROUP 失效
公开(公告)号：JPS62154391A
公开(公告)日：1987-07-09
申请号：JP29844685
申请日：1985-12-27
申请人： HITACHI PLANT ENG & CONSTR CO
发明人： FUJISAKI YOSHIO , KOMATSU YASUHIRO , ARAI TOSHITARO
IPC分类号： B08B1/04 , G11B5/84 , G11B23/50 , H01L21/304
摘要： PURPOSE:To collectively and efficiently clean a disk group with a brush by inserting disk brushes to be a brushing means into respective disks in the disk group supported by a supporting means and a roller means and cleaning the surfaces of the disks with the brushes in accordance with the rotation of the disk brush. CONSTITUTION:The disk 20 is supported by a supporting shaft 22 at its inner pheripheral upper part and by a roller at two points of its outer peripheral upper part so as to be supported by three points. The brushing means has a rotary shaft 46 on the chip of an arm 40 and plural disk brushes 42 are fitted to the rotary shaft 46 at the same pitch as the disks 20 in parallel. At the brush-cleaning of the disk group, the tip of the arm 40 is rotated as an arrow D and the disk brushes 42 are moved to the position shown by an alternate long and two short dashes line E. Under said state, respective disk brushes 42 are inserted into parallel disks 20 and the surfaces of the disks 20 are cleaned with the brushes by rotating the disk brushes 42. In accordance with the disk brushes 42, the disks 20 are rotated by frictional resistance between the disk brushes and the disk surfaces. Thereby, the whole surfaces of the disks 20 are inevitably cleaned with the brushes.

5. 发明专利

JPH054726B2 失效
公开(公告)号：JPH054726B2
公开(公告)日：1993-01-20
申请号：JP29844885
申请日：1985-12-27
申请人： HITACHI PLANT ENG & CONSTR CO
发明人： KITADA YOSHIMITSU , FUJISAKI YOSHIO , ARAI TOSHITARO
IPC分类号： B08B1/02 , B08B1/04 , G11B5/84 , G11B23/50 , H01L21/304

6. 发明专利

JPH038821B2 失效
公开(公告)号：JPH038821B2
公开(公告)日：1991-02-07
申请号：JP8237887
申请日：1987-04-03
申请人： HITACHI PLANT ENG & CONSTR CO
发明人： HIRATSUKA YUTAKA , OOMI TADAHIRO , MUROTA JUNICHI , FUJISAKI YOSHIO , NODA MASATO , KITADA YOSHIMITSU , SAWARA TERUTAKA
IPC分类号： B01L1/00 , H01L21/00 , H01L21/304 , H01L21/306

7. 发明专利

JPS62154392A BRUSH-CLEANING DEVICE FOR DISK 失效
公开(公告)号：JPS62154392A
公开(公告)日：1987-07-09
申请号：JP29844885
申请日：1985-12-27
申请人： HITACHI PLANT ENG & CONSTR CO
发明人： KITADA YOSHIMITSU , FUJISAKI YOSHIO , ARAI TOSHITARO
IPC分类号： B08B1/02 , B08B1/04 , G11B5/84 , G11B23/50 , H01L21/304
摘要： PURPOSE:To automate brush-cleaning of disks stored in disk carriers and to improve productivity by taking out each disk from each disk carrier one by one and cleaning the surface of the disk with a brush-cleaning means arranged on the way of the track of the carrying means. CONSTITUTION:The disks sent from the carrier 12 are held by the 1st disk clamping means 18 one by one and taken out to the outside of the carrier 12. The empty carrier 12 is transferred in the order of B-D and reached a carrying table 24. Each disk 14 is delivered to a disk receiver 30 arranged on the upper left end position, moved on an endless track 28 by one stroke and then cleaned by the brush-cleaning means 32 on the position. The disk 14 cleaned with the brush is stored in each empty disk carrier 12 sent in each pitch by the 2nd disk clamping means 44.

8. 发明专利

JPH05212360A METHOD AND APPARATUS FOR VACUUM WASHING 失效
公开(公告)号：JPH05212360A
公开(公告)日：1993-08-24
申请号：JP4756592
申请日：1992-02-03
申请人： HITACHI PLANT ENG & CONSTR CO
发明人： SAWARA TERUTAKA , FUJISAKI YOSHIO , KOMATSU YASUHIRO
IPC分类号： B08B3/04
摘要： PURPOSE:To wash a blind hole hard to wash by dipping an article in a washing solution under reduced pressure to remove the air bubble and contaminant in the blind hole and subsequently placing the article under reduced pressure boiling the washing solution to remove the washing solution and contaminant in the blind hole. CONSTITUTION:An article is dipped in the washing solution 42 of a first washing tank 14A and the washing tank 14A is reduced in pressure by a vacuum means 22 and the air bubble present in the blind hole of the article is removed to introduce the washing solution 42 into the blind hole to wash off the contaminant of the blind hole. Next, the article is taken out of the washing tank 14A to be placed in a first vacuum tank 28A and the tank 28A is reduced in pressure until the washing solution in the blind hole bumps to remove the washing solution stagnated in the blind hole along with the contaminant.

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