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1. 发明专利

JPH1073608A BASE MEMBER OF CANTILEVER TIP FOR SCANNING PROBE MICROSCOPE AND CANTILEVER TIP FOR SCANNING PROBE MICROSCOPE USING THE SAME 失效
公开(公告)号：JPH1073608A
公开(公告)日：1998-03-17
申请号：JP23078396
申请日：1996-08-30
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO , TODA AKITOSHI
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/38 , G01Q70/10
摘要： PROBLEM TO BE SOLVED: To provide the base member, of a cantilever for a scanning probe microscope, in which a spherical probe can be bonded to a prescribed position with high accuracy and easily. SOLUTION: The base member 100 of a cantilever tip for a scanning probe microscope is provided with a rectangular cantilever 106 which is extended from a support part 102, and a circular opening part 108 is formed in its free end part. In addition, the base member 100 is provided with a hollow triangular cantilever 110 which is extended from the support part 102, and a circular opening part 112 is formed in its free end part. The support part 102 is composed of a glass, and the cantilevers 106, 110 are composed of silicon nitride films. A gold coating is executed to the rear (the surface in the figure) of the cantilevers 106, 110. The gold coating is executed in order to detect the displacement of high-accuracy cantilever, and it satisfactorily reflects the sensor light, of an optical displacement sensor, with which every cantilever is irradiated.

2. 发明专利

JPH09126833A BEAM STRUCTURE OF AMORPHOUS ALLOY AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JPH09126833A
公开(公告)日：1997-05-16
申请号：JP28362495
申请日：1995-10-31
申请人： OLYMPUS OPTICAL CO
发明人： TODA AKITOSHI , MATSUYAMA KATSUHIRO , HATA SEIICHI
IPC分类号： G01L1/18 , B81B3/00 , B81C1/00 , C22C45/00 , G01B21/30 , G01D21/00 , G01N37/00 , G01P15/12 , G01Q60/04 , G01Q60/38 , G01Q60/40 , G01Q90/00 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a conductive beam structure with high hardness and high toughness. SOLUTION: A beam structure array 100 contains a plurality of beam structures 110. Each beam structure 110 contains a supporting 112, an intermediate supporting part 114 thinner than the supporting part 112, a cantilever part 116 extending from the intermediate supporting parts 114 and a protruding part 118 formed on the tip of the cantilever part 116. The supporting part 112 of each beam structure 110 is connected to a frame 102 with three connection members 104. The form of cantilever part 116 has length of 1mm, a width of 250μm and a thickness of 15μm, and the protruding part 118 has height of 2.8μm. The beam structure array 100 is formed out of the same amorphous alloy material, and, for example, with the use of superplastic flow in a supercooled liquid area that the amorphous alloy has, manufacture is performed with what is called a forging method.

3. 发明专利

JPH08313541A CANTILEVER FOR SCANNING PROBE MICROSCOPE AND ITS MANUFACTURE 失效
公开(公告)号：JPH08313541A
公开(公告)日：1996-11-29
申请号：JP11732595
申请日：1995-05-16
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO
IPC分类号： G01B21/30 , B81B1/00 , G01N37/00 , G01Q60/04 , G01Q60/16 , G01Q60/38 , G01Q70/02 , G01Q70/10 , G01Q70/16 , G01Q90/00 , H01J37/28
摘要： PURPOSE: To provide a cantilever for scanning probe microscope which can make high-resolution SPM measurement, and provide also its manufacturing method. CONSTITUTION: A cantilever for scanning probe microscope is manufactured in such a way that, after a bonded substrate 108 is obtained by sticking a second substrate 106 to an oxide film 104 formed on one surface of a first substrate 102, the substrate 106 is shaped in the shape of a lever section and an oxide film 112 is formed on the side end face of the lever section. Then a probe section is formed at part of the lever section after etching the substrate 106 to a prescribed thickness and an oxide film 118 is formed on the surface of the substrate 106. After forming the film 118, a supporting section is formed in the substrate 102 and part of the oxide film 104 formed on the surface of the substrate 102, oxide film 112 formed on the side end face of the lever section, and oxide film 118 formed on the surface of the substrate 106 are removed.

4. 发明专利

JPH0571950A CANTILEVER CHIP FOR SCANNING-TYPE PROBE MICROSCOPE 失效
公开(公告)号：JPH0571950A
公开(公告)日：1993-03-23
申请号：JP23656191
申请日：1991-09-17
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO , TODA AKITOSHI
IPC分类号： G01B21/30 , G01B7/34 , G01Q60/38 , G01Q70/08 , H01J37/28
摘要： PURPOSE:To obtain a cantilever chip with less change in characteristics for a position deviation in the case of joint to a retention substrate or mounting to a device. CONSTITUTION:A cantilever chip 10 is provided with two cantilever parts 12 and 14 and the cantilever parts 12 and 14 are provided with a probe 16 at a tip part. Triangular cuts 18 are provided at both sides of a root of the cantilever part 12 of a hollow triangle and rectangular cuts 20 are provided at both sides of a root of the triangular cantilever part 14, thus enabling a starting edge (namely a tie part with a support part 24) of the cantilever parts 12 and 14 to be located inside an alignment edge 22 which is an edge part of the support part 24.

5. 发明专利

JP2000193672A CANTILEVER FOR SCANNING TYPE PROBE MICROSCOPE AND PREPARATION METHOD THEREOF 失效
公开(公告)号：JP2000193672A
公开(公告)日：2000-07-14
申请号：JP37034798
申请日：1998-12-25
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO
IPC分类号： G01B7/34 , G01B7/00 , G01B21/30 , G01N37/00 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To provide a cantilever provided with a probe of which a curvature of a tip end is small and an wear resistance is excellent. SOLUTION: This cantilever 130 has a lever portion 12 overhangly supported by a support portion 122 and the lever portion 126 mainly comprises a lever base material 118 made of silicon nitride and has an approximately trigonal shaped probe at a free end thereof. The probe 124 is integrally formed with the lever base material 118 and therefore, is made of silicon nitride, and has higher hardness and a further superior wear resistance, in comparison with a prove made of silicon. The probe 124 has an approximately trigonal shape, and therefore since it is always terminated at one point, the curvature of the tip end thereof is small.

6. 发明专利

JPH11337562A CANTILEVER FOR SCANNING TYPE PROBE MICROSCOPE 失效
公开(公告)号：JPH11337562A
公开(公告)日：1999-12-10
申请号：JP8003299
申请日：1999-03-24
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To provide a cantilever equipped with a probe part having a tip with high sharpness. SOLUTION: The probe part 138 of the cantilever has a tip part having a trigonal pyramid-like shape, and two of the three faces prescribing the tip part are silicon faces (111), (110), and the residual face on the support part side 144 is formed by an artificial working. Therefore, the radius of curvature of the tip of the probe part 138 results from a process in which the face 144 on the support part side is formed. The face 144 is determined by an etching face at the time of forming a probe forming part for forming a probe base part which is a preparatory forming part of the probe part 138. The etching face of the probe forming part is formed by a photolithography and a dry etching, and a gradient θ, against a face including a face (110) parallel to the face of a lever part 140, can be selected optionally by a manufacture of the cantilever. Therefore, a probe part having a high aspect ratio can be formed by selecting a large value as the gradient θ.

7. 发明专利

JPH09243648A CANTILEVER CHIP 失效
公开(公告)号：JPH09243648A
公开(公告)日：1997-09-19
申请号：JP5479996
申请日：1996-03-12
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO
IPC分类号： G01B21/30 , G01N37/00 , G01Q20/04 , G01Q60/16 , G01Q60/38 , G01Q70/16 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a cantilever chip by which the tip of a probe can be scanned smoothly and surely with reference to a desired measuring place without being affected by the surface shape of a sample. SOLUTION: A cantilever chip 2 is provided with a support part 4 which comprises a support face 4a and a mounting face 4b facing the support face, with a cantilever 6 which is supported by the support face 4a at the support part 4 and with a probe 8 which is installed at the free end of the cantilever 6. At the support part 4, the width size of the support face 4a is reduced more than the width size of the mounting face 4b so that a probe can be scanned to a desired measuring place without being affected by the surface shape of a sample. The width size W1 of the support face 4a is reduced more than the width size W2 of the mounting face 4b by which the cantilever chip is attached to an SPM apparatus. A first slope 10 and a second slope 12 which are formed along the longer axis of the cantilever 6 are exposed between the support face 4a and the mounting face 4b.

8. 发明专利

JPH08178639A MANUFACTURING METHOD AND DEVICE, AND PREFORM OF CANTILEVER FOR NEAR-FIELD SCANNING OPTICAL MICROSCOPE 失效
公开(公告)号：JPH08178639A
公开(公告)日：1996-07-12
申请号：JP32188894
申请日：1994-12-26
申请人： OLYMPUS OPTICAL CO
发明人： TODA AKITOSHI , TATEYAMA KIYOHIKO , MATSUYAMA KATSUHIRO
IPC分类号： G01B11/30 , G01N37/00 , G01Q60/16 , G01Q60/22 , G01Q60/24 , G02B21/00
摘要： PURPOSE: To provide a cantilever for a near-field scanning optical microscope having a probe with a microopening at its end and incorporating an atomic force microscope. CONSTITUTION: A holding means 210 by which the probe of a preform 126' is supported while being opposite to a counter electrode 208 is provided. The counter electrode 208 is replaceably fixed on a counter electrode holding means 206 fixed to a vertically moving stage 204, and its distance to the probe is adjustable. In order to monitor that interval, an optical-lever type displacement measuring means consisting of a laser beam source 212 and a two-piece photodetector 214 is provided. The counter electrode 208 is connected to a voltage source 216, and the conductive light-blocking coating of the preform 126' is connected to the voltage source 216 via a current detection means 218 and a switch 224. The current detection means 218 comprises a resistance 220 and a voltmeter 222. A capacitor 226 is provided between the conductive light- blocking coating and the counter electrode 208.

9. 发明专利

JPH07325092A INTEGRATED SPM SENSOR AND ITS TEMPERATURE MEASURING CIRCUIT 失效
公开(公告)号：JPH07325092A
公开(公告)日：1995-12-12
申请号：JP11940794
申请日：1994-05-31
申请人： OLYMPUS OPTICAL CO
发明人： MATSUYAMA KATSUHIRO
IPC分类号： G01K7/18 , G01B7/00 , G01B7/16 , G01B21/30 , G01N37/00 , G01Q20/04 , G01Q70/08 , G01Q90/00 , H01J37/28
摘要： PURPOSE:To provide the integrated SPM sensor provided with a function measuring the temperature of its canti-lever section. CONSTITUTION:The integrated SPM sensor is provided with a canti-lever 124 in a U shape extended out of a support section 110. The canti-lever 124 is so constituted as to have a piezo-resistance layer 116 laminated underneath a silicon layer 114, and a metallic film for example a platinum (Pt) film laminated over the silicon layer. A probe 130 is provided for the tip end section of the canti-lever 124. The piezo-resistance layer 116 is covered by insulating layers 112 and 118 so as to be insulated, and an electrode 120 made conductive through a contact hole opened in the insulating layer is provided for the end section of the insulating layer. The metallic film 132 is not confined only to the upper surface of the canti-lever 124, but raised up to the inclined surface of the support section 110, still extended up to the top of the insulating layer 122 over the surface, and turned out to be an electrode at the insulating layer 122.

10. 发明专利

JPH06300557A INTEGRATED AFM SENSOR AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH06300557A
公开(公告)日：1994-10-28
申请号：JP11421193
申请日：1993-04-19
申请人： OLYMPUS OPTICAL CO
发明人： TAKAYAMA MICHIO , UEDA HIROSHI , TODA AKITOSHI , MATSUYAMA KATSUHIRO
IPC分类号： G01B21/30 , G01Q20/04 , G01Q60/24 , G01Q60/38 , H01J9/14 , H01J37/28
摘要： PURPOSE:To prevent the contact of a lead wire fixing section with a specimen, and also a lead wire from being detached, regarding an integrated AFM sensor having a piezoelectric resistance layer on the surface of a cantilever for detecting the displacement thereof via the resistance change of the layer. CONSTITUTION:A piezoelectric resistance layer 116 is formed on the surface of a cantilever 120 in an integrated AFM sensor, or the side of the cantilever 120 faced to the surface of a specimen, and a connecting conductive layer 114 of impurity dispersion layer is provided, so as to come in contact with the end of the layer 116 and reach the reverse side of the cantilever 120, or the support side thereof. In addition, an electrode 121 for voltage supply to the layer 116 is formed on the layer 114 on the reverse side of the cantilever 120.

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