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    • 8. 发明专利
    • FLOW RATE CONTROL DEVICE OF WATER TANK
    • JPS61170801A
    • 1986-08-01
    • JP1151985
    • 1985-01-24
    • MITSUI SHIPBUILDING ENG
    • OGURO KENJI
    • G05B7/02G05D7/06
    • PURPOSE:To shorten an arrival time at a set flow rate value and to improve experimental accuracy by adding a flow rate controller and a control switch. CONSTITUTION:In a water tank flow rate control device, an impeller 2 is arranged in a water tank 1 and rotated by a DC motor 3. The impeller 2 can be stably driven on the basis of an output of a number of revolution controller 4 which is obtained by inputting a value obtained by converting a signal outputted from a number of revolution setting digital switch 12 by a D/A converter 13 and a detecting value outputted from a tachogenerator 6 to the number of revolution controller 4. In this case, the flow rate controller 16 having a PID adjuster 15 and the control switch 17 having a converter 18 and a detector 19 are inserted between the D/A converter 13 and the controller 4 and a detecting value of a flow rate gauge 10 is negatively fed back to the adjuster 15. When the motor 3 is rotated at a low speed, switches 20, 21 are opened, the flow rate controller 16 is separated from the control device and switch 22 is closed to connect the converter 18 to the controller 4. When the rotation of the motor 3 reaches the prescribed rotational frequency, the switches 20, 21 are closed and the switch 22 is opened to execute prescribed control.
    • 9. 发明专利
    • WORK LINEAR TRAVELLING DEVICE
    • JP2000072247A
    • 2000-03-07
    • JP24971198
    • 1998-09-03
    • MITSUI SHIPBUILDING ENG
    • OGURO KENJISASAKI MASAHIKOWATANABE KENJI
    • H01L21/302B65G49/06H01L21/3065H01L21/68H01L21/683
    • PROBLEM TO BE SOLVED: To reduce the generation of contaminants such as particle. SOLUTION: This work linear travelling device 10 is provided with a driving winding drum 14 and a driven winding drum 16 on the lower and upper sides of a work clamping unit 12. Driving belts 44, 46 are tightly-stretched between the winding drums 14, 16 and the work clamping unit 12. The circumferences of the driving winding drum 14 and the driven winding drum 16 are longer than the traveling distance of the work clamping unit 12 so that the driving belts 44, 46 wound by the winding drums 14, 16 may not overlap each other when the work clamping unit 12 moves to a lower limit or an upper limit. A synchronous belt 60 is wound and tightly-stretched between the driving winding drum 14 and the driven winding drum 16 in the opposite direction to the driving belts 44, 46. When the driving winding drum 14 rotates in such a direction that the driving belt 44 is unwound, the synchronous belt 60 wound around the driving winding drum 14 and rotates the driven winding drum 16 in the same direction as the driving winding drum 14 to wind the driving belt 46 around the driven winding drum 16, thus it is possible to move up the work clamping unit 12.