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1. 发明申请

WO2012098051A1 METHOD FOR MANUFACTURING A MULTILAYER OF A TRANSPARENT CONDUCTIVE OXIDE 审中-公开
标题翻译：用于制造透明导电氧化物的多层的方法
公开(公告)号：WO2012098051A1
公开(公告)日：2012-07-26
申请号：PCT/EP2012/050477
申请日：2012-01-13
申请人： OERLIKON SOLAR AG, TRUEBBACH , LOSIO, Paolo , CAGLAR, Onur , RECHTSTEINER, Peter , CARROY, Perrine , CHRIST, Holger , DING, Laura , SYLVAIN, Nicolay
发明人： LOSIO, Paolo , CAGLAR, Onur , RECHTSTEINER, Peter , CARROY, Perrine , CHRIST, Holger , DING, Laura , SYLVAIN, Nicolay
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/1884 , H01L31/022466 , H01L31/022483 , H01L31/076 , Y02E10/548
摘要： The invention relates to a multi-part transparent conductive zinc oxide layer for a photoelectric conversion device, and a method of producing the same. The transparent conductive zinc oxide layer comprises at least one basic layer sequence with varying boron dopant concentration, said basic layer sequence comprising a thinner transparent conductive zinc oxide higher-boron-doped layer (72; 74) and a thicker transparent conductive zinc oxide lower-boron-doped layer (73; 75). Inventively, the doping density through each individual conductive zinc oxide layer (72, 73; 74, 75) is substantially constant, which is achieved by intentionally doping the thicker transparent conductive zinc oxide lower-boron-doped layer (73; 75). This has the advantage of permitting efficient Edge Isolation by Laser EIL ablation of the transparent conductive zinc oxide layers while maintaining good electrical and optical properties in said layers.
摘要翻译：本发明涉及一种用于光电转换装置的多部分透明导电氧化锌层及其制造方法。所述透明导电氧化锌层包括至少一个具有不同硼掺杂剂浓度的碱性层序列，所述碱层序列包括较薄的透明导电氧化锌高硼掺杂层（72; 74）和较厚的透明导电氧化锌低层掺杂层硼掺杂层（73; 75）。本发明通过每个单独的导电氧化锌层（72,73,74,75）的掺杂密度基本上是恒定的，这是通过有意掺杂较厚的透明导电氧化锌低硼掺杂层（73; 75）来实现的。这具有允许通过激光EIL消除透明导电氧化锌层的有效边缘隔离，同时在所述层中保持良好的电气和光学性质的优点。

2. 发明申请

WO2012098052A1 METHOD FOR MANUFACTURING A MULTILAYER OF A TRANSPARENT CONDUCTIVE OXIDE 审中-公开
标题翻译：用于制造透明导电氧化物的多层的方法
公开(公告)号：WO2012098052A1
公开(公告)日：2012-07-26
申请号：PCT/EP2012/050479
申请日：2012-01-13
申请人： OERLIKON SOLAR AG, TRUEBBACH , LOSIO, Paolo , CAGLAR, Onur , RECHTSTEINER, Peter , CARROY, Perrine , CHRIST, Holger
发明人： LOSIO, Paolo , CAGLAR, Onur , RECHTSTEINER, Peter , CARROY, Perrine , CHRIST, Holger
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/022483 , H01L31/076 , H01L31/1884 , Y02E10/548
摘要： The present application relates to a multi-part transparent conductive zinc oxide layer for a photoelectric conversion device, and a method of producing the same. The transparent conductive zinc oxide layer comprises at least one basic layer sequence with varying boron doped and concentration, said basic layer sequence comprising a thinner transparent conductive zinc oxide higher-boron-doped layer (72; 74) and a thicker transparent conductive zinc oxide lower-boron-doped layer (73; 75). Inventively, the doping density through each individual conductive zinc oxide layer (72, 73; 74, 75) is substantially constant, which is achieved by intentionally doping the thicker transparent conductive zinc oxide lower-boron-doped layer (73; 75). Optionally, an interlayer may be present between the at least one basic layer sequence and the substrate (71) or n-doped silicon layer (46) upon which it is disposed. This has the advantage of permitting efficient Edge Isolation by Laser EIL ablation of the transparent conductive zinc oxide layers while maintaining good electrical and optical properties in said layers.
摘要翻译：本申请涉及一种用于光电转换装置的多部分透明导电氧化锌层及其制造方法。透明导电氧化锌层包括至少一个具有变化的硼掺杂和浓度的碱性层序列，所述碱性层序列包括较薄的透明导电氧化锌高硼掺杂层（72; 74）和较厚的透明导电氧化锌较低硼掺杂层（73; 75）。本发明通过每个单独的导电氧化锌层（72,73,74,75）的掺杂密度基本上是恒定的，这是通过有意掺杂较厚的透明导电氧化锌低硼掺杂层（73; 75）来实现的。任选地，中间层可以存在于至少一个碱性层序列与其所配置的衬底（71）或n掺杂硅层（46）之间。这具有允许通过激光EIL消除透明导电氧化锌层的有效边缘隔离，同时在所述层中保持良好的电气和光学性质的优点。

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