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1. 发明申请

WO2009109447A3 CHIP DISCARDER 审中-公开
标题翻译：切屑排出
公开(公告)号：WO2009109447A3
公开(公告)日：2009-12-10
申请号：PCT/EP2009051597
申请日：2009-02-11
申请人： OERLIKON ASSEMBLY EQUIPMENT AG , GRUETER RUEDI , MUEHLEMANN IVES
发明人： GRUETER RUEDI , MUEHLEMANN IVES
IPC分类号： H01L21/00 , H01L21/683
CPC分类号： H01L21/67132 , H01L21/6838
摘要： A chip discarder (1) comprises a chamber (2) that can be subjected to a vacuum, said chamber comprising a cover plate (3) that has a plurality of depressions (4) and at least four slits (5), wherein the slits (5) run from a pre-determined center (6) outward in the radial direction. Disposed in the chamber (2) is a ram (9) that comprises at least four cross-pieces (10) that protrude into the slit (5). The ram (9) can move perpendicular to the cover plate (3) so that the cross-pieces (10) overhang over the cover plate (3) in a raised position. The number of slits (5) is advantageously at least eight and the outline formed by the ends of the cross-pieces (10) of the ram (9) advantageously comprises concave and/or convex sections.
摘要翻译：一种排屑器（1）包括一个真空负载室（2），该真空负载室具有一个具有多个凹槽（4）和至少四个槽（5）的盖板（3），槽（5）从预定中心（6）沿径向延伸。在腔室（2）中布置有柱塞（9），该柱塞具有至少四个突出到所述狭槽（5）中的腹板（10）。柱塞9垂直于可移动的盖板3，从而在升高的位置，盖板3上的腹板10突出。狭槽（5）的数量有利地为至少八个，并且由柱塞（9）的腹板（10）的端部形成的轮廓有利地由凹入和/或凸出部分组成。

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