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1. 发明申请

US20050214960A1 Surface shape recognition sensor and method of manufacturing the same 有权
标题翻译：表面形状识别传感器及其制造方法
公开(公告)号：US20050214960A1
公开(公告)日：2005-09-29
申请号：US11102269
申请日：2005-04-07
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
IPC分类号： G06K9/00 , H01L21/66 , G01R31/26
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
摘要翻译：一种制造表面形状识别传感器的方法。牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。在牺牲膜和支撑电极上形成上电极。选择性地除去牺牲膜，并在上电极上形成保护膜。在保护膜上形成具有感光性的感光性树脂膜。在电容式检测元件上方的保护膜的区域中形成有多个突起。以这种方式形成多个具有下电极和上电极的电容检测元件。

2. 发明授权

US07360293B2 Method of manufacturing recognition sensor 有权
标题翻译：识别传感器的制造方法
公开(公告)号：US07360293B2
公开(公告)日：2008-04-22
申请号：US11102269
申请日：2005-04-07
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
IPC分类号： G01R3/00
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.
摘要翻译：一种制造表面形状识别传感器的方法。牺牲膜形成在层间电介质上以覆盖下电极，同时保持支撑电极的上部暴露。在牺牲膜和支撑电极上形成上电极。选择性地除去牺牲膜，并在上电极上形成保护膜。在保护膜上形成具有感光性的感光性树脂膜。在电容检测元件上方的保护膜的区域中形成有多个突起。以这种方式形成多个具有下电极和上电极的电容检测元件。

3. 发明授权

US07123026B2 Surface shape recognition sensor and method of manufacturing the same 有权
标题翻译：表面形状识别传感器及其制造方法
公开(公告)号：US07123026B2
公开(公告)日：2006-10-17
申请号：US10052640
申请日：2002-01-18
申请人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
发明人： Norio Sato , Katsuyuki Machida , Hakaru Kyuragi , Satoshi Shigematsu , Hiroki Morimura , Hiromu Ishii , Toshishige Shimamura
IPC分类号： G01R27/06 , G01R27/08
CPC分类号： G06K9/0002 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117 , Y10T29/4913
摘要： A surface shape recognition sensor includes capacitive detection elements, support electrode, protective film, and projections. The detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The projections per one pixel are laid out in a region of the protective film above the capacitive detection element.
摘要翻译：表面形状识别传感器包括电容性检测元件，支撑电极，保护膜和突起。检测元件由下电极和由金属制成的可变形的板状上电极形成。下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。上电极以预定间隔布置在下电极上方并具有开口部分。支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。保护膜形成在上电极上以封闭开口部分。每个像素的突起布置在电容检测元件上方的保护膜的区域中。

4. 发明授权

US07062075B2 Surface shape recognition sensor device 失效
公开(公告)号：US07062075B2
公开(公告)日：2006-06-13
申请号：US10140742
申请日：2002-05-07
申请人： Hiroki Morimura , Toshishige Shimamura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi
发明人： Hiroki Morimura , Toshishige Shimamura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi
IPC分类号： G06K9/00
CPC分类号： G06K9/0002
摘要： A calibration mode signal line to which sensor cells are commonly connected is arranged. In a calibration mode, a calibration mode signal is supplied to the sensor cells through the calibration mode signal line to designate calibration. In each sensor cell, when the calibration mode signal is being supplied from the calibration mode signal line, and the sensor cell is selected by the decoder, calibration operation of adjusting the detection sensitivity of a sensor circuit is executed using a calibration circuit.

5. 发明授权

US06556935B2 Small shape recognizing capacitive sensor device 有权
公开(公告)号：US06556935B2
公开(公告)日：2003-04-29
申请号：US09877829
申请日：2001-06-08
申请人： Hiroki Morimura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi , Toshishige Shimamura
发明人： Hiroki Morimura , Satoshi Shigematsu , Katsuyuki Machida , Hakaru Kyuragi , Toshishige Shimamura
IPC分类号： G01F2500
CPC分类号： G06K9/0002
摘要： A small shape recognizing capacitive sensor device includes detection elements, sensor circuits, and a correction circuit. The detection elements are arranged adjacent to each other. The sensor circuits are connected to the detection elements, respectively. The correction circuit corrects the output signal level of the sensor circuit. The output signal level correction circuit includes a calibration circuit, calibration reference signal generation circuit, and comparison circuit. The calibration circuit is connected to the output side of the sensor circuit. The calibration reference signal generation circuit generates a calibration reference signal. The comparison circuit compares the output from the sensor circuit with the calibration reference signal and supplies the difference output to the calibration circuit as a control signal. The calibration circuit corrects the level of the sensor circuit output on the basis of the control signal such that the difference between the output from the sensor circuit and the calibration reference signal becomes zero.

6. 发明授权

US06518083B2 Surface shape recognition sensor and method of manufacturing the same 有权
公开(公告)号：US06518083B2
公开(公告)日：2003-02-11
申请号：US10061045
申请日：2002-01-30
申请人： Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Hakaru Kyuragi
发明人： Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Hakaru Kyuragi
IPC分类号： H01L2100
CPC分类号： G06K9/0002
摘要： A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode. A method of manufacturing the surface shape recognition sensor is also disclosed.

7. 发明授权

US06727561B2 Surface shape recognition sensor and method of manufacturing the same 有权
标题翻译：表面形状识别传感器及其制造方法
公开(公告)号：US06727561B2
公开(公告)日：2004-04-27
申请号：US10299523
申请日：2002-11-19
申请人： Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Hakaru Kyuragi
发明人： Norio Sato , Katsuyuki Machida , Satoshi Shigematsu , Hiroki Morimura , Hakaru Kyuragi
IPC分类号： H01L2982
CPC分类号： G06K9/0002
摘要： A surface shape recognition sensor includes a plurality of capacitive detection elements, a support electrode, and a protective film. The capacitive detection elements are formed from lower electrodes and a deformable plate-like upper electrode made of a metal. The lower electrodes are insulated and isolated from each other and stationarily laid out on a single plane of an interlevel dielectric formed on a semiconductor substrate. The upper electrode is laid out above the lower electrodes at a predetermined interval and has a plurality of opening portions. The support electrode is laid out around the lower electrodes while being insulated and isolated from the lower electrodes, and formed to be higher than the lower electrodes to support the upper electrode. The protective film is formed on the upper electrode to close the opening portions. The opening portions of the upper electrode are laid out in a region other than regions on a main part of the lower electrode and on the support electrode. A method of manufacturing the surface shape recognition sensor is also disclosed.
摘要翻译：表面形状识别传感器包括多个电容检测元件，支撑电极和保护膜。电容检测元件由下电极和由金属制成的可变形的板状上电极形成。下电极彼此绝缘并隔离并且固定地布置在形成在半导体衬底上的层间电介质的单个平面上。上电极以预定间隔布置在下电极上方，并具有多个开口部分。支撑电极围绕下电极布置，同时与下电极绝缘和隔离，并且形成为高于下电极以支撑上电极。保护膜形成在上电极上以封闭开口部分。上电极的开口部分布置在下电极的主要部分和支撑电极上的区域之外的区域中。还公开了一种制造表面形状识别传感器的方法。

8. 发明申请

US20060034493A1 Organism recognition system 失效
标题翻译：生物识别系统
公开(公告)号：US20060034493A1
公开(公告)日：2006-02-16
申请号：US10520879
申请日：2004-08-12
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
IPC分类号： G06K9/00
CPC分类号： G06K9/0012 , A61B5/0531 , A61B5/1172 , A61B5/6826 , A61B5/6838 , G06K9/00899
摘要： A response signal generating unit (3) applies a predetermined supply signal (2S) to a detection element (1) and outputs, as a response signal (3S), a signal which has changed in accordance with the impedance of an object (10) with which the unit is in contact through the detection element (1). A waveform information detection unit (4) detects waveform information corresponding to the impedance of the object (10) on the basis of the response signal (3S) from the response signal generating unit (3), and outputs a detection signal (4S) representing the waveform information. A biometric recognition unit (5) determines on the basis of the detection signal (4S) from the waveform information detection unit (4) whether or not the object (10) is a living body.
摘要翻译：响应信号生成单元（3）将预定的供给信号（2S）施加到检测元件（1），并输出根据对象的阻抗而变化的信号作为响应信号（3S） 10），其通过检测元件（1）与单元接触。波形信息检测单元（4）根据来自响应信号生成单元（3）的响应信号（3 S）检测与物体（10）的阻抗相对应的波形信息，并输出检测信号（4S ）表示波形信息。生物识别单元（5）根据来自波形信息检测单元（4）的检测信号（4S）确定物体（10）是否为活体。

9. 发明授权

US07508963B2 Surface shape recognition sensor device 有权
标题翻译：表面形状识别传感器装置
公开(公告)号：US07508963B2
公开(公告)日：2009-03-24
申请号：US12079818
申请日：2008-03-28
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
IPC分类号： G06K9/00
CPC分类号： G06K9/0002 , G06K9/0012
摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).
摘要翻译：一种具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测电极（11B）的检测元件（1B）连接到表面形状检测单元（2）和连接到生物识别单元（3）的检测电极（12B）。表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。生物识别单元（3）基于与检测元件（1B）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是否为活体，和检测元件（1A）的检测电极（12A）。

10. 发明申请

US20080187192A1 Surface shape recognition sensor device 有权
标题翻译：表面形状识别传感器装置
公开(公告)号：US20080187192A1
公开(公告)日：2008-08-07
申请号：US12079818
申请日：2008-03-28
申请人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
发明人： Toshishige Shimamura , Hiroki Morimura , Satoshi Shigematsu , Norio Sato , Masami Urano , Katsuyuki Machida
IPC分类号： G06K9/00
CPC分类号： G06K9/0002 , G06K9/0012
摘要： A detection element (1A) having a detection electrode (11A) connected to a surface shape detection unit (2) and a detection electrode (12A) connected to a common potential, and a detection element (1B) having a detection electrode (11B) connected to the surface shape detection unit (2) and a detection electrode (12B) connected to a biometric recognition unit (3) are arranged. The surface shape detection unit (2) outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (1A, 1B). The biometric recognition unit (3) determines whether an object (9) is a living body, on the basis of a signal corresponding to the impedance of the object (9) connected between the detection electrode (12B) of the detection element (1B) and the detection electrode (12A) of the detection element (1A).
摘要翻译：具有连接到表面形状检测单元（2）的检测电极（11A）和与公共电位连接的检测电极（12A）的检测元件（1A）和具有检测元件连接到表面形状检测单元（2）的电极（11B）和连接到生物识别单元（3）的检测电极（12B）。表面形状检测单元（2）基于从检测元件（1A，1B）获得的各个电容，将表示与接触部分相对应的表面形状的三维图案的信号输出到每个检测元件。生物识别单元（3）基于与检测元件（1）的检测电极（12B）之间连接的物体（9）的阻抗相对应的信号来判定物体（9）是活体， B）和检测元件（1A）的检测电极（12A）。

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