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    • 7. 发明授权
    • Contacting device, testing method and corresponding production method
    • 接触装置,试验方法及相应的生产方法
    • US07274102B2
    • 2007-09-25
    • US11374391
    • 2006-03-13
    • Andreas WolterJorg Zapf
    • Andreas WolterJorg Zapf
    • H01L23/48H01L23/52
    • G01R1/0466G01R1/0483H01L2224/81385
    • A contacting device comprises a carrier device with a first surface, a plurality of first terminal regions on the first surface, at least one elastic elevation on the first surface, and a plurality of interconnects, each running from a respective of the first terminal regions to an upper side of the elastic elevation. The plurality of first terminal regions is configured so that signals of a tester device can be fed to the plurality of first terminal regions, the interconnects have first contact regions located at the upper side of the elastic elevation configured to be contacted electrically with corresponding second contact regions of an integrated circuit, and the first contact regions comprise first particles for roughening the surface of the first contact regions.
    • 接触装置包括具有第一表面的载体装置,第一表面上的多个第一端子区域,第一表面上的至少一个弹性高度以及多个互连件,每个互连件从相应的第一端子区域延伸到 弹性高度的上侧。 多个第一端子区域被配置为使得测试器装置的信号可以被馈送到多个第一端子区域,互连具有位于弹性高度的上侧的第一接触区域,其被配置为与相应的第二接触件电接触 区域,并且第一接触区域包括用于使第一接触区域的表面粗糙化的第一颗粒。