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1. 发明授权

US06573116B2 Ridge type semiconductor laser of laterally-coupled distributed feedback and method of manufacturing the same 失效
标题翻译：脊式半导体激光器的横向耦合分布式反馈及其制造方法
公开(公告)号：US06573116B2
公开(公告)日：2003-06-03
申请号：US09908560
申请日：2001-07-20
申请人： Yoshiaki Watanabe , Kiyoshi Takei , Nong Chen , Kiyofumi Chikuma
发明人： Yoshiaki Watanabe , Kiyoshi Takei , Nong Chen , Kiyofumi Chikuma
IPC分类号： H01L2100
CPC分类号： H01S5/22 , H01S5/12 , H01S5/1231 , H01S5/1237 , H01S5/209
摘要： There is provided a method of manufacturing a ridge type LC-DFB semiconductor laser in which a laser substrate having a cladding layer made of a material for a ridge stripe formed on an active layer made of semiconductor. A stripe mask is formed on the cladding layer to form two lateral flat portions from the cladding layer, by a selective wet etching, so as to form a ridge stripe protruding therefrom and having a flat top portion at which the stripe mask capped. A grating mask is formed on the two lateral flat portions, side walls of the ridge stripe and the stripe mask. The grating mask has a periodic structure in the direction in which the ridge stripe extends. The two lateral flat portions and the side walls of the ridge stripe are dry-etched through the grating mask and then the two lateral flat portions and the side walls of the ridge stripe are wet-etched to form a grating of the material for the ridge stripe on the two lateral flat portions, the side walls of the ridge stripe and the active layer, so as to define a bracket grating portion adjacent to the ridge stripe.
摘要翻译：提供了一种制造脊型LC-DFB半导体激光器的方法，其中具有由用于形成在由半导体制成的有源层上的用于脊条的材料制成的包层的激光基板。在包覆层上形成条纹掩模，通过选择性湿蚀刻从包覆层形成两个横向平坦部分，从而形成从其突出的脊条，并且具有条形掩模封盖的平坦的顶部。在两个侧面平坦部分，脊条和条纹掩模的侧壁上形成光栅掩模。栅格掩模在脊条延伸的方向上具有周期性结构。通过光栅掩模对棱条的两个横向平坦部分和侧壁进行干蚀刻，然后将脊条的两个侧向平坦部分和侧壁湿法蚀刻以形成用于脊的材料的光栅在两个横向平坦部分上的条纹，脊状条的边壁和有源层，以便限定与脊条相邻的托架光栅部分。

2. 发明授权

US06535670B1 Optical transmitter/receiver module and method of manufacturing the same 失效
标题翻译：光发射机/接收机模块及其制造方法
公开(公告)号：US06535670B1
公开(公告)日：2003-03-18
申请号：US09425939
申请日：1999-10-25
申请人： Kiyoshi Takei , Yoshiaki Watanabe , Nong Chen , Kiyofumi Chikuma
发明人： Kiyoshi Takei , Yoshiaki Watanabe , Nong Chen , Kiyofumi Chikuma
IPC分类号： G02B626
CPC分类号： G02B6/125 , G02B6/12004 , G02B6/12007 , G02B6/29361
摘要： An optical transmitter and receiver module de-multiplexes a multi-wavelength optical signal into at least an optical signal of one wavelength band, and receives and transmits the signal. The module includes a first substrate, with a cleavage plane, for supporting input and output wave guides which intersect each other at a portion on the cleavage plane and extend from the portion of intersection at an equal angle with respect to normal at the portion on the cleavage plane. The module also includes an interference filter that is in contact with the cleavage plane on the portion of intersection of the input and output wave guides of the first substrate. Further, the module includes a second substrate, with a cleavage plane in contact with the interference filter, for supporting a transmit/receive wave guide having receiver and transmitter wave guides which extend from the vicinity of the portion of intersection and are separated from each other.
摘要翻译：光发射机和接收机模块将多波长光信号解复用为至少一个波长带的光信号，并接收和发送信号。该模块包括具有解理平面的第一衬底，用于支撑在解理平面上的一部分处彼此相交的输入和输出波导，并且在第一衬底上的相对于法线的相交角度相对于法线相交劈裂平面。该模块还包括与第一基板的输入和输出波导的相交部分上的解理平面接触的干涉滤光器。此外，模块包括具有与干涉滤波器接触的解理面的第二基板，用于支撑具有从交叉部分附近延伸并彼此分离的接收器和发射器波导的发射/接收波导。

3. 发明授权

US06500687B2 Distributed feedback semiconductor laser element and method for making the same 失效
标题翻译：分布式反馈半导体激光元件及其制造方法
公开(公告)号：US06500687B2
公开(公告)日：2002-12-31
申请号：US09049470
申请日：1998-03-27
申请人： Kiyoshi Takei , Yoshiaki Watanabe , Nong Chen , Kiyofumi Chikuma
发明人： Kiyoshi Takei , Yoshiaki Watanabe , Nong Chen , Kiyofumi Chikuma
IPC分类号： H01S530
CPC分类号： H01S5/12 , H01S5/1231 , H01S5/2081 , H01S5/2231
摘要： A method for producing a distributed feedback semiconductor laser element includes the steps of forming a laser substrate, forming a ridge by etching the laser substrate, and forming a flattening layer on the ridge. A grating is then formed on the flattening layer and the grating is further transferred to the laser substrate on which the ridge is formed. The flattening layer is removed and electrodes are then formed.
摘要翻译：一种分布式反馈半导体激光元件的制造方法，其特征在于，包括：形成激光基板，通过蚀刻激光基板形成脊，在脊上形成平坦化层的工序。然后在平坦化层上形成光栅，并且光栅进一步转移到其上形成有脊的激光基板。去除扁平层，然后形成电极。

4. 发明授权

US06537841B2 Ridge-structure DFB semiconductor laser and method of manufacturing the same 失效
公开(公告)号：US06537841B2
公开(公告)日：2003-03-25
申请号：US10032506
申请日：2002-01-02
申请人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
发明人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
IPC分类号： H01L2100
CPC分类号： B82Y20/00 , H01S5/0425 , H01S5/12 , H01S5/1228 , H01S5/22 , H01S5/34373
摘要： A description is provided of a ridge-structure DFB semiconductor laser and a method of manufacturing the laser wherein an optical absorption loss by a metal electrode formed on a grating can be avoided. The DFB semiconductor laser includes: a ridge protruding from flat portions of a cladding layer which is formed on an active layer, the ridge includes a cladding layer and a contact layer sequentially formed on the active layer; a plurality of metal strips having a predetermined periodicity along a longitudinal direction of the ridge and extending from a surface of at least one of the flat portions to a top of the ridge; and an insulating layer formed on the plurality of metal strips at the top of the ridge.

5. 发明授权

US06504632B1 Optical transmitter and receiver module which demultiplexes a superimposed optical signal 失效
标题翻译：复用光信号的光发射机和接收机模块
公开(公告)号：US06504632B1
公开(公告)日：2003-01-07
申请号：US09427677
申请日：1999-10-27
申请人： Yoshiaki Watanabe , Kiyoshi Takei , Nong Chen , Kiyofumi Chikuma
发明人： Yoshiaki Watanabe , Kiyoshi Takei , Nong Chen , Kiyofumi Chikuma
IPC分类号： H04J1402
CPC分类号： G02B6/29326 , G02B6/29328 , G02B6/2938 , G02B6/32 , G02B6/4204 , H04J14/02
摘要： An optical transmitter and receiver module de-multiplexes a superimposed optical signal into which at least a first and second wavelength band are superimposed, and receives and transmits an optical signal of the first wavelength band. The module includes an input/output wave-guide having an outer end portion and inner end portion for inputting superimposed optical signals, a receiver portion for receiving optical signals of the first wavelength band, an output wave-guide having an outer end portion and inner end portion for outputting optical signals of the second wavelength band, and a transmitter portion for transmitting the optical signals of the first wavelength band.
摘要翻译：光发射机和接收机模块对重叠的至少第一和第二波长带叠加的叠加光信号进行解复用，并接收和发送第一波长带的光信号。该模块包括具有用于输入叠加的光信号的外端部分和内端部分的输入/输出波导，用于接收第一波长带的光信号的接收器部分，具有外端部分和内端部分的输出波导用于输出第二波长带的光信号的端部，以及用于发送第一波长带的光信号的发送部。

6. 发明授权

US06348360B1 Method for producing semiconductor laser module 失效
标题翻译：半导体激光器模块的制造方法
公开(公告)号：US06348360B1
公开(公告)日：2002-02-19
申请号：US09528156
申请日：2000-03-17
申请人： Nong Chen , Kiyoshi Takei , Yoshiaki Watanabe , Kiyofumi Chikuma
发明人： Nong Chen , Kiyoshi Takei , Yoshiaki Watanabe , Kiyofumi Chikuma
IPC分类号： H01L2100
CPC分类号： H01S5/0207 , H01S5/02284 , H01S5/1085 , H01S2301/176
摘要： A method for producing a semiconductor laser module is provided which enables simplifying the production process by eliminating the process of positioning the laser light emitting portion on the substrate, as well as enabling positioning an optical fiber on an appropriate position without aligning the optical fiber with the laser light emitting portion. A semiconductor laser module is fabricated through a process including a substrate preparation step for preparing a substrate including an active layer between cladding layers; a supporting groove portion formation step for forming a supporting groove portion to support an optical fiber on the substrate; and an electrode formation step for forming an electrode on a substrate surface of an opposing portion which faces the supporting groove portion.
摘要翻译：提供一种制造半导体激光器模块的方法，其通过消除将激光发射部分定位在基板上的过程以及使光纤定位在适当位置而不使光纤与激光发光部。通过包括用于制备包括在包层之间的有源层的衬底的衬底制备步骤的工艺来制造半导体激光器模块; 支撑槽部形成工序，形成用于将基板上的光纤支撑的支撑槽部; 以及电极形成步骤，用于在与支撑槽部分相对的相对部分的基板表面上形成电极。

7. 发明授权

US06714571B2 Ridge type semiconductor laser of distributed feedback 失效
标题翻译： Ridge型半导体激光器的分布式反馈
公开(公告)号：US06714571B2
公开(公告)日：2004-03-30
申请号：US09819370
申请日：2001-03-28
申请人： Yoshiaki Watanabe , Nong Chen , Kiyoshi Takei , Kiyofumi Chikuma
发明人： Yoshiaki Watanabe , Nong Chen , Kiyoshi Takei , Kiyofumi Chikuma
IPC分类号： H01S500
CPC分类号： H01S5/1228 , H01S5/1237 , H01S5/22
摘要： A semiconductor laser includes an active layer made of semiconductor; a ridge stripe having a cladding layer formed on the active layer and a contact layer formed on the cladding layer to protrude from the active layer; a pair of gratings each having a periodic structure in a longitudinal direction of the ridge stripe having a plurality of grooves each extending from side walls of the ridge stripe on flat portions in both sides of the ridge stripe; and absorbing layers covering the surfaces of the grooves of gratings to absorb excited light.
摘要翻译：半导体激光器包括由半导体制成的有源层; 形成在有源层上的包覆层的脊条和形成在包层上的从有源层突出的接触层; 一对光栅，每一个在脊条的长度方向上具有周期性的结构，所述光栅具有多个槽，每个槽在脊条的两侧的平坦部分上从脊条的侧壁延伸; 以及覆盖光栅槽的表面的吸收层以吸收激发的光。

8. 发明授权

US06301283B1 Distributed feedback semiconductor laser 失效
标题翻译：分布式反馈半导体激光器
公开(公告)号：US06301283B1
公开(公告)日：2001-10-09
申请号：US09237890
申请日：1999-01-27
申请人： Nong Chen , Kiyoshi Takei , Yoshiaki Watanabe , Kiyofumi Chikuma
发明人： Nong Chen , Kiyoshi Takei , Yoshiaki Watanabe , Kiyofumi Chikuma
IPC分类号： H01S512
CPC分类号： H01S5/12 , H01S5/1014 , H01S5/1064 , H01S5/2213 , H01S5/2231
摘要： A distributed feedback semiconductor laser including a semiconductor substrate having a bottom surface and a top surface; an active layer formed on the top surface of the semiconductor substrate; a ridge stripe formed on the active layer having a first surface and extending in a first direction; a periodic structure that is periodic in the first direction; a plurality of p-type electrodes formed on the first surface of the ridge stripe; and an n-type electrode formed on the bottom surface of the semiconductor substrate. The first surface of the ridge stripe is parallel with a growth plane of the active layer, the first surface having at least two different widths in a direction perpendicular to the first direction.
摘要翻译：一种分布式反馈半导体激光器，包括具有底表面和顶表面的半导体衬底; 形成在所述半导体衬底的顶表面上的有源层; 在有源层上形成的具有第一表面并沿第一方向延伸的脊条; 在第一方向上是周期性的周期性结构; 形成在所述脊条的第一表面上的多个p型电极; 以及形成在半导体衬底的底表面上的n型电极。脊条的第一表面与有源层的生长平面平行，第一表面在垂直于第一方向的方向上具有至少两个不同的宽度。

9. 发明授权

US06795466B1 Distributed feedback type semiconductor laser device 失效
标题翻译：分布式反馈型半导体激光器件
公开(公告)号：US06795466B1
公开(公告)日：2004-09-21
申请号：US09482099
申请日：2000-01-13
申请人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
发明人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
IPC分类号： H01S500
CPC分类号： H01S5/1231 , H01S5/0202 , H01S5/0421 , H01S5/0425 , H01S5/0655 , H01S5/2004 , H01S5/22 , H01S5/3202 , H01S5/3235
摘要： A DFB type semiconductor laser device including a laser substrate, a grating layer, an insulating layer and an electrode layer, which are laminated in the given order. The insulating layer includes a through groove or grooves extending to the grating layer in a direction in which a resonator of the laser device is formed, and the electrode layer contacts the grating layer and a clad layer.
摘要翻译：一种DFB型半导体激光器件，其包括以给定顺序层叠的激光器基板，光栅层，绝缘层和电极层。绝缘层包括在形成激光器件的谐振器的方向上延伸到光栅层的沟槽或沟槽，并且电极层接触光栅层和覆盖层。

10. 发明授权

US06381258B1 Ridge-structure DFB semiconductor laser and method of manufacturing the same 失效
公开(公告)号：US06381258B1
公开(公告)日：2002-04-30
申请号：US09481940
申请日：2000-01-13
申请人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
发明人： Kiyoshi Takei , Nong Chen , Yoshiaki Watanabe , Kiyofumi Chikuma
IPC分类号： H01S308
CPC分类号： B82Y20/00 , H01S5/0425 , H01S5/12 , H01S5/1228 , H01S5/22 , H01S5/34373
摘要： A description is provided of a ridge-structure DFB semiconductor laser and a method of manufacturing the laser wherein an optical absorption loss by a metal electrode formed on a grating can be avoided. The DFB semiconductor laser includes: a ridge protruding from flat portions of a cladding layer which is formed on an active layer, the ridge includes a cladding layer and a contact layer sequentially formed on the active layer; a plurality of metal strips having a predetermined periodicity along a longitudinal direction of the ridge and extending from a surface of at least one of the flat portions to a top of the ridge; and an insulating layer formed on the plurality of metal strips at the top of the ridge.

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