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    • 7. 发明申请
    • METHOD FOR MANUFACTURING INKJET HEAD
    • 制造喷头的方法
    • US20070220722A1
    • 2007-09-27
    • US11684790
    • 2007-03-12
    • Noboru FuruyaEiju Hirai
    • Noboru FuruyaEiju Hirai
    • H04R17/00B21D53/76
    • B41J2/1631B41J2/161B41J2/1628B41J2/1629B41J2/1632B41J2/1634B41J2/1642B41J2/1643B41J2/1646Y10T29/42Y10T29/49126Y10T29/4913Y10T29/49401
    • A method for manufacturing an inkjet head having a pressure chamber that stores ink, a nozzle that is provided at the pressure chamber and ejects the ink, and an actuator that changes an internal pressure of the pressure chamber to eject the ink in the pressure chamber through the nozzle is provided. The method includes the steps of: laminating a first separation film and a second separation film on a substrate; forming the actuator on the second separation film by using one of a liquid phase method and a vapor phase method to manufacture an upper structure; exposing an interface between the first separation film and the second separation film; contacting a separation liquid with the interface between the first separation film and the second separation film to separate the first separation film from the second separation film at the interface, thereby separating the upper structure from the substrate; forming a lower structure having the pressure chamber, independently of the substrate; and joining the upper structure and the lower structure together.
    • 一种用于制造具有存储墨的压力室的喷墨头的方法,设置在压力室并喷射墨的喷嘴,以及致动器,其改变压力室的内部压力以将压力室中的墨喷出以通过 提供喷嘴。 该方法包括以下步骤:在基板上层叠第一分离膜和第二分离膜; 通过使用液相法和气相法之一在第二分离膜上形成致动器以制造上部结构; 暴露第一分离膜和第二分离膜之间的界面; 使分离液与第一分离膜和第二分离膜之间的界面接触,以在界面处将第一分离膜与第二分离膜分开,从而将上部结构与基板分离; 形成具有压力室的下部结构,独立于衬底; 并且将上部结构和下部结构连接在一起。
    • 8. 发明授权
    • Method for manufacturing inkjet head
    • 喷墨头制造方法
    • US07721440B2
    • 2010-05-25
    • US11684790
    • 2007-03-12
    • Noboru FuruyaEiju Hirai
    • Noboru FuruyaEiju Hirai
    • B23P17/00H05K3/36
    • B41J2/1631B41J2/161B41J2/1628B41J2/1629B41J2/1632B41J2/1634B41J2/1642B41J2/1643B41J2/1646Y10T29/42Y10T29/49126Y10T29/4913Y10T29/49401
    • A method of manufacturing an inkjet head includes laminating a first separation film on a substrate and laminating a second separation film on the first separation film. A lower structure having a pressure chamber storing ink and an ink ejecting nozzle is formed independently of the substrate. An upper structure having an actuator changing the pressure of the pressure chamber to eject ink is formed on the second separation film with a liquid or vapor phase method. Grooves are formed in the upper structure extending from an upper surface of the upper structure to an interface between the first separation film and the second separation film. A separation liquid applied to the interface at a region exposed by the grooves separates the first and second separation films to release the upper structure from the substrate. The upper structure and the lower structure are then joined together.
    • 一种制造喷墨头的方法包括将第一分离膜层压在基板上,并在第一分离膜上层压第二分离膜。 独立于基板形成具有存储油墨的压力室和喷墨喷嘴的下部结构。 在第二分离膜上以液相或气相法形成具有改变压力室的压力以喷射墨水的致动器的上部结构。 在从上部结构的上表面延伸到第一分离膜和第二分离膜之间的界面的上部结构中形成槽。 在由凹槽暴露的区域中施加到界面的分离液分离第一和第二分离膜以从基板释放上部结构。 然后将上部结构和下部结构连接在一起。