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1. 发明申请

US20140134762A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE 审中-公开
标题翻译：制造有机EL器件的方法和装置
公开(公告)号：US20140134762A1
公开(公告)日：2014-05-15
申请号：US14115778
申请日：2012-12-10
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L33/00
CPC分类号： H01L33/005 , C23C14/042 , C23C14/562 , H01L51/001 , H01L51/56
摘要： Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion is configured to be switchable between a shield position where the shielding portion is arranged between an evaporation source and a substrate so as to shield the substrate and a shield release position where the shielding portion is withdrawn from between the evaporation source and the substrate so as to release the shielding of the substrate. The shielding portion is moved in a transportation direction at the same speed as the substrate when the shielding portion is located at the shield position, whereas the shielding portion is moved in a direction opposite to the transportation direction when the shielding portion is located at the shield release position.
摘要翻译：提供一种用于制造有机EL器件的方法和装置，其能够以期望的图案将蒸发的材料沉积到衬底上，同时不需要常规的带状阴影掩模。屏蔽部分被配置为可以在遮蔽部分布置在蒸发源和基板之间的屏蔽位置之间切换以屏蔽基板和遮蔽部分从蒸发源和基板之间撤出的屏蔽释放位置以便释放衬底的屏蔽。当屏蔽部位于屏蔽位置时，屏蔽部分以与衬底相同的速度在传输方向上移动，而当屏蔽部分位于屏蔽位置时，屏蔽部分沿与输送方向相反的方向移动释放位置。

2. 发明授权

US09224953B2 Method and apparatus for manufacturing organic el device 有权
标题翻译：有机EL器件的制造方法和装置
公开(公告)号：US09224953B2
公开(公告)日：2015-12-29
申请号：US14235986
申请日：2012-10-17
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L51/56 , H01L51/00 , C23C14/12 , C23C14/56 , H05B33/10 , B65H23/32
CPC分类号： H01L51/001 , B65H23/32 , B65H2301/5114 , B65H2301/51145 , C23C14/12 , C23C14/562 , H01L51/56 , H05B33/10
摘要： Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.
摘要翻译：提供一种用于制造有机EL器件的方法和设备，其可以制造能够抑制质量劣化的有机EL器件。包含构成层形成工序的有机EL元件的制造方法，其中有机EL元件的构成层通过在条形状的基板上沉积而形成，在基板沿纵向移动的同时，在沿着基板的移动方向布置的第一和第二沉积单元中顺序地在基板的一个表面上进行沉积，从蒸发源排出蒸发的材料。构成层形成步骤包括多个向上沉积步骤和方向改变步骤。

3. 发明申请

US20150111312A1 DEPOSITION DATA PROCESSING APPARATUS, AND APPARATUS AND METHOD FOR MANUFACTURING ORGANIC EL DEVICE 审中-公开
标题翻译：沉积数据处理装置，以及制造有机EL器件的装置和方法
公开(公告)号：US20150111312A1
公开(公告)日：2015-04-23
申请号：US14383626
申请日：2013-03-05
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Takayoshi Yamano
IPC分类号： H01L51/56 , C23C16/52 , G01B11/00 , H01L51/00
CPC分类号： H01L51/56 , C23C14/54 , C23C14/562 , C23C16/52 , G01B11/00 , H01L51/0002 , H01L51/0008 , H01L51/001 , H01L51/0031
摘要： Provided are a deposition data processing apparatus, an apparatus and a method for manufacturing an organic EL device, which make it possible to check deposition states of constituent layers of each of organic EL elements that are continuously formed on a substrate being conveyed. The deposition data processing apparatus includes a scanning section configured to scan at least two of a plurality of constituent layers that constitute each of the organic EL elements; and a processor configured to accumulate data of the constituent layers scanned by the scanning section at a specific position in a longitudinal direction of the substrate as data of a specific one of the organic EL elements.
摘要翻译：提供一种用于制造有机EL器件的沉积数据处理设备，设备和方法，其可以检查连续形成在被传送的衬底上的每个有机EL元件的构成层的沉积状态。沉积数据处理装置包括：扫描部，被配置为扫描构成每个有机EL元件的多个构成层中的至少两个; 以及处理器，其被配置为在所述基板的纵向方向上的特定位置处累积由所述扫描部扫描的所述构成层的数据作为所述有机EL元件中的特定一个的数据。

4. 发明授权

US08999735B2 Method and apparatus for manufacturing organic el device 有权
标题翻译：有机EL器件的制造方法和装置
公开(公告)号：US08999735B2
公开(公告)日：2015-04-07
申请号：US14115793
申请日：2012-12-10
申请人： Nitto Denko Corporation
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L21/00 , H01L51/50 , H01L51/56 , H01L51/00 , C23C14/04 , C23C14/56
CPC分类号： H01L51/5012 , C23C14/042 , C23C14/562 , H01L51/001 , H01L51/56
摘要： Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81. The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.
摘要翻译：提供一种用于制造有机EL器件的方法和装置，其能够以蒸发源将蒸发的材料以期望的图案沉积到衬底上，同时不需要常规的带状阴影掩模。屏蔽部分51被配置为可以在遮蔽部分51布置在蒸发源4和基板81之间的屏蔽位置之间切换，以屏蔽基板81和屏蔽部分51从屏蔽部分51之间撤出的屏蔽释放位置蒸发源4和基板81，以便释放基板81的屏蔽。屏蔽部分51在与滚筒3一起旋转的同时在屏蔽位置和屏蔽释放位置之间切换。

5. 发明授权

US11503716B2 Wiring circuit board assembly sheet and producing method thereof 有权
公开(公告)号：US11503716B2
公开(公告)日：2022-11-15
申请号：US17265922
申请日：2019-07-12
申请人： NITTO DENKO CORPORATION
发明人： Takuya Taniuchi , Ryohei Kakiuchi , Naoki Shibata , Yasunari Oyabu
IPC分类号： H05K1/02 , H05K3/06
摘要： A wiring circuit board assembly sheet is partitioned by a product region in which a plurality of wiring circuit boards serving as products are disposed in alignment and a margin region surrounding the product region with the margin region having a first area adjacent to the product region and a second area located at the opposite side of the product region with respect to the first area. The wiring circuit board assembly sheet includes a dummy wiring circuit board disposed in at least a portion of the first area and smaller than the wiring circuit board.

6. 发明申请

US20150104564A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE 审中-公开
标题翻译：制造有机EL器件的方法和装置
公开(公告)号：US20150104564A1
公开(公告)日：2015-04-16
申请号：US14382461
申请日：2013-03-07
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto
IPC分类号： H05B33/10 , H01L51/56 , C23C14/06 , C23C14/04 , C23C14/22
CPC分类号： H05B33/10 , C23C14/042 , C23C14/06 , C23C14/22 , C23C14/50 , C23C14/562 , H01L51/0011 , H01L51/56
摘要： The invention allows evaporation materials discharged from evaporation sources to deposit on a substrate with a desired pattern, while eliminating the need for the conventional strip-shaped shadow mask, and enables correction of the effects due to the substrate being displaced during conveyance. In the apparatus for manufacturing an organic EL device, a first drive section rotates a roller at a specific rotational speed, thereby conveying the substrate that is in contact with the roller. This apparatus performs deposition of evaporation materials discharged from evaporation sources on the substrate with such conveyance. In this apparatus, a shielding section is driven by a second drive section so as to pivot around an axis of the roller at a specific pivot speed, thereby shielding and unshielding the substrate. The second drive section changes the pivot speed of the shielding section so that it is different from the rotational speed of the roller.
摘要翻译：本发明允许从蒸发源排出的蒸发材料以期望的图案沉积在基板上，而不需要传统的带状荫罩，并且能够校正由于基板在输送过程中移动而产生的影响。在有机EL器件的制造装置中，第一驱动部以特定的转速旋转辊，从而输送与辊接触的基板。该装置通过这种输送将从蒸发源排放的蒸发材料沉积在基板上。在该装置中，屏蔽部由第二驱动部驱动，以便以特定的转速绕轴的轴线转动，从而屏蔽和非屏蔽基板。第二驱动部分改变屏蔽部分的转动速度，使其不同于辊的旋转速度。

7. 发明申请

US20140186985A1 METHOD AND APPARATUS FOR MAUFACTURING ORGANIC EL DEVICE 有权
标题翻译：用于制造有机EL器件的方法和装置
公开(公告)号：US20140186985A1
公开(公告)日：2014-07-03
申请号：US14235353
申请日：2012-10-17
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L51/56
CPC分类号： H01L51/56 , B65H23/32 , B65H2301/5114 , C23C14/12 , C23C14/562 , H01L51/0008
摘要： Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed over a substrate in the form of a strip by deposition, while the substrate is being moved in the longitudinal direction, includes: a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in an upward deposition unit and a lateral deposition unit provided along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes an upward deposition step, a laterally deposition step, and a direction changing step.
摘要翻译：提供一种制造有机EL器件的方法和装置，其可以制造能够抑制质量劣化的有机EL器件。有机EL元件的制造方法，其中有机EL元件的构成层在基板沿长度方向移动的同时通过沉积形成在带状形式的基板上，包括：构成层形成在基板沿纵向移动的同时，在沿着基板的移动方向设置的向上沉积单元和横向沉积单元中顺序地在基板的一个表面上进行沉积的步骤，通过从蒸发源排出蒸发的材料。构成层形成步骤包括向上沉积步骤，横向沉积步骤和方向改变步骤。

8. 发明授权

US08921142B2 Method and apparatus for manufacturing organic EL device 有权
标题翻译：用于制造有机EL器件的方法和装置
公开(公告)号：US08921142B2
公开(公告)日：2014-12-30
申请号：US14235353
申请日：2012-10-17
申请人： Nitto Denko Corporation
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L21/00 , H01L51/56 , C23C14/12 , C23C14/56 , H01L51/00
CPC分类号： H01L51/56 , B65H23/32 , B65H2301/5114 , C23C14/12 , C23C14/562 , H01L51/0008
摘要： Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed over a substrate in the form of a strip by deposition, while the substrate is being moved in the longitudinal direction, includes: a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in an upward deposition unit and a lateral deposition unit provided along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes an upward deposition step, a laterally deposition step, and a direction changing step.
摘要翻译：提供一种制造有机EL器件的方法和装置，其可以制造能够抑制质量劣化的有机EL器件。有机EL元件的制造方法，其中有机EL元件的构成层在基板沿长度方向移动的同时通过沉积形成在带状形式的基板上，包括：构成层形成在基板沿纵向移动的同时，在沿着基板的移动方向设置的向上沉积单元和横向沉积单元中顺序地在基板的一个表面上进行沉积的步骤，通过从蒸发源排出蒸发的材料。构成层形成步骤包括向上沉积步骤，横向沉积步骤和方向改变步骤。

9. 发明申请

US20140220722A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE 有权
标题翻译：制造有机EL器件的方法和装置
公开(公告)号：US20140220722A1
公开(公告)日：2014-08-07
申请号：US14235986
申请日：2012-10-17
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L51/00
CPC分类号： H01L51/001 , B65H23/32 , B65H2301/5114 , B65H2301/51145 , C23C14/12 , C23C14/562 , H01L51/56 , H05B33/10
摘要： Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.
摘要翻译：提供一种用于制造有机EL器件的方法和设备，其可以制造能够抑制质量劣化的有机EL器件。包含构成层形成工序的有机EL元件的制造方法，其中有机EL元件的构成层通过在条形状的基板上沉积而形成，在基板沿纵向移动的同时，在沿着基板的移动方向布置的第一和第二沉积单元中顺序地在基板的一个表面上进行沉积，从蒸发源排出蒸发的材料。构成层形成步骤包括多个向上沉积步骤和方向改变步骤。

10. 发明申请

US20140084276A1 METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE 有权
标题翻译：制造有机EL器件的方法和装置
公开(公告)号：US20140084276A1
公开(公告)日：2014-03-27
申请号：US14115793
申请日：2012-12-10
申请人： NITTO DENKO CORPORATION
发明人： Ryohei Kakiuchi , Satoru Yamamoto , Kanako Hida
IPC分类号： H01L51/56 , H01L51/50
CPC分类号： H01L51/5012 , C23C14/042 , C23C14/562 , H01L51/001 , H01L51/56
摘要： Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion 51 is configured to be switchable between a shield position where the shielding portion 51 is arranged between an evaporation source 4 and a substrate 81 so as to shield the substrate 81 and a shield release position where the shielding portion 51 is withdrawn from between the evaporation source 4 and the substrate 81 so as to release the shielding of the substrate 81. The shielding portion 51 is switched between the shield position and the shield release position while rotating together with a roller 3.
摘要翻译：提供一种用于制造有机EL器件的方法和装置，其能够以蒸发源将蒸发的材料以期望的图案沉积到衬底上，同时不需要常规的带状阴影掩模。屏蔽部分51被配置为可以在遮蔽部分51布置在蒸发源4和基板81之间的屏蔽位置之间切换，以屏蔽基板81和屏蔽部分51从屏蔽部分51之间撤出的屏蔽释放位置蒸发源4和基板81，以便释放基板81的屏蔽。屏蔽部分51在与滚筒3一起旋转的同时在屏蔽位置和屏蔽释放位置之间切换。

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