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1. 发明授权

EP1860477B1 PROJECTION OPTICAL SYSTEM, EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD 有权
标题翻译：投影光学系统，曝光装置及元件制造工艺
公开(公告)号：EP1860477B1
公开(公告)日：2011-07-27
申请号：EP06713513.7
申请日：2006-02-10
申请人： NIKON CORPORATION
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/06 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/70275
摘要： A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The projection optical system comprises, for example, eight reflecting mirrors (M1 to M8) and forms a reduced image of a first surface (4) on a second surface (7). The projection optical system comprises a first reflecting image forming optical system (G1) which forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) which forms a second intermediate image (M2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) which forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6 to M8) which the third reflecting image forming optical system comprises is greater than the number of reflecting mirrors (M1, M2) which the first reflecting image forming optical system comprises.

2. 发明公开

EP2000840A9 PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：投影光学系统，曝光装置及装置制造方法
公开(公告)号：EP2000840A9
公开(公告)日：2009-03-18
申请号：EP07737991.5
申请日：2007-03-08
申请人： Nikon Corporation
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/00 , G03F7/20 , H01L21/027
CPC分类号： G02B27/0043 , G02B17/0657 , G03F7/70233
摘要： A projection optical system, which has a relatively large image side numerical aperture of, for instance, 0.45 or larger, and can inspect the surface-shape error of a reflection surface with a prescribed accuracy. The projection optical system is provided with a first reflecting image-forming optical system (G1) for forming an intermediate image of a first surface based on light from a first surface (4), and a second reflecting image-forming optical system (G2) for forming a reduced image on a second surface (7) based on light from the intermediate image. The first reflecting image-forming optical system (G1) is provided with a first concave reflective mirror (M1), a second convex reflective mirror (M2), a third reflective mirror (M3) and a fourth concave reflective mirror (M4). The second reflecting image-forming optical system (G2) is provided with a fifth concave reflective mirror (M5), a sixth reflective mirror (M6), a seventh convex reflective mirror (M7) and an eighth concave reflective mirror (M8) . The conditions of 1 0 0 is the maximum object height on the first surface.
摘要翻译：投影光学系统具有例如0.45或更大的较大像侧数值孔径，并且可以以预定精度检查反射表面的表面形状误差。投影光学系统具有用于基于来自第一表面（4）的光形成第一表面的中间图像的第一反射图像形成光学系统（G1）和第二反射图像形成光学系统（G2）用于基于来自中间图像的光在第二表面（7）上形成缩小图像。第一反射图像形成光学系统（G1）设置有第一凹面反射镜（M1），第二凸面反射镜（M2），第三反射镜（M3）和第四凹面反射镜（M4）。第二反射成像光学系统（G2）具有第五凹面反射镜（M5），第六反射镜（M6），第七凸面反射镜（M7）和第八凹面反射镜（M8）。其中RM2是第二反射镜（M2）的反射表面的中心曲率半径的绝对值，并且H0是第一表面上的最大物体高度，满足1

3. 发明授权

EP1701194B1 PROJECTION OPTICAL SYSTEM AND EXPOSURE APPARATUS WITH THE SAME 有权
标题翻译：光学投影系统和曝光装置
公开(公告)号：EP1701194B1
公开(公告)日：2011-03-09
申请号：EP04807454.6
申请日：2004-12-21
申请人： NIKON CORPORATION
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/06
CPC分类号： G03F7/70233 , G02B17/0663 , G03F7/70275
摘要： A projection optical system comprises eight reflectors and forms a reduced image of a first surface (4) onto a second surface (7). It comprises a first reflective imaging optical system (G1) for forming an intermediate image of the first surface and a second reflective imaging optical system (G2) for forming an image of the intermediate image onto the second surface. The first reflective imaging optical system includes a first reflector (M1), a second reflector (M2) equipped with an aperture stop (AS), a third reflector (M3), and a fourth reflector (M4) successively as light enters from the first surface side. The second reflective imaging optical system includes a fifth reflector (M5), a sixth reflector (M6), a seventh reflector (M7), and an eighth reflector (M8) successively as light enters from the first surface side. This realizes a reflective projection optical system which can favorably correct aberrations while having a favorable reflection characteristic with respect to X-rays and keeping the reflectors from becoming bulky.

4. 发明公开

EP1701194A1 PROJECTION OPTICAL SYSTEM AND EXPOSURE APPARATUS WITH THE SAME 有权
标题翻译：优化项目在BELICHTUNGSVORRICHTUNG DAMIT
公开(公告)号：EP1701194A1
公开(公告)日：2006-09-13
申请号：EP04807454.6
申请日：2004-12-21
申请人： NIKON CORPORATION
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/00
CPC分类号： G03F7/70233 , G02B17/0663 , G03F7/70275
摘要： A projection optical system comprises eight reflectors and forms a reduced image of a first surface (4) onto a second surface (7). It comprises a first reflective imaging optical system (G1) for forming an intermediate image of the first surface and a second reflective imaging optical system (G2) for forming an image of the intermediate image onto the second surface. The first reflective imaging optical system includes a first reflector (M1), a second reflector (M2) equipped with an aperture stop (AS), a third reflector (M3), and a fourth reflector (M4) successively as light enters from the first surface side. The second reflective imaging optical system includes a fifth reflector (M5), a sixth reflector (M6), a seventh reflector (M7), and an eighth reflector (M8) successively as light enters from the first surface side. This realizes a reflective projection optical system which can favorably correct aberrations while having a favorable reflection characteristic with respect to X-rays and keeping the reflectors from becoming bulky.
摘要翻译：投影光学系统包括八个反射器，并且将第一表面（4）的缩小图像形成在第二表面（7）上。它包括用于形成第一表面的中间图像的第一反射成像光学系统（G1）和用于在第二表面上形成中间图像的图像的第二反射成像光学系统（G2）。第一反射成像光学系统包括第一反射器（M1），配备有孔径光阑（AS）的第二反射器（M2），第三反射器（M3）和第四反射器（M4）表面。第二反射成像光学系统包括从第一表面侧入射的第五反射器（M5），第六反射器（M6），第七反射器（M7）和第八反射器（M8）。这实现了一种反射投影光学系统，其可以有利地校正像差，同时具有相对于X射线的良好的反射特性并保持反射体不会变大。

5. 发明公开

EP2000840A2 PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：优化项目项目，BELICHTUNGSVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON VORRICHTUNGEN
公开(公告)号：EP2000840A2
公开(公告)日：2008-12-10
申请号：EP07737991.5
申请日：2007-03-08
申请人： Nikon Corporation
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/00 , G03F7/20 , H01L21/027
CPC分类号： G02B27/0043 , G02B17/0657 , G03F7/70233
摘要： A projection optical system, which has a relatively large image side numerical aperture of, for instance, 0.45 or larger, and can inspect the surface-shape error of a reflection surface with a prescribed accuracy. The projection optical system is provided with a first reflecting image-forming optical system (G1) for forming an intermediate image of a first surface based on light from a first surface (4), and a second reflecting image-forming optical system (G2) for forming a reduced image on a second surface (7) based on light from the intermediate image. The first reflecting image-forming optical system (G1) is provided with a first concave reflective mirror (M1), a second convex reflective mirror (M2), a third reflective mirror (M3) and a fourth concave reflective mirror (M4). The second reflecting image-forming optical system (G2) is provided with a fifth concave reflective mirror (M5), a sixth reflective mirror (M6), a seventh convex reflective mirror (M7) and an eighth concave reflective mirror (M8) . The conditions of 1 0 0 is the maximum object height on the first surface.
摘要翻译：投影光学系统，具有例如0.45以上的相对大的像侧数值孔径，并且可以以规定的精度检查反射面的表面形状误差。投影光学系统设置有用于基于来自第一表面（4）的光形成第一表面的中间图像的第一反射成像光学系统（G1）和第二反射成像光学系统（G2）用于基于来自中间图像的光在第二表面（7）上形成缩小图像。第一反射成像光学系统（G1）设置有第一凹面反射镜（M1），第二凸出反射镜（M2），第三反射镜（M3）和第四凹面反射镜（M4）。第二反射成像光学系统（G2）设置有第五凹面反射镜（M5），第六反射镜（M6），第七凸起反射镜（M7）和第八凹面反射镜（M8）。满足1

6. 发明公开

EP1860477A1 PROJECTION OPTICAL SYSTEM, EXPOSURE EQUIPMENT AND DEVICE MANUFACTURING METHOD 有权
标题翻译：优化项目项目，BELICHTUNGSGERÄTEUND BAUELEMENTEHERSTELLUNGSVERFAHREN
公开(公告)号：EP1860477A1
公开(公告)日：2007-11-28
申请号：EP06713513.7
申请日：2006-02-10
申请人： NIKON CORPORATION
发明人： TAKAHASHI, Tomowaki
IPC分类号： G02B17/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/70275
摘要： A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The projection optical system comprises, for example, eight reflecting mirrors (M1 to M8) and forms a reduced image of a first surface (4) on a second surface (7). The projection optical system comprises a first reflecting image forming optical system (G1) which forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) which forms a second intermediate image (M2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) which forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6 to M8) which the third reflecting image forming optical system comprises is greater than the number of reflecting mirrors (M1, M2) which the first reflecting image forming optical system comprises.
摘要翻译：投影光学系统具有至少八个反射镜，并且在径向上相对紧凑。投影光学系统包括例如八个反射镜（M1至M8），并且在第二表面（7）上形成第一表面（4）的缩小图像。投影光学系统包括基于来自第一表面的光形成第一表面的第一中间图像（IMI1）的第一反射成像光学系统（G1），形成第二反射成像光学系统的第二反射成像光学系统（G2）基于来自第一中间图像的光的第一表面的中间图像（M2）和基于来自第二中间图像的光在第二表面上形成缩小图像的第三反射图像形成光学系统（G3）。第三反射成像光学系统所包括的反射镜（M6至M8）的数量大于第一反射成像光学系统所包括的反射镜（M1，M2）的数量。

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