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1. 发明专利

JP2013225134A Optical device, exposure device and device manufacturing method 有权
标题翻译：光学装置，曝光装置和装置的制造方法
公开(公告)号：JP2013225134A
公开(公告)日：2013-10-31
申请号：JP2013111419
申请日：2013-05-28
申请人： Nikon Corp , 株式会社ニコン
发明人： YAMATO SOICHI , SUZUKI JUNJI
IPC分类号： G02B26/08 , G03F7/20 , H01L21/027
CPC分类号： G02B26/0841 , B81B3/0051 , B81B2201/042 , B81B2203/053 , B81B2203/058 , G02B26/001 , G03F7/70291 , G03F7/70825 , Y10S359/90
摘要： PROBLEM TO BE SOLVED: To move a mirror element consisting of a micro mirror mechanism in parallel or tilt the mirror element.SOLUTION: A pair of support members 54A and 54B including a spring part in a portion of the support member supports a mirror element 52, and a pair of driving mechanisms 66A and 66B provided corresponding to each of the pair of support members deforms a spring part of a corresponding support member. Thereby, the support member changes a distance between a support point supporting the mirror element and a base BS. By driving all driving mechanisms in this way, the mirror element can move in parallel, and by driving a part of the driving mechanisms, the mirror element can be tilted with respect to the base.
摘要翻译：要解决的问题：将由微镜机构组成的镜面元件平行移动或倾斜镜子元件。解决方案：一对支撑构件54A和54B包括在支撑构件的一部分中的弹簧部件支撑镜元件52 并且对应于一对支撑构件中的每一个设置的一对驱动机构66A和66B使对应的支撑构件的弹簧部分变形。由此，支撑构件改变支撑镜子元件的支撑点和基座BS之间的距离。通过以这种方式驱动所有驱动机构，镜元件可以平行移动，并且通过驱动驱动机构的一部分，镜元件可以相对于基座倾斜。

2. 发明专利

JP2012138622A Pattern generator, pattern forming apparatus and exposure apparatus 有权
标题翻译：图案发生器，图案形成装置和曝光装置
公开(公告)号：JP2012138622A
公开(公告)日：2012-07-19
申请号：JP2012079236
申请日：2012-03-30
申请人： Nikon Corp , 株式会社ニコン
发明人： YAMATO SOICHI , SUZUKI JUNJI
IPC分类号： H01L21/027 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To provide a pattern generator capable of easily and accurately forming various patterns on a plate.SOLUTION: Pattern generators 22A to 22E are provided on an active mask 14. Each of the pattern generators 22A to 22E includes a plurality of opening pattern groups disposed at predetermined intervals in an X-axis direction and disposed while being deviated at predetermined distances in a Y-axis direction. Furthermore, each opening pattern group includes a plurality of opening patterns disposed at predetermined intervals in the Y-axis direction. Therefore, in each pattern generator, the opening patterns are present at intervals where they do not overlap each other in the Y-axis direction as a whole. Furthermore, at the incident side of illumination light IL of the plurality of opening pattern groups, a micro-lens array is disposed for converging the illumination light IL to each of the plurality of opening patterns. The plurality of opening patterns are individually opened and closed by an opening/closing mechanism synchronously with the movement of a plate P in the X-axis direction.
摘要翻译：要解决的问题：提供能够容易且精确地在板上形成各种图案的图案发生器。图案发生器22A至22E设置在有源掩模14上。图案发生器22A至22E中的每一个包括沿X轴方向以预定间隔设置的多个开口图案组，并且以预定的方式偏移地布置 Y轴方向的距离。此外，每个开口图案组包括沿Y轴方向以预定间隔布置的多个开口图案。因此，在每个图案生成器中，开口图案以Y轴方向整体彼此不重叠的间隔存在。此外，在多个开口图案组的照明光IL的入射侧，设置微透镜阵列，用于将照明光IL会聚到多个开口图案中的每一个。多个开口图案通过与板P在X轴方向上的移动同步的开/闭机构单独打开和关闭。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2011170299A Spatial light modulator, illumination apparatus, exposure apparatus, and method for manufacturing them 有权
标题翻译：空调光调制器，照明装置，曝光装置及其制造方法
公开(公告)号：JP2011170299A
公开(公告)日：2011-09-01
申请号：JP2010036686
申请日：2010-02-22
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI YOSHIHIKO , KONISHI HIROSHI , SUZUKI JUNJI
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To stabilize characteristics of a spatial light modulator over a long period.
SOLUTION: The spatial light modulator includes a substrate mounted with a plurality of unit elements, each having an electrode, a movable part that oscillates by being attracted to the electrode by electrostatic force, and a reflection mirror that is held by and oscillates with the movable part; and a light-shielding layer for shielding light that radiates from in-between the reflecting mirrors to the substrate. In this spatial light modulator, the light-shielding layer may be arranged between the reflection mirror and the substrate, and between the reflection mirror and the movable part.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决问题：长时间稳定空间光调制器的特性。解决方案：空间光调制器包括安装有多个单元元件的基板，每个单元元件具有电极，通过静电力被吸引到电极而振荡的可动部分和由其保持并振荡的反射镜与可动部分; 以及用于遮蔽从反射镜之间辐射到基板的光的遮光层。在该空间光调制器中，遮光层可以布置在反射镜和基板之间以及反射镜和可动部之间。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2011083786A Method for marking optical glass member, method for manufacturing optical glass member with mark, and optical glass member with mark 审中-公开
标题翻译：用于标记光学玻璃构件的方法，用于制造具有标记的光学玻璃构件的方法和具有标记的光学玻璃构件
公开(公告)号：JP2011083786A
公开(公告)日：2011-04-28
申请号：JP2009236778
申请日：2009-10-14
申请人： Nikon Corp , 株式会社ニコン
发明人： WATANABE SHUNJI , KOIZUMI SHOHEI , SUZUKI JUNJI
IPC分类号： B23K26/00 , B23K26/18 , C03C17/04
摘要： PROBLEM TO BE SOLVED: To properly mark an optical glass member by forming a mark by fully fusing highly translucent glass particles on the surface of the optical glass member. SOLUTION: The provided method for marking an optical glass member includes: preparation of the optical glass member; formation of a film containing glass particles and a combustible substance on the surface of the optical glass member; and fusing the glass particles on the surface of the optical glass member as well as burning the combustible substance to dissipate it from the film by irradiating a prescribed region of the film with a laser beam. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：通过在光学玻璃构件的表面上完全融合高度半透明的玻璃颗粒来形成标记来适当地标记光学玻璃构件。解决方案：所提供的用于标记光学玻璃构件的方法包括：制备光学玻璃构件; 在光学玻璃构件的表面上形成含有玻璃颗粒和可燃物质的膜; 并且将玻璃颗粒熔合在光学玻璃构件的表面上，并且通过用激光束照射膜的规定区域来燃烧可燃物质以将其从膜中散出。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2010092299A Method for reading marking of optical member, method for forming marking, and optical glass member with marking 有权
标题翻译：用于读取光学标记的方法，用于形成标记的方法和具有标记的光学玻璃成员
公开(公告)号：JP2010092299A
公开(公告)日：2010-04-22
申请号：JP2008262142
申请日：2008-10-08
申请人： Nikon Corp , 株式会社ニコン
发明人： WATANABE SHUNJI , SUZUKI JUNJI , UEDA MOTOI
IPC分类号： G06K7/12 , B41M5/26 , C03C17/04 , G02B1/00 , G06K1/12 , G06K19/06 , G09F3/02 , G09F13/42
摘要： PROBLEM TO BE SOLVED: To provide a marking reading method for easily reading a marking even when a marking less influential on optical performance is formed. SOLUTION: An optical member with a marking comprising a UV cut glass layer whose absolute value of a refractive index difference from the optical glass member is 0.1 or smaller is formed on the optical glass member. The optical member is irradiated with an ultraviolet ray to read the marking by a difference in transparency of ultraviolet rays or difference in light emission by the ultraviolet rays in a part where the UV cut glass layer is formed and the other parts. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供即使形成对光学性能影响小的标记的标记读取方法也可以容易地读取标记。解决方案：在光学玻璃构件上形成具有包括与光学玻璃构件的折射率差的绝对值为0.1以下的UV切割玻璃层的标记的光学构件。用紫外线照射光学部件，通过在形成紫外线切割玻璃层的部分和紫外线部分之间的紫外线的紫外线的差异或其他部分的紫外线的差异来读取标记。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009118682A Micro actuator, micro actuator array, micro actuator arrangement, optical device, display, aligner, and method of manufacturing device 有权
标题翻译：微型致动器，微型致动器阵列，微型致动器装置，光学装置，显示器，对准器和制造装置的方法
公开(公告)号：JP2009118682A
公开(公告)日：2009-05-28
申请号：JP2007290577
申请日：2007-11-08
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI JUNJI , YAMATO SOICHI
IPC分类号： H02N1/00 , B81B3/00 , G02B26/08 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To extend lifetime, increase response speed, change only the direction of a driven body with no deformation of the driven body itself, and shorten a settling time, for increased speed of driving. SOLUTION: Both ends of a plate-like member 2 are fixed to a substrate 1 by way of a leg part 3. The plate-like member 2 can deflect between the portions fixed to the substrate 1. A mirror 4 which is a driven body is locally and mechanically connected to a specified part in the deflectable region of the plate-like member 2 through a connection part 11. A fixed electrode 5 is provided on the substrate 1, in the region facing the central part of the plate-like member 2. A voltage is applied between the fixed electrode 5 and a facing movable electrode of the plate-like member 2 to generate static electricity between them, so that the inclination of the mirror 4 changes with no deformation of the mirror 4 itself. The counter region to the plate-like member 2 of the base body is flattened so that the interval between the substrate and the plate-like member 2 is narrowed. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了延长使用寿命，增加响应速度，仅改变被驱动体的方向，而不会使被驱动体本身变形，并且缩短稳定时间，以提高驱动速度。
解决方案：板状构件2的两端通过腿部3固定到基板1上。板状构件2可以在固定到基板1的部分之间偏转。反射镜4是被驱动体通过连接部分11局部地和机械地连接到板状构件2的可偏转区域中的指定部分。固定电极5设置在基板1上，在与板的中心部分相对的区域中在固定电极5和板状构件2的面对的可动电极之间施加电压以在它们之间产生静电，使得反射镜4的倾斜度随着反射镜4本身的变形而改变。基体的板状构件2的对置区域被平坦化，使得基板和板状构件2之间的间隔变窄。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2008155290A Thin film structure body, micro-actuator, optical shutter device, light flux adjusting device, and micro-switch 审中-公开
标题翻译：薄膜结构体，微型致动器，光学切换装置，光通量调节装置和微动开关
公开(公告)号：JP2008155290A
公开(公告)日：2008-07-10
申请号：JP2006343693
申请日：2006-12-21
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI JUNJI
IPC分类号： B81B3/00 , G02B26/02
CPC分类号： G02B26/0841 , B81B3/0072 , H01P1/127
摘要： PROBLEM TO BE SOLVED: To provide a thin film structure body which hardly causes a twisting phenomenon in a curved beam portion composed of thin films.
SOLUTION: The thin film structure body has a beam portion which is composed of thin films and is curved by an internal stress in the state that an external force is not applied thereon. The beam portion is divided into a plurality of beam composing portions by means of one or more slits elongating in the longitudinal direction of the beam portion.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种在由薄膜构成的弯曲梁部分中几乎不引起扭转现象的薄膜结构体。解决方案：薄膜结构体具有由薄膜构成的光束部分，并且在不施加外力的状态下由内部应力弯曲。梁部分通过在梁部分的纵向方向上延伸的一个或多个狭缝分成多个梁组成部分。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2007312553A Micro actuator, optical device, and display 有权
标题翻译：微型执行器，光学设备和显示器
公开(公告)号：JP2007312553A
公开(公告)日：2007-11-29
申请号：JP2006140966
申请日：2006-05-20
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI JUNJI , NISHIYAMA MADOKA , SUZUKI YOSHIHIKO
IPC分类号： H02N13/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： PROBLEM TO BE SOLVED: To extend life and speed up response, and to allow changing only orientation of an object to be driven, without deforming the object itself.
SOLUTION: Both ends of a plate member 2 are fixed to a substrate 1 through a leg part 3. The plate member 2 is allowed to deflect between the points fixed to the substrate 1. A mirror 4, which is the object to be driven, is mechanically, and locally, connected to the specified part in the deflective region of the plate member 2 through a connection part 11. A fixed electrode 5 is provided on the substrate 1, in the region counter to the central part of the plate member 2. When a voltage is applied between the fixed electrode 5 and a counter movable electrode of the plate member 2 to generate static electricity between them, the inclination of the mirror 4 changes but the mirror 4 itself does no deform.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：延长使用寿命并加快响应速度，并允许只改变被驱动物体的方向，而不会使物体本身变形。解决方案：板构件2的两端通过腿部3固定到基板1上。板构件2被允许在固定到基板1的点之间偏转。反射镜4是对象通过连接部分11机械地和局部地被驱动地连接到板状构件2的偏转区域中的指定部分。固定电极5设置在基板1的与中心部分相反的区域中当在固定电极5和板构件2的相对可动电极之间施加电压以在它们之间产生静电时，反射镜4的倾斜度改变，但是反射镜4本身没有变形。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2006175563A Thin film structure, optical device, optical switch and variable optical attenuator 审中-公开
标题翻译：薄膜结构，光学器件，光开关和可变光学衰减器
公开(公告)号：JP2006175563A
公开(公告)日：2006-07-06
申请号：JP2004372411
申请日：2004-12-24
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI JUNJI
IPC分类号： B81B3/00 , G02B7/198 , G02B26/02 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To hold the principal plane of a member to be supported at a predetermined non-parallel angle to the principal plane of a support base stably and with high accuracy. SOLUTION: This thin film structure includes: the support base 12b; a mirror 31 formed of a thin film and supported on the support base 12b; and an abut member 34 fixed to the mirror 31 and abutted on the support base 12b. The abut member 34 is fixed to the mirror 31 through a curved film member 36 and a connecting member 35. The abut member 34 is abutted on the support base 12b, whereby the principal plane of the mirror 31 is held at an angle of 90° to the principal plane of the support base 12b. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：以稳定且高精度的方式将支撑构件的主平面保持在与支撑基座的主平面成预定的非平行角度。
解决方案：该薄膜结构包括：支撑基部12b; 由薄膜形成并支撑在支撑基座12b上的反射镜31; 以及固定在反射镜31上并抵靠在支撑台12b上的抵接部件34。抵接构件34通过弯曲薄膜构件36和连接构件35固定到反射镜31.抵接构件34抵靠在支撑基部12b上，由此将反射镜31的主平面保持为90° 到支撑基座12b的主平面。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005342839A Micro actuator array, optical device, and optical switch array 有权
标题翻译：微型执行器阵列，光学器件和光学开关阵列
公开(公告)号：JP2005342839A
公开(公告)日：2005-12-15
申请号：JP2004165682
申请日：2004-06-03
申请人： Nikon Corp , 株式会社ニコン
发明人： SUZUKI JUNJI
IPC分类号： G02B26/08 , B81B3/00 , B81B7/04
摘要： PROBLEM TO BE SOLVED: To save cost and improve yields by reducing the number of manufacturing processes. SOLUTION: Each micro actuator has a moving portion provided so as to be supported by a substrate 21 and moving to the substrate 21. On the moving portion of each micro actuator, a Lorentz force wiring pattern and a moving electrode wiring pattern are provided. On the substrate 21, a Lorentz force wiring pattern 63, a moving electrode wiring pattern 62, and a fixed electrode wiring pattern are provided. On a supported portion 111 supported by the substrate 21, a moving electrode wiring pattern 142 is provided. The Lorentz force wiring pattern 63 and the moving electrode wiring pattern 142 intersect each other. The moving electrode wiring pattern 142 and a wiring pattern provided on the moving portion are formed by patterning a conductive films simultaneously deposited. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：通过减少制造过程的数量来节省成本和提高产量。解决方案：每个微致动器具有设置成由基板21支撑并移动到基板21的移动部分。在每个微致动器的移动部分上，洛伦兹力布线图案和移动电极布线图案是提供。在基板21上设置有洛伦兹力布线图案63，移动电极布线图案62和固定电极布线图案。在由基板21支撑的支撑部111上设置有移动电极布线图案142。洛伦兹力布线图案63和移动电极布线图案142相交。移动电极布线图案142和设置在移动部分上的布线图案通过对同时沉积的导电膜进行图案化而形成。版权所有（C）2006，JPO＆NCIPI

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