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1. 发明专利

JP2010173877A Silicon nitride sintered compact 审中-公开
标题翻译：氮化硅烧结紧凑
公开(公告)号：JP2010173877A
公开(公告)日：2010-08-12
申请号：JP2009016514
申请日：2009-01-28
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： KOMATSU YUSUKE , ISHIDA HIRONORI , OGURA TOMOYUKI , MIYATA NOBORU
IPC分类号： C04B35/584
摘要： PROBLEM TO BE SOLVED: To provide a silicon nitride sintered compact, excellent in thermal impact resistance and especially suitable as a molten part contacting a molten metal. SOLUTION: The silicon nitride sintered product contains silicon nitride as a major component and includes magnesium and yttrium in a sum amount of 0.1-10 mass% on the basis of oxide and iron in an amount of 0.1-0.5 mass% on the basis of ferric oxide, wherein the molar ratio represented by Y 2 O 3 /MgO is 0.01-0.10, while the heat conductivity at room temperature is at least 70 W/(m×K) and the three point bending strength is at least 700 MPa. The thermal expansion coefficient from room temperature to 1,000°C is at most 3.4×10 -6 /K. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种氮化硅烧结体，耐热冲击性优异，特别适合作为与熔融金属接触的熔融部分。解决方案：氮化硅烧结产品含有氮化硅作为主要成分，并且基于氧化物和铁的总量为0.1-10质量％的镁和钇，其含量为0.1-0.5质量％氧化铁的基础，其中由Y O 3 / SB 3 / MgO表示的摩尔比为0.01-0.10，而室温下的导热率为至少70W /（ m×K），三点弯曲强度为700MPa以上。从室温到1000℃的热膨胀系数最多为3.4×10 -6 / SP。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2011011931A Ceramic joined body, ceramic heater, electrostatic chuck and susceptor 有权
标题翻译：陶瓷加工体，陶瓷加热器，静电切割机和SUSCEPTOR
公开(公告)号：JP2011011931A
公开(公告)日：2011-01-20
申请号：JP2009155951
申请日：2009-06-30
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , MIYATA NOBORU , KOMATSU YUSUKE , ONODERA NORIO
IPC分类号： C04B37/00 , H01L21/205 , H01L21/3065 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a ceramic joined body that shows no change in characteristics of sintered compacts at or around their joint interface and is hardly deformed.SOLUTION: The ceramic joined body includes a first ceramic sintered compact and a second ceramic sintered compact that are joined to each other without using any joint material, provided that both the first and second ceramic sintered compacts essentially comprise the same component. Either one or both of the first and second ceramic sintered compacts includes an accessory component, provided that the accessory component of one of the ceramic sintered compact does not diffuse into the other ceramic sintered compact.
摘要翻译：要解决的问题：提供一种陶瓷接合体，其在接合界面处或其周围没有表现出烧结体的特性的变化，并且几乎不变形。陶瓷接合体包括第一陶瓷烧结体和第二陶瓷烧结体，不使用任何接合材料彼此连接，条件是第一和第二陶瓷烧结体基本上都包含相同的组分。第一陶瓷烧结体和第二陶瓷烧结体中的任一个或两者都包括辅助部件，前提是陶瓷烧结体中的一个的辅助部件不会扩散到另一个陶瓷烧结体中。

3. 发明专利

JP2009246013A Vacuum suction apparatus and method of manufacturing the same 有权
标题翻译：真空吸尘装置及其制造方法
公开(公告)号：JP2009246013A
公开(公告)日：2009-10-22
申请号：JP2008088249
申请日：2008-03-28
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： UMETSU MOTOHIRO , SATO SHINYA , MIYATA NOBORU , SHIOGAI TATSUYA , KOMATSU YUSUKE
IPC分类号： H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a vacuum suction apparatus that reduces the faults by electrostatic electricity during dry processing, problems caused by generation of heat, and generation of particles and exhibits excellent suction performance. SOLUTION: A vacuum suction apparatus comprising a mounting portion having a structure where silicon carbide particles are bonded by metal silicon, and a supporting portion consisting of a sintered compact of silicon carbide has a bonding structure where the mounting portion and the supporting portion are bonded directly with substantially no gap. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种真空抽吸装置，其通过干燥处理期间的静电电力减少故障，由发热引起的问题和颗粒的产生以及优异的吸附性能。解决方案：一种真空抽吸装置，包括具有碳化硅颗粒通过金属硅结合的结构的安装部分和由碳化硅烧结体组成的支撑部分，其中安装部分和支撑部分直接键合，基本上没有间隙。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010189207A Ceramic member 有权
标题翻译：陶瓷会员
公开(公告)号：JP2010189207A
公开(公告)日：2010-09-02
申请号：JP2009033080
申请日：2009-02-16
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： KOMATSU YUSUKE , ISHIDA HIRONORI , OGURA TOMOYUKI , MIYATA NOBORU
IPC分类号： C04B35/584 , G02B1/00
摘要： PROBLEM TO BE SOLVED: To provide a ceramic member which is excellent in low thermal expansion and high thermal conductivity and is suitable for a component of an optical device. SOLUTION: The ceramic member is composed of a silicon nitride sintered compact. Wherein, thermal conductivity at room temperature is ≥60 W/(m×K), thermal expansion coefficient in a temperature ranging from room temperature to 1,000°C is ≤3.4×10 -6 /K, and the lightness L* in an L*a*b* color system is within the range of 0-80. In the L*a*b* color system, the chromaticity a* is -3 to 3, and the chromaticity b* is -3 to 3. The ceramic member can be used, for example, for a stage component 1, mirror components 4, 5 or the like in a stage mechanism for an exposure device. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种低热膨胀和高导热性优异且适用于光学元件的部件的陶瓷部件。陶瓷构件由氮化硅烧结体构成。其中室温下的热导率≥60W/（m×K），在室温〜1000℃的温度范围内的热膨胀系数≤3.4×10 -6 / K， L * a * b *颜色系统中的亮度L *在0-80的范围内。在L * a * b *颜色系统中，色度a *为-3〜3，色度b *为-3〜3。陶瓷构件可用于例如台架部件1，镜面部件 4,5等，用于曝光装置的舞台机构。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2007269585A Porous member 有权
标题翻译：多数会员
公开(公告)号：JP2007269585A
公开(公告)日：2007-10-18
申请号：JP2006098093
申请日：2006-03-31
申请人： Nihon Ceratec Co Ltd , Tohoku Univ , 国立大学法人東北大学 , 株式会社日本セラテック
发明人： OMI TADAHIRO , KISHI YUKIO , IGUCHI MASAHITO , ICHIKAWA YOSHITAKA , KOMATSU YUSUKE
IPC分类号： C04B38/00
CPC分类号： C04B38/0058 , C04B35/111 , C04B35/505 , C04B35/6316 , C04B2235/3418 , C04B2235/36 , C04B2235/5427 , C04B2235/5436 , C04B2235/5445 , C04B2235/656 , C04B2235/72 , C04B2235/77 , Y10T428/249921 , C04B35/00 , C04B38/0054
摘要： PROBLEM TO BE SOLVED: To provide a porous member which can disperse a gas uniformly by suppressing energy loss in a microwave zone for use in fields requiring high cleanliness. SOLUTION: This porous member is formed of a porous ceramic and has a dielectric dissipation factor of ≤1×10 -3 in a microwave zone. The ceramic member comprises a ceramic sintered compact partly provided with the porous member. COPYRIGHT: (C)2008,JPO&INPIT

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