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1. 发明专利

JP2004144648A Surface inspection device 有权
公开(公告)号：JP2004144648A
公开(公告)日：2004-05-20
申请号：JP2002310962
申请日：2002-10-25
申请人： Nidek Co Ltd , 株式会社ニデック
发明人： OSAWA KOJI , TAKAHASHI TATSUFUMI , NATSUME KATSUHIRO , MIURA YUKIHIRO
IPC分类号： G01B11/30 , G01B11/06 , G01N21/958 , G03F1/00 , H01L21/68
CPC分类号： G01B11/0608 , G03F1/84
摘要： PROBLEM TO BE SOLVED: To provide a surface inspection device which acquires highly accurately surface shape information. SOLUTION: This surface inspection device for picking up an interference fringe image formed by an optical element for interference fringe formation and a measuring object, and for inspecting the surface shape of the measuring object based on the interference fringe image, is equipped with a moving means for moving the measuring object in the approximately vertical direction, in the state where a measuring surface of the measuring object is erected in the approximately vertical direction. COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2004151020A Surface inspection device 有权
公开(公告)号：JP2004151020A
公开(公告)日：2004-05-27
申请号：JP2002318560
申请日：2002-10-31
申请人： Nidek Co Ltd , 株式会社ニデック
发明人： MIURA YUKIHIRO
IPC分类号： G01B11/00 , G01B11/06 , G01B11/24
CPC分类号： G01B11/0608
摘要： PROBLEM TO BE SOLVED: To provide a surface inspection device, which can accurately grasp the position of an edge of an object to measured, and which can obtain reliable surface shape information.
SOLUTION: On a mount base for mounting the object to be measured there are provided a guide member, which is attached to the mount base for positioning the object to be measured at a prescribed position by the contact with the edge of the object to be measured; a storage means for storing in advance information specifying the two-dimensional position of the object to the measured, when the edge of the object to be measured is brought into contact with the guide member; an input means for inputting the shape data on the outer circumferential dimension of the object to be measured; and an edge determination means for determining the edge position of the object to be measured, on the basis of the storage information stored in the storage means and the shape data by the input means.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2005049317A Interferometer 审中-公开
标题翻译：干涉
公开(公告)号：JP2005049317A
公开(公告)日：2005-02-24
申请号：JP2003284318
申请日：2003-07-31
申请人： Nidek Co Ltd , 株式会社ニデック
发明人： MIURA YUKIHIRO , IMAIZUMI SATOSHI
IPC分类号： G01B9/02 , G01B11/24 , G01B11/30
CPC分类号： G01B11/303 , G01B9/02014 , G01B9/02022
摘要： PROBLEM TO BE SOLVED: To provide an interferometer capable of measuring the surface shape of an object to be measured more precisely, by eliminating influence due to rear surface interference.
SOLUTION: The interferometer makes measuring light from a measuring light source irradiated to the surface of the object to be measured and to a reference surface; images interference fringes formed with reflected light reflected by the surface of the object and reference light by the reference surface with an imaging means; and measures the shape of the surface of the object based on the imaged interference fringes. The measuring light source radiates a pulse laser, having a pulse width and a down time for preventing the occurrence of interference fringes that are formed with reflected light reflected by the rear surface of the object, after having passed through the object and the reflected light by the surface of the object.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过消除由于背面干扰引起的影响，提供能够更准确地测量被测量物体的表面形状的干涉仪。解决方案：干涉仪使来自被测物体表面的测量光的测量光和参考面; 图像干涉条纹由物体表面反射的反射光和由参考表面的参考光与成像装置形成; 并且基于成像的干涉条纹来测量物体的表面的形状。测量光源辐射脉冲激光器，具有脉冲宽度和停止时间，用于防止由物体的后表面反射的反射光形成的干涉条纹的出现，在通过物体和反射光之后对象的表面。版权所有（C）2005，JPO＆NCIPI

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