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    • 1. 发明专利
    • Dispersion interferometer, and method of measuring physical quantity of measuring object
    • 分散干扰仪和测量物理量测量对象的方法
    • JP2010107470A
    • 2010-05-13
    • JP2008282085
    • 2008-10-31
    • National Institutes Of Natural Sciences大学共同利用機関法人自然科学研究機構
    • AKIYAMA TAKESHIKAWABATA KAZUOOKAJIMA SHIGEKINAKAYAMA KAZUYA
    • G01N21/45G01B9/02G01B11/06G01J9/02
    • PROBLEM TO BE SOLVED: To provide a dispersion interferometer usable for actual time control, and capable of removing an influence of a high-frequency noise, reducing a measurement error caused by signal intensity change, and heightening accuracy, by extracting a phase from a signal intensity ratio of a fundamental wave and a double harmonic which are Fourier components of a modulated signal.
      SOLUTION: A nonlinear crystal element 10 of this dispersion interferometer changes a part of laser light (fundamental wave W1) into a double harmonic W2. A photoelastic element 12 generates phase modulation in the fundamental wave W1 as much as a modulated angle frequency ω
      m portion. A nonlinear crystal element 14 changes the fundamental wave W1 transmitted through plasma 30 into the double harmonic W2. A wavelength selection filter 16 allows selectively transmission of the double harmonic W2. The interferometer determines an intensity ratio between a fundamental wave component of the modulated angle frequency ω
      m and a double harmonic component in an interference signal, and calculates a line average electron density which is a physical quantity of the plasma 30 based on the intensity ratio and a phase variation.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了提供可用于实际时间控制的分散干涉仪,并且能够通过提取相位来提取相位,从而消除高频噪声的影响,减少由信号强度变化引起的测量误差和提高精度 根据作为调制信号的傅立叶分量的基波和双倍谐波的信号强度比。 解决方案:该分散干涉仪的非线性晶体元件10将一部分激光(基波W1)变换成双倍谐波W2。 光弹元件12在基波W1中产生多达调制角频率ω的部分的相位调制。 非线性晶体元件14将通过等离子体30传输的基波W1改变为双倍谐波W2。 波长选择滤波器16允许选择性地传输双倍谐波W2。 干涉仪确定调制角频率ω m 的基波分量与干扰信号中的双谐波分量之间的强度比,并计算作为等离子体的物理量的线平均电子密度 30,基于强度比和相位变化。 版权所有(C)2010,JPO&INPIT