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1. 发明授权

US07762526B2 Pendulum valve having independently and rapidly controllable theta-and z-axis motion 有权
标题翻译：摆阀具有独立快速的θ轴和z轴运动
公开(公告)号：US07762526B2
公开(公告)日：2010-07-27
申请号：US11895897
申请日：2007-08-27
申请人： Nate Coleman , John Slaney , Sean Mallory , Per Cederstav , David Kruse , William Ballard , Robert Woods
发明人： Nate Coleman , John Slaney , Sean Mallory , Per Cederstav , David Kruse , William Ballard , Robert Woods
IPC分类号： F16K3/10
CPC分类号： F16K31/535 , F16K3/10 , F16K31/043
摘要： A Pendulum Valve having Independently and Rapidly Controllable Theta- and Z-axis Motion. The valve actuator used in the present invention provides the benefit of wide open unrestricted flow of a pendulum valve coupled with the high-resolution and wide dynamic range flow throttling of a ball or butterfly valve. The actuator mechanism will include motor drives and associated control system so that the drives are closely coupled to give highly controlled motion. The drive assembly introduces a concentric shaft arrangement that, when coupled with the highly controllable motor drives, exploits a cam-follower arrangement to make the relative rotation between the two concentric shafts result in highly controlled theta and z-axis motion. Finally, the plate to seal spacing afforded is greater than previously possible with prior valve actuator mechanisms, thereby substantially reducing flow turbulence through the valve as the valve plate eclipses the valve ports.
摘要翻译：具有独立快速控制的摆动阀和Z轴运动。本发明中使用的阀致动器提供摆动阀的广泛的无限制流动的优点，以及球或蝶阀的高分辨率和宽动态范围流量节流。致动器机构将包括马达驱动器和相关联的控制系统，使得驱动器紧密耦合以提供高度受控的运动。驱动组件引入同心轴装置，当与高度可控的电动机驱动器联接时，其利用凸轮从动装置使两个同心轴之间的相对旋转导致高度受控的θ轴和z轴运动。最后，所提供的板密封间隔大大超过先前阀门致动器机构以前的可能性，从而当阀板越过阀口时基本上减小通过阀的流动湍流。

2. 发明申请

US20090057596A1 Pendulum valve having independently and rapidly controllable theta-and z-axis motion 有权
标题翻译：摆阀具有独立快速的θ轴和z轴运动
公开(公告)号：US20090057596A1
公开(公告)日：2009-03-05
申请号：US11895897
申请日：2007-08-27
申请人： Nate Coleman , John Slaney , Sean Mallory , Per Cederstav , David Kruse , William Ballard , Robert Woods
发明人： Nate Coleman , John Slaney , Sean Mallory , Per Cederstav , David Kruse , William Ballard , Robert Woods
IPC分类号： F16K3/00
CPC分类号： F16K31/535 , F16K3/10 , F16K31/043
摘要： A Pendulum Valve having Independently and Rapidly Controllable Theta- and Z-axis Motion. The valve actuator used in the present invention provides the benefit of wide open unrestricted flow of a pendulum valve coupled with the high-resolution and wide dynamic range flow throttling of a ball or butterfly valve. The actuator mechanism will include motor drives and associated control system so that the drives are closely coupled to give highly controlled motion. The drive assembly introduces a concentric shaft arrangement that, when coupled with the highly controllable motor drives, exploits a cam-follower arrangement to make the relative rotation between the two concentric shafts result in highly controlled theta and z-axis motion. Finally, the plate to seal spacing afforded is greater than previously possible with prior valve actuator mechanisms, thereby substantially reducing flow turbulence through the valve as the valve plate eclipses the valve ports.
摘要翻译：具有独立快速控制的摆动阀和Z轴运动。本发明中使用的阀致动器提供摆动阀的广泛的无限制流动的优点，以及球或蝶阀的高分辨率和宽动态范围流量节流。致动器机构将包括马达驱动器和相关联的控制系统，使得驱动器紧密耦合以提供高度受控的运动。驱动组件引入同心轴装置，当与高度可控的电动机驱动器联接时，其利用凸轮从动装置使两个同心轴之间的相对旋转导致高度受控的θ轴和z轴运动。最后，所提供的板密封间隔大大超过先前阀门致动器机构以前的可能性，从而当阀板越过阀口时基本上减小通过阀的流动湍流。

3. 发明授权

US06612331B2 Pressure controller and method 有权
公开(公告)号：US06612331B2
公开(公告)日：2003-09-02
申请号：US10052757
申请日：2002-01-18
申请人： Per Cederstav , Sean Mallory , Emmanuel Vyers , William Ballard , David Kruse
发明人： Per Cederstav , Sean Mallory , Emmanuel Vyers , William Ballard , David Kruse
IPC分类号： F16K3104
CPC分类号： G05D16/202 , Y10T137/0396 , Y10T137/7761 , Y10T137/8225 , Y10T137/86614
摘要： A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components). The method of the present invention more accurately positions the valve, and accordingly enhances the overall precision and allowable loop-gain of the pressure control system by providing the valve drive with feedback as to the actual angular position of the valve in extremely high resolution.

4. 发明授权

US06814096B2 Pressure controller and method 有权
标题翻译：压力控制器和方法
公开(公告)号：US06814096B2
公开(公告)日：2004-11-09
申请号：US09738194
申请日：2000-12-15
申请人： Emmanuel Vyers , William Ballard , David Kruse , Sean Mallory , Per Cederstav
发明人： Emmanuel Vyers , William Ballard , David Kruse , Sean Mallory , Per Cederstav
IPC分类号： G05D1620
CPC分类号： G05D16/202 , Y10T137/0396 , Y10T137/7761 , Y10T137/8225 , Y10T137/86614
摘要： A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components). The method of the present invention more accurately positions the valve, and accordingly enhances the overall precision and allowable loop-gain of the pressure control system by providing the valve drive with feedback as to the actual angular position of the valve in extremely high resolution.
摘要翻译：示出了设置，测量和控制半导体工艺中的工艺压力的闭环压力控制器系统。该系统通常由用于收集压力信息的压力传感器，托管控制电子装置的控制器盒以及物理地影响入口或出口气体管线的导电性以及因此的过程压力的阀组成。本发明与现有技术不同之处在于使用阀的闭环电动机控制，而不是现有技术的方法，其中阀位由以开环方式驱动的步进电机致动器控制。现有技术证明，这种现有技术的开环结构的实用性受限于阀门位置的可实现精度受到阀门系统中的静摩擦的影响，扭矩与轴角度的非线性特性的电机（以及其他误差部件）。本发明的方法更精确地定位阀门，并且因此通过以极高的分辨率向阀驱动器提供关于阀的实际角位置的反馈来提高压力控制系统的总体精度和允许的环路增益。

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