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    • 1. 发明授权
    • Thin film magnetic head, method of manufacturing the same and magnetic recording apparatus
    • 薄膜磁头,制造方法和磁记录装置
    • US07382578B2
    • 2008-06-03
    • US11062497
    • 2005-02-23
    • Naoto MatonoYasuyuki Notsuke
    • Naoto MatonoYasuyuki Notsuke
    • G11B5/147
    • G11B5/3163G11B5/1278
    • Provided is a method of manufacturing a thin film magnetic head capable of manufacturing a thin film magnetic head with as high performance as possible. A magnetic pole layer is formed so as to have a laminate structure in which an auxiliary magnetic pole layer (including an adjacent portion and a nonadjacent portion) extending from a first flare point to the rear and a main magnetic pole layer (including a front end portion and a rear end portion) extending from an air bearing surface to the rear through the first flare point are laminated in this order. As (1) a recording track width is controlled with high precision through forming the main magnetic pole layer with high precision, (2) recording is stably performed by an increase in the amount of magnetic flux contained in the main magnetic pole layer, and (3) information recorded on a recording medium is stably maintained through preventing information erasing without intention, the thin film magnetic head can achieve higher performance.
    • 提供一种能够制造尽可能高性能的薄膜磁头的薄膜磁头的制造方法。 磁极层形成为具有从第一扩张点向后延伸的辅助磁极层(包括相邻部分和不相邻部分)的辅助磁极层和主磁极层(包括前端 部分和后端部)以空气轴承表面延伸到后部通过第一扩张点被依次层叠。 如(1)通过高精度地形成主磁极层,高精度地控制记录磁道宽度,(2)通过增加主磁极层中所含的磁通量的量来稳定地进行记录,和( 3)通过防止信息消除而无意地稳定地保持记录在记录介质上的信息,薄膜磁头可以实现更高的性能。
    • 4. 发明申请
    • Method for manufacturing a magnetic head using a multi-stage ion milling
    • 使用多级离子铣削制造磁头的方法
    • US20060098339A1
    • 2006-05-11
    • US11266350
    • 2005-11-04
    • Yoshihiko KoyamaNaoto MatonoYasuyuki Notsuke
    • Yoshihiko KoyamaNaoto MatonoYasuyuki Notsuke
    • G11B5/147
    • G11B5/3169G11B5/1278G11B5/3116G11B5/3163Y10T29/49052
    • A method for manufacturing a magnetic head for perpendicular magnetic recording is disclosed. The method comprising: a first step of depositing a non-magnetic film over and around the main magnetic pole, and subsequently polishing and planarizing the non-magnetic film, wherein the non-magnetic film is made of a non-magnetic material which exhibits a lower ion milling rate than that of a magnetic metal material which constitutes the main magnetic pole; a second step of etching the surface by means of ion milling at a first angle relative to a stacked direction of the magnetic head, to form a stepped portion in which the main magnetic pole is lower from the non-magnetic film around the main magnetic pole; and a third step of etching the stepped portion, by means of ion milling, at a second angle relative to the stacked direction, wherein the second angle is larger than the first angle.
    • 公开了用于制造用于垂直磁记录的磁头的方法。 该方法包括:第一步骤,在主磁极上方和周围沉积非磁性膜,随后抛光和平面化非磁性膜,其中非磁性膜由非磁性材料制成,其表现出 比构成主磁极的磁性金属材料的离子研磨速度低; 通过离子铣削相对于磁头的堆叠方向以第一角度蚀刻表面的第二步骤,以形成主磁极从主磁极周围的非磁性膜下降的阶梯部分 ; 以及第三步骤,通过离子研磨,相对于所述堆叠方向以第二角蚀刻所述阶梯部分,其中所述第二角度大于所述第一角度。
    • 5. 发明申请
    • Thin film magnetic head, method of manufacturing the same and magnetic recording apparatus
    • 薄膜磁头,制造方法和磁记录装置
    • US20050219750A1
    • 2005-10-06
    • US11062497
    • 2005-02-23
    • Naoto MatonoYasuyuki Notsuke
    • Naoto MatonoYasuyuki Notsuke
    • G11B5/31G11B5/127G11B5/147
    • G11B5/3163G11B5/1278
    • Provided is a method of manufacturing a thin film magnetic head capable of manufacturing a thin film magnetic head with as high performance as possible. A magnetic pole layer is formed so as to have a laminate structure in which an auxiliary magnetic pole layer (including an adjacent portion and a nonadjacent portion) extending from a first flare point to the rear and a main magnetic pole layer (including a front end portion and a rear end portion) extending from an air bearing surface to the rear through the first flare point are laminated in this order. As (1) a recording track width is controlled with high precision through forming the main magnetic pole layer with high precision, (2) recording is stably performed by an increase in the amount of magnetic flux contained in the main magnetic pole layer, and (3) information recorded on a recording medium is stably maintained through preventing information erasing without intention, the thin film magnetic head can achieve higher performance.
    • 提供一种能够制造尽可能高性能的薄膜磁头的薄膜磁头的制造方法。 磁极层形成为具有从第一扩张点向后延伸的辅助磁极层(包括相邻部分和不相邻部分)的辅助磁极层和主磁极层(包括前端 部分和后端部)以空气轴承表面延伸到后部通过第一扩张点被依次层叠。 如(1)通过高精度地形成主磁极层,高精度地控制记录磁道宽度,(2)通过增加主磁极层中所含的磁通量的量来稳定地进行记录,和( 3)通过防止信息消除而无意地稳定地保持记录在记录介质上的信息,薄膜磁头可以实现更高的性能。
    • 6. 发明授权
    • Method for manufacturing a magnetic head using a multi-stage ion milling
    • 使用多级离子铣削制造磁头的方法
    • US07503107B2
    • 2009-03-17
    • US11266350
    • 2005-11-04
    • Yoshihiko KoyamaNaoto MatonoYasuyuki Notsuke
    • Yoshihiko KoyamaNaoto MatonoYasuyuki Notsuke
    • G11B5/127G11B5/147
    • G11B5/3169G11B5/1278G11B5/3116G11B5/3163Y10T29/49052
    • A method for manufacturing a magnetic head for perpendicular magnetic recording is disclosed. The method comprising: a first step of depositing a non-magnetic film over and around the main magnetic pole, and subsequently polishing and planarizing the non-magnetic film, wherein the non-magnetic film is made of a non-magnetic material which exhibits a lower ion milling rate than that of a magnetic metal material which constitutes the main magnetic pole; a second step of etching the surface by use of ion milling at a first angle relative to a stacked direction of the magnetic head, to form a stepped portion in which the main magnetic pole is lower from the non-magnetic film around the main magnetic pole; and a third step of etching the stepped portion, by use of ion milling, at a second angle relative to the stacked direction, wherein the second angle is larger than the first angle.
    • 公开了用于制造用于垂直磁记录的磁头的方法。 该方法包括:第一步骤,在主磁极上方和周围沉积非磁性膜,随后抛光和平面化非磁性膜,其中非磁性膜由非磁性材料制成,其表现出 比构成主磁极的磁性金属材料的离子研磨速度低; 通过使用相对于磁头的堆叠方向的第一角度的离子铣削来蚀刻表面的第二步骤,以形成主磁极从主磁极周围的非磁性膜下降的阶梯部分 ; 以及第三步骤,通过使用离子铣削,相对于所述堆叠方向以第二角蚀刻所述阶梯部分,其中所述第二角度大于所述第一角度。