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1. 发明申请

US20090151634A1 Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus 审中-公开
标题翻译：磁记录盘制造装置及在线式基板处理装置
公开(公告)号：US20090151634A1
公开(公告)日：2009-06-18
申请号：US12348734
申请日：2009-01-05
申请人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
发明人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
IPC分类号： C23C16/54
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
摘要翻译：一种用于制造磁记录盘的设备包括：磁性沉积室，其中用于记录层的磁性膜沉积在基底上; 在真空中在基板上制备润滑剂层的润滑剂层制备室; 以及清洁室，其中在磁膜沉积后在真空中清洁基板，并且在润滑剂层室中的润滑剂层制备之前。该设备还可以包括将基板从清洁室转移到润滑剂层制备室而不将基板暴露于大气的转移系统。

2. 发明申请

US20080216744A1 Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus 有权
标题翻译：磁记录盘制造装置及在线式基板处理装置
公开(公告)号：US20080216744A1
公开(公告)日：2008-09-11
申请号：US12037021
申请日：2008-02-25
申请人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
发明人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
IPC分类号： C23C16/00
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
摘要翻译：一种用于制造磁记录盘的设备包括：磁性沉积室，其中用于记录层的磁性膜沉积在基底上; 在真空中在基板上制备润滑剂层的润滑剂层制备室; 以及清洁室，其中在磁膜沉积之后以及在润滑剂层室中的润滑剂层制备之前，真空中清洁基板。该设备还可以包括将基板从清洁室转移到润滑剂层制备室而不将基板暴露于大气的转移系统。

3. 发明申请

US20080178804A1 Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus 审中-公开
公开(公告)号：US20080178804A1
公开(公告)日：2008-07-31
申请号：US12037006
申请日：2008-02-25
申请人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
发明人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
IPC分类号： C23C16/455
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.

4. 发明申请

US20070234958A1 Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus 审中-公开
标题翻译：磁记录盘制造装置及在线式基板处理装置
公开(公告)号：US20070234958A1
公开(公告)日：2007-10-11
申请号：US11735281
申请日：2007-04-13
申请人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
发明人： Naoki WATANABE , Nobuyoshi WATANABE , Kazunori TANI , Shinji FURUKAWA , Hiromi SASAKI , Osamu WATABE
IPC分类号： C23C16/06
CPC分类号： C23C14/352 , C23C14/50 , C23C14/568 , C23C16/26 , G11B5/84 , G11B5/8408 , Y10S414/135 , Y10S414/136 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14 , Y10S414/141
摘要： This invention presents a method and an apparatus for manufacturing a magnetic recording disk, where steps from magnetic-film deposition to lubricant-layer preparation are carried out without vacuum breaking. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where a substrate is cleaned prior to the lubricant-layer preparation. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where burnishing is carried out in vacuum after the magnetic-film deposition. The invention also presents a method and an apparatus for manufacturing a magnetic recording disk, where post-preparation treatment to coordinate adhesive strength and surface lubricity of the lubricant layer is carried out in vacuum. The invention also presents an in-line type substrate processing apparatus comprising a plurality of vacuum chambers provided along each of a plurality of circumventive transfer paths, a connection transfer path connecting at least two of the circumventive transfer paths, and a transfer system that transfers a substrate to be processed along the circumventive transfer paths and transfers the substrate along the connection transfer path without exposing the substrate to the atmosphere.
摘要翻译：本发明提供一种用于制造磁记录盘的方法和装置，其中在没有真空破坏的情况下执行从磁膜沉积到润滑剂层制备的步骤。本发明还提出了一种用于制造磁记录盘的方法和装置，其中在润滑剂层制备之前清洁基底。本发明还提出了一种用于制造磁记录盘的方法和装置，其中在磁膜沉积之后在真空中进行抛光。本发明还提出了一种用于制造磁记录盘的方法和装置，其中在真空中进行用于协调润滑剂层的粘合强度和表面润滑性的后处理处理。本发明还提供了一种在线型基板处理装置，其包括沿着多个绕规传送路径中的每一个设置的多个真空室，连接至少两个周向传送路径的连接传送路径，以及传送系统沿着绕绕传送路径进行处理的基板，并且沿着连接传送路径传送基板，而不将基板暴露在大气中。

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