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1. 发明授权

US08184896B2 Methods of determining quality of a light source 有权
标题翻译：确定光源质量的方法
公开(公告)号：US08184896B2
公开(公告)日：2012-05-22
申请号：US12773143
申请日：2010-05-04
申请人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
发明人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
IPC分类号： G06K9/00
CPC分类号： G03F7/70133 , G01J1/4257 , G03F7/70125
摘要： Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.
摘要翻译：提供了用于确定应用于光刻工艺的光源的质量的方法。图像传感器阵列暴露于来自光源的光。对应于瞳孔图上表示来自图像传感器阵列的光的强度的多个位置的地址和各自的强度。基于收集的地址和相应的强度来定义瞳孔图的内部曲线和外部曲线中的至少一个。如果地址相对于内曲线和外曲线中的至少一个具有预定图案，则将光源施加到光刻工艺。

2. 发明申请

US20080019586A1 METHODS OF DETERMINING QUALITY OF A LIGHT SOURCE 失效
标题翻译：确定光源质量的方法
公开(公告)号：US20080019586A1
公开(公告)日：2008-01-24
申请号：US11458915
申请日：2006-07-20
申请人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
发明人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
IPC分类号： G06K9/00 , G06K9/46 , G06K9/36
CPC分类号： G03F7/70133 , G01J1/4257 , G03F7/70125
摘要： Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.
摘要翻译：提供了用于确定应用于光刻工艺的光源的质量的方法。图像传感器阵列暴露于来自光源的光。对应于瞳孔图上表示来自图像传感器阵列的光的强度的多个位置的地址和各自的强度。基于收集的地址和相应的强度来定义瞳孔图的内部曲线和外部曲线中的至少一个。如果地址相对于内曲线和外曲线中的至少一个具有预定图案，则将光源施加到光刻工艺。

3. 发明授权

US07738692B2 Methods of determining quality of a light source 失效
标题翻译：确定光源质量的方法
公开(公告)号：US07738692B2
公开(公告)日：2010-06-15
申请号：US11458915
申请日：2006-07-20
申请人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
发明人： Nan-Jung Chen , Jui-Chung Peng , Kevin Hung , An-Kuo Yang
IPC分类号： G06K9/00 , G01C3/14 , G06K7/00
CPC分类号： G03F7/70133 , G01J1/4257 , G03F7/70125
摘要： Methods for determining a quality of a light source applied to a photolithographic process are provided. An image sensor array is exposed to a light from a light source. Addresses and respective intensities corresponding to a plurality of locations on a pupil map representing intensity of the light from on the image sensor array. At least one of an inner curve and an outer curve of the pupil map is defined based upon the collected addresses and respective intensities. The light source is applied to a photolithographic process if the addresses have a predetermined pattern relative to the at least one of the inner curve and the outer curve.
摘要翻译：提供了用于确定应用于光刻工艺的光源的质量的方法。图像传感器阵列暴露于来自光源的光。对应于瞳孔图上表示来自图像传感器阵列的光的强度的多个位置的地址和各自的强度。基于收集的地址和相应的强度来定义瞳孔图的内部曲线和外部曲线中的至少一个。如果地址相对于内曲线和外曲线中的至少一个具有预定图案，则将光源施加到光刻工艺。

4. 发明申请

US20050209981A1 Method of estimating the remaining lifetime of a part of a semiconductor fabrication machine by fuzzy inference 审中-公开
标题翻译：通过模糊推理估计半导体制造机的一部分的剩余寿命的方法
公开(公告)号：US20050209981A1
公开(公告)日：2005-09-22
申请号：US10804647
申请日：2004-03-19
申请人： Nan-Jung Chen
发明人： Nan-Jung Chen
IPC分类号： G06F15/18 , G06F17/00 , G06N5/02 , G06N5/04
CPC分类号： G06N5/048
摘要： A method for estimating a remaining lifetime of a part in a piece of semiconductor fabrication equipment comprises the steps of: selecting a plurality of factors relevant to the remaining lifetime of the part, and estimating the remaining lifetime of the part by a fuzzy inference. The plurality of factors include a number of semiconductor wafers that have been processed by the piece of semiconductor fabrication equipment since the part was installed in the piece of equipment.
摘要翻译：一种用于估计半导体制造设备中的部件的剩余寿命的方法包括以下步骤：选择与所述部件的剩余寿命相关的多个因素，以及通过模糊推断来估计所述部件的剩余寿命。多个因素包括由半导体制造设备处理的半导体晶片数量，因为该部件安装在该设备中。

5. 发明授权

US07082505B2 Backup data mechanism with fuzzy logic 有权
标题翻译：具有模糊逻辑的备份数据机制
公开(公告)号：US07082505B2
公开(公告)日：2006-07-25
申请号：US10286208
申请日：2002-11-01
申请人： Nan-Jung Chen
发明人： Nan-Jung Chen
IPC分类号： G06F12/02
CPC分类号： G06F3/0649 , G06F3/0608 , G06F3/0683 , Y10S707/99953 , Y10S707/99955
摘要： A data archiving controller automatically determines a whether a main storage devices has usage ratio in excess of a maximum limit and if an archiving or backing storage device has sufficient directory space to accept files from the main storage devices. The data archiving controller then determines using fuzzy logic the number of files to be transferred from the main storage devices to the backing storage devices. The data archiving controller has a set allocating apparatus in communication with the main storage device and the backing storage devices to receive retention device usage parameters for classification within classification sets. A membership rules retaining device contains the classification parameter defining rules by which the retention device usage parameters are assigned to the classification sets. The archiving controller has a rule evaluation apparatus for determining a quantity of data to be archived. The quantity of data to be archived is based on evaluation rules determined by the classification sets. A data designation apparatus designates the number of files to be archived and then designates the files to be transferred between the main storage device and backing storage devices.
摘要翻译：数据归档控制器自动确定主存储设备的使用率是否超过最大限制，并且归档或后备存储设备具有足够的目录空间来从主存储设备接收文件。然后，数据存档控制器使用模糊逻辑确定要从主存储设备传送到后备存储设备的文件数。数据存档控制器具有与主存储设备和后备存储设备通信的集合分配设备，以接收用于在分类集内进行分类的保留设备使用参数。会员规则保留设备包含定义规则的分类参数，通过该规则将保留设备使用参数分配给分类集。归档控制器具有用于确定要归档的数据量的规则评估装置。要归档的数据量基于由分类集确定的评估规则。数据指定装置指定要归档的文件数，然后指定要在主存储装置和后备存储装置之间传送的文件。

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