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1. 发明专利

JP2001021506A X-RAY INSPECTION APPARATUS 失效
公开(公告)号：JP2001021506A
公开(公告)日：2001-01-26
申请号：JP19470799
申请日：1999-07-08
申请人： NYUURII KK
发明人： SASAKI NOBUO , SEI KAZUHIRO
IPC分类号： H05K3/34 , G01N23/04 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To easily observe an arbitrary inspection spot of an object to be inspected, and a plurality of inspection spots in a sample located at an inspection point on an X-ray optical axis disposed at a fixed distance from an X-ray generator under the same conditions, even if the object to be inspected is inclined to the X-ray optical axis, and to obtain a most suitable transparent image. SOLUTION: This X-ray apparatus in which X-ray radiated from an X-ray generator 2 irradiates an object to be inspected, which can be inclined to the X-ray optical axis H, and a transparent image by the X-ray radiation is detected by an X-ray detector 10, is provided with a moving means 4, which moves the object to be inspected so that an arbitrary inspection spot of the object to be inspected, which is inclined to the optical axis H, is located at an inspection point on the optical axis H disposed at a prescribed distance from the X-ray generator 2.

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