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    • 6. 发明申请
    • VALVE ASSEMBLY FOR EFFUSION CELL
    • 阀组件用于消化细胞
    • WO2008037960A1
    • 2008-04-03
    • PCT/GB2007/003544
    • 2007-09-19
    • OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITEDBUTCHER, Peter
    • BUTCHER, Peter
    • C23C14/24C30B23/06
    • C23C14/243C30B23/066
    • A valve assembly for an effusion and cracking cell is provided, the cell comprising a transfer path for transferring a substance from a crucible region (20) to a cracker region (50) via a valve chamber ( 41). The valve assembly comprises a valve channel in the transfer path, through which the substance passes between the crucible region (20) and the valve chamber (41). A valve plug (43) is movable relative to the valve channel between a sealed position in which the valve plug obstructs passage of the substance through the valve channel and an open position in which the substance can pass through the valve channel between the crucible region and the valve chamber. An actuator (49) for moving the valve plug between the sealed and open positions and a sealing rod (46) connected between the valve plug (43) and the actuator (49), and passing through a wall of the valve chamber, for transferring movement from the actuator (49) to the valve plug (43) is also provided.
    • 提供了一种用于渗出和裂解电池的阀组件,所述电池包括用于经由阀室(41)将物质从坩埚区域(20)转移到裂化器区域(50)的转移路径。 阀组件包括传送路径中的阀通道,物质通过该阀通道在坩埚区域(20)和阀室(41)之间。 阀塞(43)可相对于阀通道移动,该密封位置在阀塞阻塞物质通过阀通道的打开位置和物质可通过坩埚区域和 阀室。 用于在所述密封和打开位置之间移动所述阀塞的致动器(49)和连接在所述阀塞(43)和所述致动器(49)之间的密封杆(46),并且穿过所述阀室的壁,用于传送 还提供了从致动器(49)到阀塞(43)的运动。
    • 7. 发明申请
    • EFFUSION AND CRACKING CELL
    • 损伤和破裂细胞
    • WO2008037958A1
    • 2008-04-03
    • PCT/GB2007/003539
    • 2007-09-19
    • OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITEDBUTCHER, Peter
    • BUTCHER, Peter
    • C23C14/24C30B23/06
    • C23C14/243C30B23/066C30B29/42C30B35/00
    • An effusion and cracking cell is provided which comprises a crucible region (20) having a first heater (24) for evaporating or sublimating a substance to produce a first gaseous species, a cracker region (50) having a second heater (51) for transforming the first gaseous species into a second gaseous species, a transfer path (40) for transferring the first gaseous species from the crucible region to the cracker region and a valve assembly located in the transfer path adapted to control the flow of the first gaseous species. A third heater (63) is provided so as to heat at least part of the transfer path between the crucible region and the cracker region for controlling the temperature of the first gaseous species therein.
    • 提供了一种渗透和裂化单元,其包括具有用于蒸发或升华物质以产生第一气态物质的第一加热器(24)的坩埚区域(20),具有第二加热器(51)的裂化器区域(50) 将第一气态物质转化为第二气态物质,用于将第一气态物质从坩埚区域转移到裂化器区域的传送路径(40)和位于传送路径中的适于控制第一气态物质流动的阀组件。 提供第三加热器(63),以加热坩埚区域和裂化器区域之间的传输路径的至少一部分,以控制其中的第一气态物质的温度。