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    • 2. 发明专利
    • SILICON OPTICAL CIRCUIT
    • SG11201804105RA
    • 2018-06-28
    • SG11201804105R
    • 2016-11-17
    • NIPPON TELEGRAPH & TELEPHONE
    • KAMEI SHINJIZODO MAKOTOTAKEDA KOTAROFUKUDA HIROSHI
    • G02B6/13G02B6/122G02B6/124G02B6/125
    • SILICON OPTICAL CIRCUIT The visual detection of a silicon optical circuit in a conventional technique depends on sensory decision by a human who visually conducts checking, and there has been limitation in completely detecting small flaws. A defective chip having a flaw which was overlooked in visual inspection is judged as a good product by mistake and is flowed out to the downstream processes after the visual inspection. The defective chip cannot be judged as a failure in an early stage of the process of the whole optical circuits, thereby reducing a yield at the downstream manufacturing and inspection processes and inducing increase in cost for manufacturing and inspecting products. The optical circuit of the present invention includes, in addition to an optical circuit that implements desired functions, an optical waveguide for flaw detection which surrounds the entire optical circuit and which is sufficiently proximate to the optical waveguide of the optical circuit and grating couplers connected to the optical waveguide for detection. Based on the transmission characteristic measurement of the optical waveguide for detection using the grating couplers, a flaw within each chip can be efficiently discovered in the state of a wafer before being cut into chips. A flaw can also be discovered hierarchically by providing individual optical waveguides for detection for respective chips and by further forming one common optical waveguide for detection over the plurality of chips. (Figure 1)
    • 4. 发明专利
    • SILICON OPTICAL CIRCUIT
    • CA3005704A1
    • 2017-05-26
    • CA3005704
    • 2016-11-17
    • NIPPON TELEGRAPH & TELEPHONE
    • KAMEI SHINJIZODO MAKOTOTAKEDA KOTAROFUKUDA HIROSHI
    • G02B6/13G02B6/122G02B6/124G02B6/125
    • The visual detection of a silicon optical circuit in the prior art depended on the sensory judgment of a human being to visually recognize, and there were limits to completely performing the detection of small scratches. A defective chip having scratches overlooked by visual inspection is mistakenly judged as passing and flows outs to a step downstream from the visual inspection. Unable to judge the defective chip as failing at the stage of an early step of the overall optical circuit, yield was lowered in downstream production and inspection steps, and production inspection costs for products increased. This optical circuit, in addition to an optical circuit that achieves a desired function, includes a detection optical waveguide for scratches sufficiently close to an optical waveguide of the optical circuit that surrounds the entire optical circuit, and a grating coupler connected to the detection optical waveguide. It is possible to efficiently discover scratches within each chip in a wafer state prior to being cut into chips, on the basis of the measurement of transmission characteristics of the detection optical waveguide using the grating coupler. It is also possible to discover scratches hierarchically by providing an individual detection waveguide for each chip and further forming one common detection optical waveguide over a plurality of chips.