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    • 8. 发明专利
    • THRESHOLD VOLTAGE LEADING METHOD
    • JPH06252395A
    • 1994-09-09
    • JP3520993
    • 1993-02-24
    • NIPPON TELEGRAPH & TELEPHONE
    • AOYAMA KAZUO
    • G01R31/26H01L21/66H01L29/78H01L29/784
    • PURPOSE:To correctly lead a threshold voltage of a fine field effect transistor of which effective channel length and effective channel width are unknown with respect to a drain voltage change by setting a gate voltage, which makes minimal the difference characteristic of second order of a logarithmic value of a drain current for the gate voltage to a threshold voltage. CONSTITUTION:A voltage Vgs with reference to source is impressed to a gate terminal and a drain current ids is measured while Vgs is increased from 0. (1 to 3) A logarithmic value of the selected drain current is obtained to search difference of second order of the drain current in regard to the gate voltage. (4) A gate voltage which makes minimal the value of the difference of second order is obtained as a threshold voltage. (5) Thereby, the correct threshold value can be obtained even when the drain voltage changes. Therefore, the threshold voltage of a fine field effect transistor of which effective channel length and effective channel width are unknown can be led correctly with respect to change of the drain voltage.