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    • 2. 发明专利
    • Metal composite superfine particle and its manufacturing method
    • 金属复合超细颗粒及其制造方法
    • JP2014148750A
    • 2014-08-21
    • JP2014002218
    • 2014-01-09
    • Nippon Synthetic Chem Ind Co Ltd:The日本合成化学工業株式会社
    • SATO HIROAKI
    • B22F1/02B22F1/00B22F9/24H01B5/00H01B13/00
    • PROBLEM TO BE SOLVED: To provide a metal composite superfine particle excellent in reactivity and method of manufacturing the metal composite superfine particle manufacturing the particle in high efficiency.SOLUTION: Metal composite superfine particles are used having an average 1.2 or more of circularity of particles photographed by a transmission electron microscope and an average particle major axis of 1 to 200 nm. There is provided a method of manufacturing the metal composite superfine particle whose metal species are gold, silver and copper, by reacting inorganic metal salts and higher alcohols with heating and stirring the inorganic metal salts and the higher alcohols, including a process of stirring at 20 to 120°C for at least 5 minutes and a process of stirring at 120°C to 300°C for at least 5 minutes, and the stirring processes satisfy a condition represented by the formula (1). 0.05≤Δt/D≤0.8 (1), where D is a radius of a swirl on a surface of a liquid during stirring and Δt is difference of the lowest point and the highest point of the swirl.
    • 要解决的问题:提供一种反应性优异的金属复合超细颗粒和制造高效率的颗粒的金属复合超细颗粒的方法。解决方案:使用金属复合超细颗粒,其平均具有1.2或更多的圆形颗粒拍摄 通过透射电子显微镜,平均粒子长轴为1〜200nm。 提供了一种通过加热和搅拌无机金属盐和高级醇来制造金属种类为金,银和铜的金属复合超细颗粒的方法,包括在20℃下搅拌的过程 至120℃至少5分钟,并在120℃至300℃下搅拌至少5分钟,并且搅拌过程满足由式(1)表示的条件。 0.05≤&Dgr; t /D≤0.8(1)其中D是搅拌期间液体表面的漩涡半径,Dgr是最低点和最高点之间的差。
    • 5. 发明专利
    • Photosensitive resin composition, and photoresist film and resist pattern forming method using the same
    • 光敏树脂组合物和光刻胶膜及其形成方法
    • JP2006178083A
    • 2006-07-06
    • JP2004369717
    • 2004-12-21
    • Nippon Synthetic Chem Ind Co Ltd:The日本合成化学工業株式会社
    • SATO HIROAKITSUJIMOTO ATSUSHI
    • G03F7/004G03F7/027G03F7/033G03F7/11H01J9/02H01J11/02H01J11/22H01J11/34
    • PROBLEM TO BE SOLVED: To provide a photosensitive resin composition and a photoresist film very excellent in sensitivity, resolution, thin line adhesion and pattern forming property even under a low exposure condition. SOLUTION: The photosensitive resin composition contains a carboxylic polymer (A), an ethylenically unsaturated compound (B), a photopolymerization initiator (C) and a compound (D) represented by formula (I) wherein R 1 and R 2 each independently denote a 1-10C alkyl, a 6-20C aryl, a 6-20C alkyl-substituted aryl, a 6-20C aryloxy-substituted aryl or a 6-20C alkoxy-substituted aryl; R 7 and R 8 each independently denote H, a 1-10C alkyl, a 6-20C aryl, a 1-10C alkoxy or a 6-20C aryloxy; and X denotes a divalent group represented by specific formula. The photoresist film and a resist pattern forming method using the photosensitive resin composition are also provided. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:即使在低曝光条件下,也提供了灵敏度,分辨率,细线粘附性和图案形成性能非常优异的感光性树脂组合物和光致抗蚀剂膜。 解决方案:感光性树脂组合物含有羧酸聚合物(A),烯键式不饱和化合物(B),光聚合引发剂(C)和式(I)表示的化合物(D),其中R / SP>和R 2 各自独立地表示1-10C烷基,6-20C芳基,6-20C烷基取代的芳基,6-20C芳氧基取代的芳基或6-20C 烷氧基取代的芳基; R 7 和R 8 各自独立地表示H,1-10C烷基,6-20C芳基,1-10C烷氧基或6-20C芳氧基; X表示由具体式表示的二价基团。 还提供了光致抗蚀剂膜和使用该感光性树脂组合物的抗蚀剂图案形成方法。 版权所有(C)2006,JPO&NCIPI