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    • 5. 发明专利
    • MULTISTAGE PLASMA TREATMENT
    • JPH03287773A
    • 1991-12-18
    • JP8751290
    • 1990-04-03
    • NIPPON STEEL CORP
    • HAKODA YOSHIKAZUISHIKAWA YOSHIYASUTAKENOUCHI KOJI
    • C23C16/50C23C16/54
    • PURPOSE:To form a good-quality film at a high rate and to improve the treating efficiency at the time of depositing a thin film on a strip substrate to be treated in a multistage treating chamber by progressively increasing the pressure, supplied power and gas flow rate as the operating condition toward the succeeding treating chamber from the preceding treating chamber and carrying out plasma treatment. CONSTITUTION:A strip substrate 8 to be treated is passed through the treating chambers 2a, 2b and 2c and treated with plasma as follows. Namely, a film highly adhesive to the substrate is formed in the chamber 2a with the low pressure, low power and low gas flow rate (however the film forming rate is low). The film forming rate is increased with the medium pressure, medium power and medium gas flow rate in the chamber 2b. A film is formed at a high rate with the high pressure, high power and high gas flow rate in the chamber 2c. In this multistage plasma treatment, a good-adhesion film is formed at a high rate unlike the conventional method, the treating time is reduced, and the productivity is improved.
    • 10. 发明专利
    • METHOD FOR CORRECTING ATTITUDE AND POSITION OF INDUSTRIAL ROBOT
    • JPH08320717A
    • 1996-12-03
    • JP12825395
    • 1995-05-26
    • NIPPON STEEL CORP
    • HAKODA YOSHIKAZUSHIRAISHI KOJISASAKI EIJI
    • B25J13/08G05B19/18G05B19/404
    • PURPOSE: To precisely cut a work irrelevantly to a work gripping error by measuring three arbitrary measuring points provided on the cut surface of the work, calculating a three-point measuring surface attitude and position correction values, and making corrections at the time of the cutting according to the correction values. CONSTITUTION: A reference work 3 is fitted to the hand 2 of a robot flange 1. The distances (30RG, 3XX, and 3XY) between measuring instruments 4-3, 4-5, and 4-6 and each measuring point are recorded and stored as comparison reference values. When the work of the same rod is gripped slantingly owing to burrs, respective measured values (30RG', 3XX', and 3XY') in regard to each measuring point are compared with the comparison reference values to obtain differences in regard to the point. With the obtained differences, a position difference component (X0 ) is an axial direction perpendicular to the measuring surface is calculated form attitude differences (θx, θy) in directions around other two othogonal axes except an axis perpendicular to the measurement surface centering on a measuring reference point (30RG') and the differences in regard to a reference measuring point, and the attitude and position of the robot are corrected on the basis of the correction value obtained by summing up the values.