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1. 发明申请

WO0003301A2 EXPOSURE DEVICE HAVING A PLANAR MOTOR 审中-公开
标题翻译：具有平面电机的曝光装置
公开(公告)号：WO0003301A2
公开(公告)日：2000-01-20
申请号：PCT/US9915278
申请日：1999-07-07
申请人： NIPPON KOGAKU KK , HAZELTON ANDREW J , TANAKA KEIICHI , EATON JOHN K
发明人： HAZELTON ANDREW J , TANAKA KEIICHI , EATON JOHN K
IPC分类号： H01J37/20 , G03F7/20 , H01L21/027 , H01L21/68 , H02K41/02 , H02K41/03 , G03F
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/70858 , H02K41/031 , H02K2201/18
摘要： Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.
摘要翻译：公开了能够有效地抑制对环境的热影响的平面电动机装置。当向与可移动部件（51）的磁体相对的电枢线圈（38）供给电流时，通过电磁力沿着移动面（21a）驱动可动部件51。当可动构件（51）沿一定的方向继续被驱动时，向可动构件（51）的每个移动位置的电磁线圈（38）供给与磁体相对的电枢线圈（38），由此电枢线圈）提供电流产生热量。电枢线圈（38）被容纳在基座（21）中的真空室（41）中，并且被布置成与定子轭（43）接触，在它们之间形成预定的间隙，并且陶瓷形成真空室（41）的板（36）。因此，从电枢线圈（38）到移动面（21a）侧的热传递基本上仅通过放射线实现，从而可以有效地抑制对环境的热影响。

2. 发明申请

WO0003301A9 EXPOSURE DEVICE HAVING A PLANAR MOTOR 审中-公开
标题翻译：具有平面电机的暴露装置
公开(公告)号：WO0003301A9
公开(公告)日：2000-05-25
申请号：PCT/US9915278
申请日：1999-07-07
申请人： NIPPON KOGAKU KK , HAZELTON ANDREW J , TANAKA KEIICHI , EATON JOHN K
发明人： HAZELTON ANDREW J , TANAKA KEIICHI , EATON JOHN K
IPC分类号： H01J37/20 , G03F7/20 , H01L21/027 , H01L21/68 , H02K41/02 , H02K41/03 , H02K41/00 , G03B27/42
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/70858 , H02K41/031 , H02K2201/18
摘要： Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.
摘要翻译：公开了一种能够有效抑制热对环境的影响的平面电动机装置。当电流供应到与可移动部件（51）的磁体相对的电枢线圈（38）时，可移动部件（51）通过电磁力沿着移动表面（21a）被驱动。当可动部件（51）继续沿一定方向被驱动时，对于可动部件（51）的每个移动位置，电流被提供给与磁体相对的电枢线圈（38），由此电枢线圈）提供电流产生热量。电枢线圈38容纳在基座21内的真空室41内，与定子磁轭43接触配置，在它们之间形成规定的间隙，板（36）形成真空室（41）。因此，从电枢线圈（38）到移动表面（21a）侧的热传递基本上仅通过辐射来实现，从而可以有效地抑制热对环境的影响。

3. 发明公开

EP1064713A4 EXPOSURE DEVICE HAVING A PLANAR MOTOR 审中-公开
标题翻译： BELICHTUNGSVORRICHTUNG麻省计算机电机
公开(公告)号：EP1064713A4
公开(公告)日：2005-07-20
申请号：EP99933725
申请日：1999-07-07
申请人： NIPPON KOGAKU KK , HAZELTON ANDREW J
发明人： HAZELTON ANDREW J , TANAKA KEIICHI , EATON JOHN K
IPC分类号： H01J37/20 , G03F7/20 , H01L21/027 , H01L21/68 , H02K41/02 , H02K41/03 , H02K41/00
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/70858 , H02K41/031 , H02K2201/18
摘要： Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.
摘要翻译：公开了能够有效地抑制对环境的热影响的平面电动机装置。当向与可移动部件（51）的磁体相对的电枢线圈（38）供给电流时，通过电磁力沿着移动面（21a）驱动可动部件51。当可动构件（51）沿一定的方向继续被驱动时，对于可移动构件（51）的每个移动位置，向与磁体相对的电枢线圈（38）提供电流，从而电枢线圈（38））提供电流产生热量。电枢线圈（38）被容纳在基座（21）的真空室（41）中，并且被布置成与定子轭（43）接触，并且在它们之间限定预定的间隙和陶瓷形成真空室（41）的板（36）。因此，从电枢线圈（38）到移动面（21a）侧的热传递基本上仅通过辐射而实现，从而可以有效地抑制对环境的热影响。

4. 发明申请

WO2004090633A2 ENVIRONMENTAL SYSTEM INCLUDING AN ELECTRO-OXMOTIC ELEMENT FOR AN IMMERSION LITHOGRAPHY APPARATUS 审中-公开
标题翻译：包括静电装置的电子元件的环境系统
公开(公告)号：WO2004090633A2
公开(公告)日：2004-10-21
申请号：PCT/IB2004001376
申请日：2004-04-04
申请人： NIPPON KOGAKU KK , EATON JOHN K
发明人： EATON JOHN K
IPC分类号： G03B27/32 , G03B27/42 , G03B27/58 , G03F20060101 , G03F7/20 , G03F
CPC分类号： G03F7/70341
摘要： An environmental system (26) for controlling an environment in a gap (246) between an optical assembly (16) and a device (30) includes a fluid barrier (254), an immersion fluid system (252), an electro-osmotic element (256), and a control system (255). The fluid barrier (254) is positioned near the device (30) and maintains the electro-osmotic element (256) near the gap (246). The immersion fluid system (252) delivers an immersion fluid (248) that fills the gap (246). The control system (255) applies an electrical voltage to the electro-osmotic element (256) that causes the electro-osmotic element (256) to transport at least a portion of the immersion fluid (248) that is near the fluid barrier (254) and the device (30) away from the device (30). The electro-osmotic element (256) can be made of a porous material.
摘要翻译：用于控制光学组件（16）和装置（30）之间的间隙（246）中的环境的环境系统（26）包括流体屏障（254），浸没流体系统（252），电渗透元件（256）和控制系统（255）。流体屏障（254）位于装置（30）附近并将电渗透元件（256）保持在间隙附近（246）。浸没流体系统（252）输送填充间隙（246）的浸没流体（248）。控制系统（255）向电渗透元件（256）施加电压，使电渗透元件（256）输送靠近流体屏障（254）的至少一部分浸没流体（248））和设备（30）远离设备（30）。电渗透元件（256）可以由多孔材料制成。

5. 发明申请

WO2008051293A2 A TRANSLATING ACTIVE GURNEY FLAP TO ALLEVIATE AIRCRAFT WAKE VORTEX HAZARD 审中-公开
标题翻译：翻转活动的GURNEY襟翼到高空飞行员WAKE VORTEX危险
公开(公告)号：WO2008051293A2
公开(公告)日：2008-05-02
申请号：PCT/US2007009153
申请日：2007-04-13
申请人： UNIV LELAND STANFORD JUNIOR , EATON JOHN K , MATALANIS CLAUDE G
发明人： EATON JOHN K , MATALANIS CLAUDE G
IPC分类号： B64C23/06
CPC分类号： B64C23/06 , B64C2003/145 , Y02T50/162
摘要： A wake vortex alleviator is provided. The wake vortex alleviator produces rapid variations in the position of vortices emanating from aerodynamic surfaces by using an active flap that moves span-wise back and forth along the outboard section of the surface. Rapidly moving the flap back and forth in a slot at an appropriate frequency will cause the vortex to oscillate, resulting in interaction between other vortices and subsequent destruction much earlier than it would occur naturally. The slot is positioned near the aerodynamic surface trailing edge and generally transverse to a chord line of the aerodynamic surface. The flap can be moved using a variety of actuators to position, translate and stow the flap. The oscillation frequency and position are guided by information feedback according variations in lift in the aerodynamic surface, such as wind gusts. The flaps can control yaw, roll and pitch of the aerodynamic surface.
摘要翻译：提供尾流涡流缓解器。尾流涡流缓解器通过使用沿着表面的外侧部分跨越方向前后移动的活动翼片，从气动表面产生的涡流的位置产生快速变化。以适当的频率快速地在狭缝中前后移动翼片将导致涡旋振荡，导致其它旋涡之间的相互作用和随后的破坏比自然发生的早。狭槽位于空气动力学表面后缘附近并且大致横向于空气动力学表面的弦线。可以使用各种致动器移动挡板来定位，平移和收起挡板。振荡频率和位置由空气动力学表面的升力变化（如阵风）的信息反馈引导。襟翼可以控制空气动力学表面的偏航，滚动和俯仰。

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