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1. 发明申请

WO2010035901A1 EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE 审中-公开
标题翻译：曝光装置，曝光方法和生产装置的方法
公开(公告)号：WO2010035901A1
公开(公告)日：2010-04-01
申请号：PCT/JP2009/067200
申请日：2009-09-25
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , NAGAYAMA, Tadashi , KIUCHI, Tohru
发明人： HIDAKA, Yasuhiro , NAGAYAMA, Tadashi , KIUCHI, Tohru
IPC分类号： G03F7/20
CPC分类号： G03F7/70275 , G03F7/70208
摘要： An exposure apparatus according to an aspect of the present invention includes a mask-moving section (MS) which is movable in a first direction (X direction) while holding a mask (M) formed with a pattern; an illumination system (IL1, IL2) which forms a first illumination area (IR1) and a second illumination area (IR2) separated from each other by a spacing distance in the first direction; a substrate-moving section (WS) which is movable in a second direction (X direction) while holding a photosensitive substrate (W); a projection optical system (PL) which forms a first projected image of the pattern of the first illumination area and a second projected image of the pattern of the second illumination area; and a restricting section (MB, MD, CR) which restricts the first projected image and the second projected image to be within a first projection area (ER1) and a second projection area (ER2) respectively. A spacing distance, in the first direction, between a first conjugate area conjugate with the first projection area and a second conjugate area conjugate with the second projection area is set to be such a spacing distance that scanning exposures are successively performed for a first transfer area and a second transfer area, respectively, which are provided adjacently in the second direction. With this, the throughput in relation to the scanning exposure can be improved.
摘要翻译：根据本发明的一个方面的曝光装置包括一个能够沿着第一方向（X方向）移动并同时保持形成有图案的掩模（M）的掩模移动部分（MS）形成第一照明区域（IR1）和第二照明区域（IR2）的照明系统（IL1，IL2），所述第一照明区域和第二照明区域（IR2）在所述第一方向上彼此间隔开; 基板移动部分（WS），其在保持感光基板（W）的同时沿第二方向（X方向）移动; 投影光学系统（PL），其形成第一照明区域的图案的第一投影图像和第二照明区域的图案的第二投影图像; 以及限制部分（MB，MD，CR），其将第一投影图像和第二投影图像分别限制在第一投影区域（ER1）和第二投影区域（ER2）内。在与第一投影区域共轭的第一共轭区域与第二投影区域共轭的第一共轭区域之间的第一方向上的间隔距离设定为对于第一传送区域连续进行扫描曝光的间隔距离以及分别设置在第二方向上的第二传送区域。由此，可以提高与扫描曝光有关的吞吐量。

2. 发明申请

WO2009148185A1 SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE POSITION DETECTING METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：WO2009148185A1
公开(公告)日：2009-12-10
申请号：PCT/JP2009/060568
申请日：2009-06-03
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
发明人： HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
IPC分类号： G03F9/00
CPC分类号： G03F9/7049 , G03F9/7026 , G03F9/7034
摘要： A surface position detecting apparatus comprises a light-sending optical system which makes first light from a first pattern and second light from a second pattern incident at different incidence angles to a predetermined surface to project an intermediate image of the first pattern and an intermediate image of the second pattern onto the predetermined surface; a light-receiving optical system which guides the first light and the second light reflected on the predetermined surface, to a first observation surface and to a second observation surface, respectively, to form an observation image of the first pattern on the first observation surface and an observation image of the second pattern on the second observation surface; and a detecting section which detects position information of the observation image of the first pattern on the first observation surface and position information of the observation image of the second pattern on the second observation surface and which calculates a surface position of the predetermined surface, based on the position information of the observation image of the first pattern and the position information of the observation image of the second pattern.
摘要翻译：表面位置检测装置包括发光光学系统，其将来自第一图案的第一光和来自以不同入射角入射到预定表面的第二图案的第二光投射到第一图案的中间图像和第二图案的中间图像第二图案到预定表面上; 分别将第一光和第二光反射到预定表面上的光接收光学系统分别连接到第一观察表面和第二观察表面，以在第一观察表面上形成第一图案的观察图像，在第二观察面上的第二图案的观察图像; 以及检测部，其基于第一观察面检测第一图案的观察图像的位置信息和第二观察面上的第二图案的观察图像的位置信息，并且基于第一图案的观察图像的位置信息和第二图案的观察图像的位置信息。

3. 发明申请

WO2009157576A1 SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE POSITION DETECTING METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：WO2009157576A1
公开(公告)日：2009-12-30
申请号：PCT/JP2009/061798
申请日：2009-06-22
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
发明人： HIDAKA, Yasuhiro , ISHIKAWA, Motofusa
IPC分类号： G03F9/00
CPC分类号： G03F9/7049 , G03F9/7026 , G03F9/7034
摘要： An apparatus is provided with a light-sending optical system (4-10) which makes first light from a first pattern and second light from a second pattern incident to a predetermined surface (Wa) to project intermediate images of the first and second patterns onto the predetermined surface respectively; a light-receiving optical system (30-24) which guides the first and second light reflected on the predetermined surface, to first and second observation surfaces (23Aa, 23Ba) to form observation images of the first and second patterns, respectively; and a detecting section (23-21, PR) which detects position information of the observation images of the first and second patterns on the first and second observation surfaces respectively and which calculates a surface position of the predetermined surface, based on the position information. The light-sending optical system projects the intermediate image of the second pattern as an inverted image in a predetermined direction relative to the intermediate image of the first pattern.
摘要翻译：一种装置设置有发光光学系统（4-10），其使来自第一图案的第一光和从第二图案入射到预定表面（Wa）的第二光将第一和第二图案的中间图像投影到预定表面; 将预定表面上反射的第一和第二光引导到第一和第二观察表面（23Aa，23Ba）的光接收光学系统（30-24），分别形成第一和第二图案的观察图像; 以及检测部分，其检测第一和第二观察表面上的第一和第二图案的观察图像的位置信息，并基于位置信息来计算预定表面的表面位置。发光光学系统相对于第一图案的中间图像将预定方向的第二图案的中间图像投影为反转图像。

4. 发明申请

WO2009064016A1 SURFACE POSITION DETECTING APPARATUS, SURFACE POSITION DETECTING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，表面位置检测方法，曝光装置和装置制造方法
公开(公告)号：WO2009064016A1
公开(公告)日：2009-05-22
申请号：PCT/JP2008/071056
申请日：2008-11-13
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro
发明人： HIDAKA, Yasuhiro
IPC分类号： G03F9/00
CPC分类号： G03F9/7034 , G03F9/7026
摘要： A surface position detecting apparatus which detects position information of a predetermined surface in an object, comprising a first optical system (51E) which projects light from an oblique direction to the predetermined surface (14a); a second optical system (52E) which receive the light from the object; a detecting system (13) which receives the light from the second optical system and which detects the position information of the predetermined surface in a direction intersecting the predetermined surface based on the light; and a phase difference imparting system which is arranged in an optical path of at least one of the first and second optical systems (51E, 52E) and which imparts a phase difference between different portions from each other of light traveling via a surface other than the predetermined surface (14a) in the object, in the light from the second optical system (52E).
摘要翻译：一种检测物体中的预定表面的位置信息的表面位置检测装置，包括：将倾斜方向的光投射到预定表面（14a）的第一光学系统（51E）; 第二光学系统（52E），其接收来自所述物体的光; 检测系统（13），其接收来自所述第二光学系统的光，并且基于所述光检测与所述预定表面相交的方向上的所述预定表面的位置信息; 以及相位差赋予系统，其布置在第一和第二光学系统（51E，52E）中的至少一个的光路中，并且通过除了所述第一和第二光学系统之外的表面传播的光的彼此不同部分之间的相位差在来自第二光学系统（52E）的光中，物体中的预定表面（14a）。

5. 发明申请

WO2010029860A1 SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE POSITION DETECTING METHOD, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：WO2010029860A1
公开(公告)日：2010-03-18
申请号：PCT/JP2009/065026
申请日：2009-08-21
申请人： NIKON CORPORATION , HIDAKA, Yasuhiro
发明人： HIDAKA, Yasuhiro
IPC分类号： G03F9/00
CPC分类号： G03F9/7049 , G03F9/7026
摘要： A surface position detecting apparatus according to an aspect of the present invention has a light-sending optical system (4-11) which makes first light and second light from first and second patterns incident at different incidence angles to a predetermined surface (Wa) to project an intermediate image of the first pattern and an intermediate image of the second pattern onto the predetermined surface; a light-receiving optical system (31-24) which guides the first light and the second light reflected by the predetermined surface, to a first observation surface (23Aa) and to a second observation surface (23Ba), respectively, to form an observation image of the first pattern and an observation image of the second pattern on the first and second observation surfaces; and a detecting section (23-21, PR) which detects a piece of position information of the observation image of the first pattern and a piece of position information of the observation image of the second pattern and calculates a surface position of the predetermined surface, based on the pieces of position information. The light-sending optical system has a sending-side reflecting section (11) which reflects the second light having passed via sending-side common optical members (5-8), an even number of times to make the second light incident at the incidence angle smaller than that of the first light to the predetermined surface.
摘要翻译：根据本发明的一个方面的表面位置检测装置具有一个发光光学系统（4-11），它使来自第一和第二图案的第一光和第二光以不同的入射角入射到预定表面（Wa）至将第一图案的中间图像和第二图案的中间图像投影到预定表面上; 分别将第一光和由所述预定表面反射的第二光引导到第一观察表面（23Aa）和第二观察表面（23Ba）的光接收光学系统（31-24），以形成观察所述第一图案的图像和所述第二图案的观察图像在所述第一观察面和所述第二观察面上; 以及检测部分（23-21，PR），其检测第一图案的观察图像的位置信息和第二图案的观察图像的位置信息，并计算预定表面的表面位置，基于位置信息。发光光学系统具有发送侧反射部（11），反射经过发送侧公共光学部件（5-8）的第二光，偶数次，使第二光入射入射角度小于第一光到预定表面的角度。

6. 发明申请

WO2012077503A1 METHOD FOR FORMING FIXED IMAGES 审中-公开
标题翻译：形成固定图像的方法
公开(公告)号：WO2012077503A1
公开(公告)日：2012-06-14
申请号：PCT/JP2011/077104
申请日：2011-11-16
申请人： Kao Corporation , EIDA, Akihiro , HIDAKA, Yasuhiro
发明人： EIDA, Akihiro , HIDAKA, Yasuhiro
IPC分类号： G03G9/087 , G03G13/20 , G03G9/08
CPC分类号： G03G9/08755 , G03G9/0812 , G03G9/08782
摘要： A method for forming fixed images including the step of applying a toner for electrostatic image development containing at least a resin binder, a colorant, and a releasing agent to an apparatus for forming fixed images without a filter in a gas discharge part, wherein the resin binder contains a polyester, and wherein the releasing agent is a hydrocarbon-based wax, wherein the hydrocarbon-based wax has a melting point as determined by a differential scanning calorimeter of from 70° to 85 °C, and contains components melting at a temperature equal to or lower than 65°C having an amount of heat absorption as determined by a differential scanning calorimeter of less than 7.5 J/g, and a toner for electrostatic image development used in a method for forming fixed images. The method for forming fixed images of the present invention is suitably used in the development of a latent image formed in, for example, electrophotography, electrostatic recording method, electrostatic printing method or the like.
摘要翻译：一种用于形成固定图像的方法，包括以下步骤：将至少含有树脂粘合剂，着色剂和脱模剂的静电图像显影用调色剂施加到在气体排出部分中没有过滤器的固定图像形成装置，其中树脂粘合剂含有聚酯，其中所述脱模剂为烃类蜡，其中所述烃系蜡具有通过差示扫描量热计测定的熔点为70〜85℃，并且含有熔点为等于或低于65℃，具有小于7.5J / g的差示扫描量热计测定的吸热量，以及用于形成固定图像的方法中的静电图像显影用调色剂。本发明的形成固定图像的方法适用于在例如电子照相术，静电记录方法，静电印刷方法等中形成的潜像的开发中。

7. 发明申请

WO2020198253A1 LASER RADAR 审中-公开
公开(公告)号：WO2020198253A1
公开(公告)日：2020-10-01
申请号：PCT/US2020/024505
申请日：2020-03-24
申请人： NIKON METROLOGY NV , NIKON CORPORATION
发明人： SLOTWINSKI, Anthony , CHAMSINE, Ghassan , HEDGES, Tom , LIGHTOWLER, Paul , SMITH, Daniel Gene , HIDAKA, Yasuhiro , ARAI, Masanori
IPC分类号： G01S7/481 , G01S7/484
摘要： Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.

8. 发明授权

EP1909062B1 SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD 有权转让
标题翻译：表面位置检测装置，曝光装置，以及曝光方法
公开(公告)号：EP1909062B1
公开(公告)日：2014-03-05
申请号：EP06767469.7
申请日：2006-06-28
申请人： NIKON CORPORATION
发明人： HIDAKA, Yasuhiro , NAGAYAMA, Tadashi
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F7/70191 , G03F9/7026 , G03F9/7034 , G03F9/7065 , G03F9/7088 , Y10T29/49124
摘要： A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.

9. 发明公开

EP2191333A1 SURFACE POSITION DETECTING APPARATUS, SURFACE POSITION DETECTING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 无效转让
标题翻译：表面位置检测装置，表面位置检测方法，曝光装置及设备的位置，RATHER程序
公开(公告)号：EP2191333A1
公开(公告)日：2010-06-02
申请号：EP08849010.7
申请日：2008-11-13
申请人： Nikon Corporation
发明人： HIDAKA, Yasuhiro
IPC分类号： G03F9/00
CPC分类号： G03F9/7034 , G03F9/7026
摘要： A surface position detecting apparatus which detects position information of a predetermined surface in an object, comprising a first optical system which projects light from an oblique direction to the predetermined surface; a second optical system which receives the light from the object; a detecting system which receives the light from the second optical system and which detects the position information of the predetermined surface in a direction intersecting the predetermined surface based on the light; and a phase difference imparting system which is arranged in an optical path of at least one of the first and second optical systems and which imparts a phase difference between different portions from each other of light traveling via a surface other than the predetermined surface in the object, in the light from the second optical system.

10. 发明授权

EP2191333B1 SURFACE POSITION DETECTING APPARATUS, SURFACE POSITION DETECTING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 无效转让
标题翻译：表面位置检测装置，表面位置检测方法，曝光装置及设备的位置，RATHER程序
公开(公告)号：EP2191333B1
公开(公告)日：2016-06-22
申请号：EP08849010.7
申请日：2008-11-13
申请人： Nikon Corporation
发明人： HIDAKA, Yasuhiro
IPC分类号： G03F9/00
CPC分类号： G03F9/7034 , G03F9/7026
摘要： A surface position detecting apparatus which detects position information of a predetermined surface in an object, comprising a first optical system which projects light from an oblique direction to the predetermined surface; a second optical system which receives the light from the object; a detecting system which receives the light from the second optical system and which detects the position information of the predetermined surface in a direction intersecting the predetermined surface based on the light; and a phase difference imparting system which is arranged in an optical path of at least one of the first and second optical systems and which imparts a phase difference between different portions from each other of light traveling via a surface other than the predetermined surface in the object, in the light from the second optical system.

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