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    • 1. 发明申请
    • SUPPORT MEMBER ASSEMBLY FOR ELECTROCONDUCTIVE CONTACT MEMBERS
    • 支持会员组装电子接触会员
    • WO2002075329A2
    • 2002-09-26
    • PCT/JP2002/002497
    • 2002-03-15
    • NHK SPRING CO., LTD.KAZAMA, ToshioIMUTA, Shogo
    • KAZAMA, ToshioIMUTA, Shogo
    • G01R1/073
    • G01R1/07314G01R1/06722G01R1/07378G01R3/00
    • The support member assembly (1) is formed by laminating a plurality of plastic layered assemblies (6) each incorporated with a reinforcing plate (3) and integrally joining them by heating. Holder holes (2) are formed in the parts of the assembly corresponding to the openings (3a) of the reinforcing plates (3). The reinforcing member increases the overall mechanical strength of the support member assembly. Furthermore, because a number of reinforcing plates can be layered and each reinforcing plate may be provided with a small thickness, the working of the strips of the reinforcing plates between adjacent openings can be achieved without any difficulty, and the manufacturing cost of such a support member assembly can be reduced. When each plastic layered assembly comprises plastic material formed by impregnating non-woven fabric with thermosetting resin, the drilling of holder holes for receiving electroconductive contact members can be more favorably and economically performed.
    • 支撑构件组件(1)通过层叠多个塑料层叠组件(6)而形成,每个塑料层叠组件(6)与加强板(3)结合在一起,并通过加热而一体地连接。 在对应于加强板(3)的开口(3a)的组件的部分中形成有支撑孔(2)。 加强构件增加了支撑构件组件的整体机械强度。 此外,由于可以层叠多个加强板并且可以将每个加强板设置为较小的厚度,所以可以在没有任何困难的情况下实现加强板在相邻开口之间的加工,并且这种支撑件的制造成本 会员装配可以减少。 当每个塑料分层组件包括通过用热固性树脂浸渍无纺布形成的塑料材料时,可以更有利地和经济地执行用于接收导电接触构件的保持孔的钻孔。
    • 2. 发明公开
    • PROBE CARD
    • 探针卡
    • EP1970715A1
    • 2008-09-17
    • EP06835051.1
    • 2006-12-20
    • NHK SPRING CO., LTD.
    • YAMADA, YoshioNAKAYAMA, HiroshiNAGAYA, MitsuhiroIMUTA, Shogo
    • G01R1/073H01L21/66
    • G01R1/07378G01R1/44G01R31/2863G01R31/2874
    • Provided is a probe card capable of surely bringing probes into contact with a contact object regardless of a temperature environment of a test. To achieve the object, the probe card includes a plurality of probes that are made of a conductive material and come into contact with electrode pads of a semiconductor wafer to input or output an electric signal; a probe head that houses and holds the probes; a substrate that has a wiring pattern corresponding to the circuitry; and a space transformer that is stacked on the probe head, changes a space of the wiring pattern of the substrate and thus relays wires, and has electrode pads provided on a surface on a side opposed to the probe head in association with the relayed wires. Both ends of the probes come into contact with portions near the centers of the electrodes pads of the semiconductor wafer and the space transformer under an environment having an average temperature of a lowest temperature and a highest temperature in testing the semiconductor wafer.
    • 本发明提供一种无论测试的温度环境如何都能可靠地使探针与接触对象接触的探针卡。 为了实现该目的,探针卡包括多个由导电材料制成并与半导体晶片的电极焊盘接触以输入或输出电信号的探针; 一个容纳和固定探针的探头; 具有对应于所述电路的布线图案的衬底; 以及堆叠在探头上的空间变换器,改变基板的布线图案的空间并由此中继导线,并且具有设置在与中继导线相关联的与探头相对的一侧的表面上的电极焊盘。 在测试半导体晶片的平均温度为最低温度和最高温度的环境下,探针的两端与半导体晶片和空间转换器的电极焊盘的中心附近的部分接触。