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    • 2. 发明专利
    • Molding for plasma generating electrode, molding method therefor and plasma generating electrode
    • 用于等离子体发生电极的成型,其制造方法和等离子体发生电极
    • JP2005177644A
    • 2005-07-07
    • JP2003423556
    • 2003-12-19
    • Honda Motor Co LtdNgk Insulators Ltd日本碍子株式会社本田技研工業株式会社
    • SUZUKI JUNICHITERATANI NAOMIKONDO ATSUOMASUDA MASAAKI
    • H05H1/24B01D53/56B01D53/74B01J19/08
    • Y02C20/10
    • PROBLEM TO BE SOLVED: To provide a molding for a plasma generating electrode which can be manufactured in high productivity, enables uniform and stable plasma to be generated and can effectively prevent the damage to a plasma generating electrode caused by a temperature change or high-voltage load and has excellent heat resistance and to provide a method for molding the molding and the plasma generating electrode. SOLUTION: The molding 15 for the plasma generating electrode is molded integrally by press-fixing/integrating the back surface of a first molding member 10 which comprises a dielectric material having a comb-shaped projected line part 2 on the front surface of a planar part 6, to/with a second molding member 12 comprising a planar dielectric material while an electrically conductive film 20 composed of an electrical conductor is interposed between the first molding member and the second molding member. As a result, this molding has such a structure that the electrically conductive film 20 is buried between the first molding member and the second molding member and the planar part 6 of the first molding member 10 is molded integrally with the projected line part 2. The plasma generating electrode 40 is obtained by stacking the moldings 15 one after another to obtain a stacked material, placing an electrically conductive film-buried planar molding 30 on the uppermost surface of the stacked material and baking/integrating the molding 30-placed stacked material. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供可以以高生产率制造的等离子体产生电极的模制件,能够产生均匀和稳定的等离子体,并且可以有效地防止由温度变化引起的等离子体产生电极的损坏或 高电压负载并且具有优异的耐热性,并且提供了用于模制成型和等离子体产生电极的方法。 解决方案:用于等离子体发生电极的模制件15通过将第一模制构件10的背面压缩固定/整合在一起来模制,该第一模制构件10的背面包括具有梳状突起线部分2的电介质材料, 平面部分6与包括平面电介质材料的第二模制构件12连接,而由电导体构成的导电膜20插入在第一模制构件和第二模制构件之间。 结果,该成型体具有将导电膜20埋设在第一成形部件和第二成形部件之间的结构,并且第一成型部件10的平面部分6与突出的线部分2一体地模制。 等离子体产生电极40通过一个接一个地堆叠成型体15而获得堆叠的材料,将导电的薄膜掩埋的平面模制件30放置在堆叠的材料的最上表面上,并对模制的30放置的堆叠材料进行烘烤/整合。 版权所有(C)2005,JPO&NCIPI