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1. 发明申请

WO2004063698A3 SYSTEM FOR DETECTION OF WAFER DEFECTS 审中-公开
标题翻译：用于检测缺陷的系统
公开(公告)号：WO2004063698A3
公开(公告)日：2007-11-01
申请号：PCT/IL2004000023
申请日：2004-01-11
申请人： NEGEVTECH LTD , FURMAN DOV , NEUMANN GAD , WAGNER MARK , DOTAN NOAM , SEGAL RAM , SILBERSTEIN SHAI
发明人： FURMAN DOV , NEUMANN GAD , WAGNER MARK , DOTAN NOAM , SEGAL RAM , SILBERSTEIN SHAI
IPC分类号： G01N21/88 , G01N20060101 , G01N1/00 , G01N21/95 , G01N21/956 , H01L21/20 , H01L21/66 , H04B10/08
CPC分类号： G01N21/9501 , G01N21/8806 , G01N21/95607 , G01N21/95623 , G01N2021/479 , G01N2021/8825 , G01N2201/0697 , G01N2201/0826
摘要： The invention concerns on-line electro-optical detection of wafer defects by illuminating a continuously moving wafer with a light pulse from a pulsed laser and imaging the moving wafer onto a focal plane assembly formed as a continuous surface of photo-detectors at the focal plane of the optical imaging system. The laser pulses are of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. A fiber optical illumination delivery system, which reduces the effects of source coherence, is described. Other aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for auto- focusing of the wafer imaging system, and methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.
摘要翻译：本发明涉及通过用来自脉冲激光的光脉冲照射连续移动的晶片并将移动的晶片成像到焦平面组件上的焦平面组件来形成晶片缺陷的在线电光检测，该焦平面组件形成为焦平面处的光电检测器的连续表面的光学成像系统。激光脉冲的持续时间显着短于像素停留时间，使得在晶片运动期间没有有效的图像污迹。描述了减少源相干效应的光纤照明传送系统。该系统的其他方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅里叶平面去除图像的重复特征的方法过滤，以便更容易地检测晶片缺陷。

2. 发明申请

WO2004063796A2 FIBER OPTICAL ILLUMINATION SYSTEM 审中-公开
标题翻译：光纤照明系统
公开(公告)号：WO2004063796A2
公开(公告)日：2004-07-29
申请号：PCT/IL2004000022
申请日：2004-01-11
申请人： NEGEVTECH LTD , FURMAN DOV , NEUMANN GAD , DOTAN NOAM
发明人： FURMAN DOV , NEUMANN GAD , DOTAN NOAM
IPC分类号： G01N21/95 , G02B6/04 , G02B6/42 , G02B27/48 , G02F
CPC分类号： G02B6/4298 , G01N21/9501 , G01N2021/479 , G02B6/04 , G02B6/4206 , G02B27/48
摘要： A fiber optical illumination delivery system, which is effective in reducing the effects of source coherence. The system preferably utilizes either a single bundle of optical fibers, or serial bundles of optical fibers. In the single bundle embodiment, the differences in optical lengths between different fibers of the bundle is preferably made to be equal to even less than the coherence length of the source illumination. In the serial bundle embodiment, the fibers in the other bundle are arranged as groups of fibers of the same length, and it is the difference in lengths of these groups which is made equal to, or even more preferably, less than the overall difference in length between the shortest and the longest fibers in the other bundle. Both of these fiber systems enable construction of illumination systems delivering a higher level of illumination, but without greatly affecting the coherence breaking abilities of the system, thus enabling a generally more applicable system to be constructed.
摘要翻译：光纤照明传输系统，可有效减少源相干效应。该系统优选地利用单束光纤或串联光纤束。在单束实施例中，束的不同光纤之间的光学长度的差优选地被制成等于甚至小于源照明的相干长度。在串联束实施方案中，另一束中的纤维被排列成具有相同长度的纤维组，并且这些组的长度差异等于或甚至更优选小于在另一束中最短和最长纤维之间的长度。这两种光纤系统都能够构建照明系统，提供更高水平的照明，但不会对系统的相干断裂能力产生很大影响，因此能够构建通常更适用的系统。

3. 发明申请

WO2006006148A3 MULTI MODE INSPECTION METHOD AND APPARATUS 审中-公开
标题翻译：多模式检测方法和装置
公开(公告)号：WO2006006148A3
公开(公告)日：2006-04-13
申请号：PCT/IL2005000708
申请日：2005-07-04
申请人： NEGEVTECH LTD , FURMAN DOV , DOTAN NOAM , MIKLATZKY EFRAIM
发明人： FURMAN DOV , DOTAN NOAM , MIKLATZKY EFRAIM
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N2021/8825
摘要： An inspection system for inspecting an object, the system comprising an illuminator including at least one pulsed light source, a detector assembly, and a relative motion provider operative to provide motion of the object relative to the detector assembly, along an axis of motion, the detector assembly comprising a plurality of 2-dimensional detector units whose active areas are arranged at intervals.
摘要翻译：一种用于检查物体的检查系统，所述系统包括照明器，所述照明器包括至少一个脉冲光源，检测器组件和相对运动提供器，其运行以沿着运动轴线提供所述物体相对于所述检测器组件的运动，检测器组件包括多个二维检测器单元，其有效面积间隔地布置。

4. 发明专利

GB2526174A Wide bandwidth GW probe for tube and pipe inspection system 未知
公开(公告)号：GB2526174A
公开(公告)日：2015-11-18
申请号：GB201503975
申请日：2015-03-09
申请人： FURMAN DOV
发明人： FURMAN DOV
IPC分类号： G01N29/04 , G01N29/22 , G01N29/24
摘要： A tube inspection system includes a guided-wave-transducer mechanism (GWTM) 18 that is associated with a tube 14 that is being inspected. The GWTM can have one ring 16a with N guided-wave transducers (GWTs) distributed thereon, and another ring 16b with M guided-wave transducers (GWTs) distributed thereon. A controller excites mechanical waves by the GWTs of the first ring that propagate in the wall of the tube being inspected and along its axis. The GWTs of the second ring obtain received mechanical waves and convert them to electronic signals. The M electronic signals are processed to provide a measured signal in which a wanted mode is enhanced. N and M are integer numbers equal or greater than two and are not the same. A pressing mechanism 17 is arranged on a transducer cylinder 12 to press the plurality of GWTs toward the tube wall.

5. 发明申请

WO2013186768A3 NON-TRAVERSING TUBE INSPECTION SYSTEM 审中-公开
标题翻译：非走行管检查系统
公开(公告)号：WO2013186768A3
公开(公告)日：2014-03-13
申请号：PCT/IL2013000054
申请日：2013-06-10
申请人： ACOUSTICEYE LTD , AMIR NOAM , FURMAN DOV , PRIMACK HAREL , ZILBERMAN SILVIU
发明人： AMIR NOAM , FURMAN DOV , PRIMACK HAREL , ZILBERMAN SILVIU
IPC分类号： G01N9/24
CPC分类号： G01N29/043 , G01M5/0033 , G01M5/0066 , G01N29/24 , G01N2291/0425 , G01N2291/044 , G01N2291/2636
摘要： Tube inspections are performed by combining the use of APR technology with GW technology. The reflections measured by both technologies are compared to each other and used to more specifically identify the type and location of a flaw or anomaly that appears in the interior of the tube. Further, embodiments of novel probes to be used in GW technique for inspecting tubes with mechanical waves having bandwidth that is equal to 150 KHz or more are disclosed.
摘要翻译：通过结合APR技术与GW技术的结合来进行管子检查。通过两种技术测量的反射彼此进行比较，并用于更具体地识别出现在管内部的缺陷或异常的类型和位置。此外，公开了用于GW技术中用于检查具有等于150KHz或更大带宽的机械波的管的新型探针的实施例。

6. 发明公开

EP1588210A4 FIBER OPTICAL ILLUMINATION SYSTEM 审中-公开
标题翻译：光纤照明系统
公开(公告)号：EP1588210A4
公开(公告)日：2007-11-07
申请号：EP04701327
申请日：2004-01-11
申请人： NEGEVTECH LTD
发明人： FURMAN DOV , NEUMANN GAD , DOTAN NOAM
IPC分类号： G02B27/48 , G01N21/95 , G02B6/04 , G02B6/42
CPC分类号： G02B6/4298 , G01N21/9501 , G01N2021/479 , G02B6/04 , G02B6/4206 , G02B27/48
摘要： A fiber optical illumination delivery system, which is effective in reducing the effects of source coherence. The system preferably utilizes either a single bundle of optical fibers, or serial bundles of optical fibers. In the single bundle embodiment, the differences in optical lengths between different fibers of the bundle is preferably made to be equal to even less than the coherence length of the source illumination. In the serial bundle embodiment, the fibers in the other bundle are arranged as groups of fibers of the same length, and it is the difference in lengths of these groups which is made equal to, or even more preferably, less than the overall difference in length between the shortest and the longest fibers in the other bundle. Both of these fiber systems enable construction of illumination systems delivering a higher level of illumination, but without greatly affecting the coherence breaking abilities of the system, thus enabling a generally more applicable system to be constructed.

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