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1. 发明申请

WO2019070120A1 Z-POSITION MOTION STAGE FOR USE IN A SCANNING PROBE MICROSCOPY SYSTEM, SCAN HEAD AND METHOD OF MANUFACTURING 审中-公开
公开(公告)号：WO2019070120A1
公开(公告)日：2019-04-11
申请号：PCT/NL2018/050653
申请日：2018-10-02
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： DEKKER, Albert , VAN RIEL, Martinus Cornelius Johannes Maria , KASTELIJN, Aukje Arianne Annette
IPC分类号： G01Q10/04 , G01Q70/02
摘要： The present document relates to a Z-position motion stage for use in a scanning probe microscopy system. The stage comprises a support element for mounting the z-position motion stage on a scan head, and at least one first actuator mounted on the support element for enabling motion of a probe of the scanning probe microscopy system. The probe is connected to or attachable to the z-position motion stage. The support element and the at least one first actuator are shaped and mounted such as to form a rotation symmetric element which is rotation symmetric around a notional common longitudinal axis. The document further relates to a scan head, a method of manufacturing a z-position motion stage, and a Z-position motion stage obtained with such a method.

2. 发明申请

WO2020009582A8 PROBE CHIP, SCAN HEAD, SCANNING PROBE MICROSCOPY DEVICE AND USE OF A PROBE CHIP 审中-公开
公开(公告)号：WO2020009582A8
公开(公告)日：2020-01-09
申请号：PCT/NL2019/050421
申请日：2019-07-05
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： HERFST, Roelof Willem , BIJNAGTE, Anton Adriaan , DEKKER, Albert , BIEMOND, Jan Jacobus Benjamin
IPC分类号： G01Q70/02 , G01Q70/10
摘要： The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.

3. 发明申请

WO2018101819A1 SCANNING PROBE MICROSCOPY SYSTEM, AND METHOD FOR MOUNTING AND DEMOUNTING A PROBE THEREIN 审中-公开
公开(公告)号：WO2018101819A1
公开(公告)日：2018-06-07
申请号：PCT/NL2017/050788
申请日：2017-11-28
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： SADEGHIAN MARNANI, Hamed , BIJNAGTE, Anton Adriaan , DEKKER, Albert
IPC分类号： G01Q70/02
摘要： A scanning probe microscopy system (1) comprises a probe (2), a scanning head (11) having a first probe holder (21), a probe exchange manipulator (12) having a second probe holder (22), a force generating system (31, 32), and a force control system (41, 42) for controlling the force generating system to provide a resultant force (72) acting on the probe. Said resultant force comprises gas pressure force components and/or electrostatic force components. During probe-demounting or probe -mounting the probe is moving (52) from the first probe holder (21) towards the second probe holder (22), or vice versa, respectively, while neither the first probe holder nor the second probe holder is contacting the probe. Said movement of the probe is driven by said resultant force. The invention allows for automatically mounting and demounting of probes with high speed and with high accuracy.

4. 发明申请

WO2018093262A1 HIGH-PRECISION SCANNING DEVICE 审中-公开
公开(公告)号：WO2018093262A1
公开(公告)日：2018-05-24
申请号：PCT/NL2017/050749
申请日：2017-11-17
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： DEKKER, Albert , BIJNAGTE, Anton Adriaan
IPC分类号： G01Q10/04 , G01Q20/04
摘要： A high-precision scanning device (1) comprises a first linear scanner (11) for providing scanning movements along a first linear scanning axis (21). The first linear scanner comprises a first base frame (31), a first scanning frame (41), two mutually parallel first piezoelectric bending plates (51A, 51B), and two first hinge joints (61A, 61B) having two first hinge axes (71A, 71B), respectively. Under influence of synchronic piezoelectric operation of the two first piezoelectric bending plates, the first scanning frame is being synchronically moved relative to the first base frame along said first linear scanning axis. The scanning device is compact, especially nearby the working areas where the precise scanning movements have to be performed, so that the device can be operable in very tiny working areas.

5. 发明申请

WO2019088833A1 PROBE, METHOD OF MANUFACTURING A PROBE AND SCANNING PROBE MICROSCOPY SYSTEM 审中-公开
公开(公告)号：WO2019088833A1
公开(公告)日：2019-05-09
申请号：PCT/NL2018/050725
申请日：2018-10-31
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： HERFST, Roelof, Willem , DEKKER, Albert , BIJNAGTE, Anton, Adriaan , BIEMOND, Jan, Jacobus, Benjamin
IPC分类号： G01Q70/10
CPC分类号： G01Q70/10 , G01Q70/12
摘要： This document relates to a probe for use in a scanning probe microscopy device. The probe comprises a cantilever and a probe tip being located at a first end section of the cantilever. The cantilever is configured for bending in a Z -direction perpendicular to a surface of a substrate in use. The cantilever comprises a neck section and a paddle section, and the probe tip is located on the paddle section. The neck section has a width and height in cross section thereof, comprises a base part having a rectangular cross section. The cantilever at least across a length of the neck section comprises a ridge extending in a direction away from the base part. The base part and the ridge together define the width and height of the neck section, and have dimensions such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z- direction. The document further describes a manufacturing method.

6. 发明申请

WO2018074922A1 HIGH -PRECISION LINEAR ACTUATOR 审中-公开
标题翻译：高精度直线驱动器
公开(公告)号：WO2018074922A1
公开(公告)日：2018-04-26
申请号：PCT/NL2017/050680
申请日：2017-10-18
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： DEKKER, Albert , BIJNAGTE, Anton Adriaan
IPC分类号： B25J7/00 , B23Q5/00 , H01J37/20 , H02N2/04
CPC分类号： H02N2/04 , B23Q5/00 , B25J7/00 , H01J37/20
摘要： A high-precision linear actuator (1) comprises: a first straight- guide mechanism (11A, 11B, 11C), which guides movements of an actuator element (4) and a working device (6) relative to an actuator housing (3); a pressing mechanism (7, 8, 9), which in a pressing-contact condition presses the actuator frame (2) and the actuator housing (3) with a predetermined force against one another; and a second straight- guide mechanism (12A, 12B), which guides movements of the actuator housing relative to the actuator frame between said pressing-contact condition and released-contact conditions in which the pressing mechanism presses the actuator frame and the actuator housing towards one another. The invention provides a safety mechanism which automatically reinstates negative consequences of unforeseen collisions in the working environment. In addition the invention allows for a compact and light-weight design of the actuator element and the working device, which improves operational speed and effectivity of the linear actuator.
摘要翻译：高精度线性致动器（1）包括：引导致动器元件（4）和工作装置（6）的运动的第一直导向机构（11A，11B，11C）相对于致动器壳体（3）; （7,8,9），其在压力接触状态下以预定的力相互抵靠所述致动器框架（2）和所述致动器壳体（3）;其中，和第二直线引导机构（12A，12B），其在致动器壳体相对于致动器框架在所述按压接触状态和释放接触状态之间引导致动器壳体的运动，在所述压迫接触状态中，加压机构将致动器框架和致动器壳体朝向另一个。本发明提供了一种自动恢复工作环境中不可预见的碰撞的负面后果的安全机构。此外，本发明允许致动器元件和工作装置的紧凑和轻重量设计，这提高了线性致动器的操作速度和有效性。

7. 发明申请

WO2016003282A1 METHOD OF POSITIONING A CARRIER ON A FLAT SURFACE, AND ASSEMBLY OF A CARRIER AND AN POSITIONING MEMBER 审中-公开
标题翻译：在平坦表面上定位载体的方法，以及载体和定位构件的组装
公开(公告)号：WO2016003282A1
公开(公告)日：2016-01-07
申请号：PCT/NL2015/050488
申请日：2015-07-03
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： SADEGHIAN MARNANI, Hamed , WINTERS, Jasper , CROWCOMBE, William Edward , VAN DEN DOOL, Teunis Cornelis , KRAMER, Geerten Frans Ijsbrand , DEKKER, Albert
IPC分类号： G01Q70/02 , B23Q1/26 , B23Q16/00 , F16M7/00 , F16M11/04
CPC分类号： G01Q70/02 , F16M7/00 , F16M11/043 , F16M11/18 , F16M11/2085 , F16M11/2092 , F16M11/24 , F16M2200/08
摘要： Method of positioning a carrier on a flat surface, and assembly of a carrier and an positioning member. The invention is about a method of positioning a carrier on a flat surface using an positioning member, wherein the carrier comprises an upper part and a base, wherein the positioning member is arranged between the base and the upper part, wherein the upper part comprises three engagement elements, and wherein the positioning member comprises a support surface including a plurality of sockets forming a kinematic mount for said three engagement elements, the method comprising the steps of: performing an action of placing the carrier on the flat surface at a landing position.
摘要翻译：将载体定位在平坦表面上的方法，以及载体和定位构件的组装。本发明涉及一种使用定位构件将载体定位在平坦表面上的方法，其中载体包括上部和底部，其中定位构件布置在基部和上部之间，其中上部包括三个接合元件，并且其中所述定位构件包括支撑表面，所述支撑表面包括形成用于所述三个接合元件的运动安装座的多个插座，所述方法包括以下步骤：执行将所述托架放置在平坦表面处于着陆位置的动作。

8. 发明申请

WO2020009582A1 PROBE CHIP, SCAN HEAD, SCANNING PROBE MICROSCOPY DEVICE AND USE OF A PROBE CHIP 审中-公开
公开(公告)号：WO2020009582A1
公开(公告)日：2020-01-09
申请号：PCT/NL2019/050421
申请日：2019-07-05
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： HEREST, Roelof Willem , BIJNAGTE, Anton Adriaan , DEKKER, Albert , BIEMOND, Jan Jacobus Benjamin
IPC分类号： G01Q70/02 , G01Q70/10
摘要： The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.

9. 发明申请

WO2018212645A8 SCANNING PROBE MICROSCOPY SYSTEM FOR AND METHOD OF MAPPING NANOSTRUCTURES ON THE SURFACE OF A SAMPLE 审中-公开
公开(公告)号：WO2018212645A8
公开(公告)日：2018-11-22
申请号：PCT/NL2018/050316
申请日：2018-05-14
申请人： NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人： SADEGHIAN MARNANI, Hamed , KASTELIJN, Aukje, Arianne, Annette , TOET, Peter Martijn , KRAMER, Geerten Frans Ijsbrand , NIEUWKOOP, Evert , DEKKER, Albert , VAN RIEL, Martinus Cornelius Johannes Maria , KRUIDHOF, Rik
IPC分类号： G01Q20/02 , G01B9/02
摘要： The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

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