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1. 发明专利

JPS62247849A AIR INJECTION NOZZLE FOR AIR SHOWER DEVICE 失效
公开(公告)号：JPS62247849A
公开(公告)日：1987-10-28
申请号：JP8946086
申请日：1986-04-18
申请人： NEC CORP , SANKI ENG CO LTD , FUJI ELECTRIC CO LTD
发明人： SEKINE TOSHIHARU , UCHIYAMA KENTARO , SEKINE MAKOTO , FUJITA KIWA
IPC分类号： B08B5/02 , B05B3/04
摘要： PURPOSE:To shower an object to be cleaned uniformly with air and to quickly and efficiently remove dust by positioning an air injection port eccentrically from the center of a barrel body, and rotationally driving a looper barrel body around the central axis. CONSTITUTION:The looper barrel body 31 of the air injection nozzle 3 of an air shower device to be provided to outlet and inlet passages, etc. of a clean room is made into a cylindrical body and the air injection port 32 opened to the top end thereof is opened in the angular position offcentered by a certain angle theta from the central axis O of the body 31. The body 31 is supported to a mounting means 8 rotatably around the central axis O by means of guide rollers 9 to rotate the body 31 by a rotating value 10. The jet air flow ejected from the air injection nozzle to the object to be cleaned is blown over a wide range without changing the injection angle, by which the dust is quickly and efficiently removed without, generating a dead angle.

2. 发明专利

JPH09327615A EXHAUST GAS TREATMENT APPARATUS 失效
公开(公告)号：JPH09327615A
公开(公告)日：1997-12-22
申请号：JP14927396
申请日：1996-06-11
申请人： NEC CORP
发明人： UCHIYAMA KENTARO
IPC分类号： B01D53/34 , B01D53/18 , B01D53/77 , C23C16/44
摘要： PROBLEM TO BE SOLVED: To make loading of a gas-liquid contact part hardly occur and improve the exhaust gas treatment efficiency by generating swirl in a cleaning liquid staying in a treatment tower, discharging the treatment liquid in the center of the swirl, in which a large quantity of impurities exist, to the outside, and re-circulating the treatment liquid in the peripheral part of the swirl, in which a little quantity of impurities exist, as the treatment liquid. SOLUTION: Exhaust gas from a plant led in the inside of a treatment tower 2 by a waste gas blower 1 is brought into contact with a cleaning liquid discharge out of nozzles 7, 13 by gas-liquid contact and the resultant cleaning liquid 14 containing impurities is accumulated in the bottom part of the treatment tank 2. A stirring apparatus 17 installed in the bottom and center part of the treatment tank 2 to rotate the cleaning liquid 14 and generate swirl. By the swirl, reaction products and powder impurities 16 which are not dissolved in the cleaning liquid 14 are concentrated in the center part of the swirl and the cleaning liquid in the peripheral part of the swirl becomes a clean liquid with relatively small amounts of impurities. Consequently, the cleaning liquid in the center part of the swirl and containing a large quantity of impurities is discharged out of the treatment tower 2 through a discharge outlet 18 and the clean cleaning liquid in the peripheral part of the swirl is re-used through a cleaning liquid circulation aperture 6.

3. 发明专利

JPH06347396A SYSTEM AND METHOD FOR DUST CONCENTRATION REGULATION 失效
公开(公告)号：JPH06347396A
公开(公告)日：1994-12-22
申请号：JP13973693
申请日：1993-06-11
申请人： NEC CORP
发明人： UCHIYAMA KENTARO
IPC分类号： F24F7/06 , G01N15/06 , H01L21/02
摘要： PURPOSE:To reduce dust contamination of the periphery of a product most needing dust regulation to the minimum and to utilize it for analysis of a cause of abnormal dust in the dust concentration regulation of a clean room. CONSTITUTION:A sensor unit 3 which has a dust concentration measuring sensor 4 for regulating dust concentration in air in a clean room 1 and an oscillator 5 for transmitting dust concentration data measured by the 4 is contained in a casing 3' of substantially the same shape as that of a product carrier 2', transported and stocked together with the carrier 2'. The data generated from the oscillator 5 is received by a receiver 10 of a monitoring unit 9, stored in a dust concentration memory 11, displayed on a dust concentration display monitor 12, and if the concentration is abnormal, an alarm is output from an alarm unit 14.

4. 发明专利

JPH08200738A AIR CONDITIONER 失效
公开(公告)号：JPH08200738A
公开(公告)日：1996-08-06
申请号：JP1313495
申请日：1995-01-30
申请人： NEC CORP
发明人： NOGUCHI YOSHINARI , UCHIYAMA KENTARO
IPC分类号： F24F3/14 , F24F3/153 , F24F3/16 , F24F7/06
摘要： PURPOSE: To omit about 25% of the maximum value energy effect by conserving cooling or heating energy to be consumed, and utilizing energy reciprocal to the cooling or heating without using external substitute energy in an air conditioner for a clean room for manufacturing semiconductor. CONSTITUTION: A route duct 15 branched from a return air route 7 to an air conditioner 13 is provided in an external air conditioner 2 in addition to a conventional external air introducing route 1 in the air conditioning particularly in an intermediate season and winter, and hence the energy for the external air conditioning is remarkably reduced by cancelling by the mixing effect of the introduced atmosphere and the return air at the inlet of the conditioner 2. The part of the return air including the internal heating load is branched to the conditioner 2 to reduce the absolute amount for conditioning by the conditioner 3. The conditioning energy is reduced proportionally thereto.

5. 发明专利

JPH05346239A 失效
公开(公告)号：JPH05346239A
公开(公告)日：1993-12-27
申请号：JP15487492
申请日：1992-06-15
申请人： NEC CORP
发明人： UCHIYAMA KENTARO
IPC分类号： F24F3/16 , F24F3/00
摘要： PURPOSE:To improve efficiency of removing impurities by a chemical filter in an air conditioning system suitable for a clean room which is incorporated with the chemical filter. CONSTITUTION:Air sent by an air conditioner 11 is fed to a clean room 13 through a high quality filter 12 and returned to the air conditioner 11 from an raised floor 14 surface. Just below the upraised floor 14 in an area in which impurities are generated, a chemical filter 18 is placed so that the chemical filter 18 can absorb the impurities.

6. 发明专利

JPH09141035A DEVICE TO REMOVE SILOXANE 失效
公开(公告)号：JPH09141035A
公开(公告)日：1997-06-03
申请号：JP30533595
申请日：1995-11-24
申请人： NEC CORP
发明人： UCHIYAMA KENTARO
IPC分类号： B01D51/00 , B01D46/52 , B01D53/32
摘要： PROBLEM TO BE SOLVED: To easily remove siloxane in air by changing gaseous siloxane into a particulate state. SOLUTION: Gaseous siloxane is scattered in a clean room 10 from a silicone gel 11 and a silicone seal 9 which are used to tightly seal the clean room 10. By disposing an electrode body 1 having a discharge electrode 2 between an air blower 4A and a high-performance filter 3 in the clean room 10, the gaseous siloxane is changed into a particulate state and then collected by the high- performance filter 3 in the succeeding stage.

7. 发明专利

JPH1147754A METHOD AND APPARATUS FOR STERILIZING PIPING 失效
公开(公告)号：JPH1147754A
公开(公告)日：1999-02-23
申请号：JP22062497
申请日：1997-07-31
申请人： NEC CORP
发明人： UCHIYAMA KENTARO
IPC分类号： C02F1/20 , C02F1/50 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To sterilize the whole piping system while continuously used at a use point by injecting ozone from the supply piping of a system outlet in a pure water supply system not only to sterilize the whole piping system but also to remove ozone in pure water and dissolved oxygen generated by the decomposition of ozone in the vicinity of the use point. SOLUTION: In this piping sterilizing system, ozone is injected into a supply piping system from an ozone generator 9 provided so as to be adjacent to the outlet of a UF apparatus corresponding to the outlet of a supply system to sterilize the interior of a piping and, since pure water containing no ozone is required at a use point 5, a UV lamp 10 for decomposing ozone to oxygen and a memberane degassing apparatus 11 for removing dissolved oxygen generated by decomposition are provided at a position adjacent to the use point 5.

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