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    • 3. 发明专利
    • DE69202554D1
    • 1995-06-22
    • DE69202554
    • 1992-12-24
    • NEC CORP
    • BABA TOSHIOUEMURA TETSUYA
    • H01L29/739H01L29/72
    • The tunnel transistor of the present invention has either a junction structure wherein a degenerated first semiconductor having one conduction type, a non-degenerated second semiconductor and a degenerated third semiconductor having the reverse conduction type to that of the first semiconductor are connected on a substrate or a laminated layer structure comprising a degenerated first semiconductor having one conduction type, a non-degenerated second semiconductor and a degenerated third semiconductor of the reverse conduction type to that of the first semiconductor all laminated on a part of a substrate. The tunnel transistor further includes a fourth semiconductor layer formed on an exposed surface of the second semiconductor, having a forbidden band wider than that of the second semiconductor and containing an ionized impurity therein, a gate electrode formed on the fourth semiconductor layer, and a pair of electrodes individually forming ohmic junctions to the first and third semiconductors. Due to the construction, even when the gate voltage is 0, electrons or positive holes are induced in the surface of the second semiconductor, and a tunnel current can be flowed between the source and the drain. Since control of the tunnel current can then be performed by applying a reverse bias voltage between the gate and the drain, the leak current of the gate can be suppressed.
    • 4. 发明专利
    • DE69202554T2
    • 1995-10-19
    • DE69202554
    • 1992-12-24
    • NEC CORP
    • BABA TOSHIOUEMURA TETSUYA
    • H01L29/739H01L29/72
    • The tunnel transistor of the present invention has either a junction structure wherein a degenerated first semiconductor having one conduction type, a non-degenerated second semiconductor and a degenerated third semiconductor having the reverse conduction type to that of the first semiconductor are connected on a substrate or a laminated layer structure comprising a degenerated first semiconductor having one conduction type, a non-degenerated second semiconductor and a degenerated third semiconductor of the reverse conduction type to that of the first semiconductor all laminated on a part of a substrate. The tunnel transistor further includes a fourth semiconductor layer formed on an exposed surface of the second semiconductor, having a forbidden band wider than that of the second semiconductor and containing an ionized impurity therein, a gate electrode formed on the fourth semiconductor layer, and a pair of electrodes individually forming ohmic junctions to the first and third semiconductors. Due to the construction, even when the gate voltage is 0, electrons or positive holes are induced in the surface of the second semiconductor, and a tunnel current can be flowed between the source and the drain. Since control of the tunnel current can then be performed by applying a reverse bias voltage between the gate and the drain, the leak current of the gate can be suppressed.
    • 8. 发明专利
    • DE69218893T2
    • 1997-09-04
    • DE69218893
    • 1992-12-02
    • NEC CORP
    • UEMURA TETSUYA
    • H01L29/73H01L21/331H01L29/66H01L29/737H01L29/739
    • A tunneling transistor comprising an emitter layer, a barrier layer having a conduction band higher in energy than a conduction band of said emitter layer and a valence band lower in energy than a valence band of said emitter layer, and further having a thickness with which electrons can substantially tunnel the barrier layer, a collector layer having a conduction band lower in energy than the valence band of said emitter layer and a conductivity type opposite to said emitter layer, and further having a thickness with which quantum levels are substantially formed, a gate layer having a conduction band higher in energy than the conduction band of said layer and a valence band of said emitter layer, and further having a thickness with which the probability of electron tunneling is substantially greatly reduced, said layers been laminated in this order, and electrodes which form ohmic junctions on said emitter layer and said collector layer and an electrode which forms a Schottky junction on said gate layer.
    • 9. 发明专利
    • DE69218893D1
    • 1997-05-15
    • DE69218893
    • 1992-12-02
    • NEC CORP
    • UEMURA TETSUYA
    • H01L29/73H01L21/331H01L29/66H01L29/737H01L29/739
    • A tunneling transistor comprising an emitter layer, a barrier layer having a conduction band higher in energy than a conduction band of said emitter layer and a valence band lower in energy than a valence band of said emitter layer, and further having a thickness with which electrons can substantially tunnel the barrier layer, a collector layer having a conduction band lower in energy than the valence band of said emitter layer and a conductivity type opposite to said emitter layer, and further having a thickness with which quantum levels are substantially formed, a gate layer having a conduction band higher in energy than the conduction band of said layer and a valence band of said emitter layer, and further having a thickness with which the probability of electron tunneling is substantially greatly reduced, said layers been laminated in this order, and electrodes which form ohmic junctions on said emitter layer and said collector layer and an electrode which forms a Schottky junction on said gate layer.